Micro Mechanical Valve Series VM1000

EXH.1 (C1) 2 (C2) 4 93.7 23 19 VH 18.5 18.5 12 CYL.2 CYL.1 14 12 21 20 3 (E1) 1 (S) 5 (E2) VHS 0.5 MPa supply 30.5 26.4 3 x 1/4 VHS T.T.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators C2 2 x P (Rc, NPT, G) M5 x 0.8 Effective thread length 2 x FL Width across flats B2 2 x NN B (This drawing shows the cases of 20 and 25.)

SMC Pneumatic Clean Series

MM Relief port FX 20, 25 Eh8 D FZ I 20 to 32 Standard port Relief port Width across flats NA 4-FD 45 1.5 AL 32, 40 A F N K N S + Stroke FT H FY Z + Stroke ZZ + Stroke 40 (mm) 4 7 FD E 20-0.033 0 52 40 40 34 B FX FZ FY G FT 13 8 AL D K MM NA NN B1 B2 Bore size ZZ Z H H2 H1 S P N I F C2 A 66 60 60 60 75 75 75 11 8 8 8 40 32 25 20 24 22 22 18 50 45 45 41 8 8 8 6 6 5 22 17 17 13 41 32 32 26

7ND9071en

Connections 1/4 NPT (S, C1, C2), converts also ND91_ connections to1/4 NPT. RC03 H127093 Cable assembly remote mount sensor cable 30 m, angle connector D3 D3B As D3 but two pressure gauges with connections 1/4 NPT (S, C2).

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

(If not specifying dimension C2, indicate instead.)

SV

With External Pilot Specifications (Pitch) 24 P = 24 48.6 11 25 11.8 20 14.5 13.7 E 3/5 E 3/5 E 3 E 3 4 A A 4 A 4 A 4 A 4 A 4 A 4 A 4 4 A A 4 35.8 40.4 35 58.3 63.9 74.8 B 2 B 2 B 2 B 2 B 2 P 1 P 1 B 2 B 2 B 2 B 2 P 1 P 1 B 2 C2 C2 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, 5/16" 10, 3/8" 12 X PE X PE

Series SV

With external pilot specification (Pitch) P = 10.5 13.5 46.9 14.1 8.4 18.3 11.8 8.6 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 9.5 19.7 24.6 23 3 5 E 5 3 E 3 5 E 5 3 E 43.2 43 56.5 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 C2 C2 1 P 1 P 1 P 1 P One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 8 N9 X PE PE x 2-M12 C1 C1 One-touch fitting [PE: Pilot EXH port] Applicable tubing O.D.:

Possible to transfer a workpiece at low-speed.

(If not specifying dimension C2, indicate instead.)

ZP3

w q ZP3 T N 04 B5 e Connection thread (Female thread) M5 x 0.8 Width across flats D B5 M5 x 0.8 5 Model A B C2 D Vacuum inlet direction q Pad dia.

CRQ2

Q1= M L1 (3 x P) C1 = C C2 = C Y = C2 Y = L2 = C2 = C L2 = L2 (3 x P) L1 = X = Q2 = M D2 = (mm) (mm) (mm) Y 1 to 9 1 to 10 D2 Q1 M3, M4 M3, M4, M5 Q2 M3, M4 M3, M4, M5 L2 max Y Y Y 6 to 9 7.5 to 10 Size 10 15 Size 10 15 Size 10 15 L1 max X 2 X 2 X 8 to 18 9.5 to 20 L2 max Y Y 3.5 to 4.9 3.5 to 5.9 11-8-13 14 Series CRQ2 (Size: 10, 15, 20, 30, 40) Simple Specials: -XA1 to -XA24: Shaft Pattern

Sensor Range: 0 [Positive Pressure (0~1MPa)], Accuracy: ±2%F.S., Port Size: R06 (Ø6 Plug-In Reducer)

Sensor Range: 0 [Positive Pressure (0~1MPa)], Accuracy: A (±1%F.S.), Port Size: R06 (Ø6 Plug-In Reducer)

Output Specification: 10 (For Positive Pressure), Port: R06 (ø6 Reducer)

Output Specification: 10 (For Positive Pressure), Port: R06 (ø6 Reducer), CE Marked: Q (CE Marked)

Sensor Range: 1 [For Vacuum (0~-101kPa)], Accuracy: ±2%F.S., Port Size: R06 (Ø6 Plug-In Reducer)

Sensor Range: 3 [For Compound Pressure (-100~100kPa)], Accuracy: ±2%F.S., Port Size: R06 (Ø6 Plug-In Reducer)

Sensor Range: 1 [For Vacuum (0~-101kPa)], Accuracy: A (±1%F.S.), Port Size: R06 (Ø6 Plug-In Reducer)

Output Specification: 11 (For Vacuum, Low Pressure), Port: R06 (ø6 Reducer)

Output Specification: 11 (For Vacuum, Low Pressure), Port: R06 (ø6 Reducer), CE Marked: Q (CE Marked)

Output Specification: 12 (For Vacuum), Port: R06 (ø6 Reducer), CE Marked: Q (CE Marked)