3 Way, 3 Port NVF110 Series Direct Solenoid Operated

D I N 'E Terminal 'T Conduit Temlnal 'H 24' Lead hing 01 %'(AXSrd.) t M5 NOM 10-32 ilanual Overrida _Recessed, Nonlocking (Std.)

3M/SMseries

200VAC 5%oHz C-110V4C5%oHz tl 220VAC 6%oHr 5 24VDC 612VDC 9'OtherB ' Spcial ordr How To Order Pilot Valve sF4 50 _ _Non_tccking push type BSlotted locking type CKnob locking type t'100V C'%oHz t _ 2ou,,h$.oaoHz 3-t10vAcr%oHz a22O,D.C'%otta 5 2itVDC Gt2v0c I -Olher!

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: [Rc (R)] Rc, Port Size: 1/8, Pressure Rating(MPa): 0 to 1.0, Driving Type: Linear Motion Poppet, Seal Type: Soft Seal, Plumbing: Direct

Body Ported), Voltage: 5 (24VDC), Electrical Entry: G (Grommet), Orifice Size: 40 (4mm), Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)]

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Port size 1(IN), 2(OUT) port H G 2 x M5 thread depth N G 2 x M5 thread depth N WN: M12 connector F K D C J E IN A 2 x Port size 1(IN), 2(OUT) port B H G 2 x M5 thread depth N Glossary of Terms [mm] Size Port size A B C D E F G H N 20 1/8 14 30 69.2 36 9 18 15 17.5 6.4 1/4 19 40 67.7 22.2 22.2 7.6 3/8 22 48 70.7 11 19 20.6 6 30 1/4 19 40 76.7 42 9 21 22.2 22.2 7.6 3/8 22 48 79.7 11 19 20.6

IR1000/2000/3000

Description IR1000 IR1010 IR1020 IR2000 IR2010 IR2020 / 2120 IR3000 IR3010 IR3020 / 3120 Bracket P36201023 P36202028 P36203018 Pressure gauge G33-2-01 G33-4-01 G43-4-01 G43-4-01 G33-10-01 G43-2-01 G43-10-01 G43-2-01 G43-10-01 Accuracy 3% (full span) 2 Series IR1000/2000/3000 Construction IR1000 IR2000 IR3000 Fixed throttle SUP side passage OUT side passage SUP side passage SUP side passage

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Shock absorber

ZQ-OM01401

-40 10 -20 -20 5 0 0 0 0.2 0.3 0.4 0.5 0 1 2 3 4 5 6 [MPa] [L/min (AMR) ] ZQ07A 0.43MPa -100 40 -100 35 -80 [L/min (AMR) ] -80 [L/min (AMR) ] 30 [kPa] [kPa] -60 25 -60 20 -40 -40 15 10 -20 -20 5 0 0 0 0 2 4 6 8 10 12 0.2 0.3 0.4 0.5 [MPa] [L/min (AMR) ] ZQ10A 0.43MPa -100 70 -100 60 -80 [L/min (AMR) ] -80 [L/min (AMR) ] [kPa] [kPa] 50 -60 -60 40 -40 30 -40 20 -20 -20 10 0 0 0

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: G, Port Size: 1/8, Pressure Rating(MPa): 0 to 1.0, Driving Type: Linear Motion Poppet, Seal Type: Soft Seal, Plumbing: Direct Plumbing

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: NPT, Port Size: 1/8, Pressure Rating(MPa): 0 to 1.0, Driving Type: Linear Motion Poppet, Seal Type: Soft Seal, Plumbing: Direct Plumbing

Body Ported, Voltage: 24VDC, Electrical Entry: Grommet, Orifice Size: 4mm, Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)], Thread Type: NPTF, Body/Seal Material: Body SUS, Seal FKM, Option: -

Body Ported), Voltage: 5 (24VDC), Electrical Entry: G (Grommet), Orifice Size: 40 (4mm), Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)], Thread Type: F (G), Body/Seal Material: H (Body SUS, Seal FKM)

Body Ported), Voltage: 5 (24VDC), Electrical Entry: G (Grommet), Orifice Size: 40 (4mm), Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)], Thread Type: T (NPTF), Body/Seal Material: H (Body SUS, Seal FKM)

Body Ported), Voltage: 5 (24VDC), Electrical Entry: G (Grommet), Orifice Size: 40 (4mm), Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)], Thread Type: N (NPT), Body/Seal Material: H (Body SUS, Seal FKM)

VCA

Series VCA30/40 Series VCA30 Series VCA40 Material Description Description No. Part no. AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 No. Part no.

VCA

Series VCA30/40 y t r e q w Series VCA30 Series VCA40 Description No. Description No. Part no. AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 Material Part no.

Body Ported, Voltage: 24VDC, Electrical Entry: Grommet, Orifice Size: 4mm, Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)], Thread Type: Rc, Body/Seal Material: Body C37, Seal FKM, Option: Foot Bracket

Body Ported), Voltage: 5 (24VDC), Electrical Entry: G (Grommet), Orifice Size: 40 (4mm), Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)], Thread Type: Rc, Body/Seal Material: Body C37, Seal FKM, Option: F (Foot Bracket)

Body Ported), Voltage: 5 (24VDC), Electrical Entry: G (Grommet), Orifice Size: 23 (2.3mm), Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)], Thread Type: Rc, Body/Seal Material: H (Body SUS, Seal FKM)

Body Ported, Voltage: 12VDC, Electrical Entry: Grommet, Orifice Size: 4mm, Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)], Thread Type: Rc, Body/Seal Material: Body SUS, Seal FKM, Option: -