VFS

pilot External pilot Nil Option How to Order Pilot Valve Assembly Option SF4 F 1 22 Coil rated voltage 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC 7 240 VAC, 50/60 Hz 9 Other Option Refer to page 3-8-5 for voltage conversion. 3-8-100 101 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VFS6000 Cylinder

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

(Except D-P5DWL) A L F G D MU Bore size 32 40 50 63 80 100 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm DMounting brackets are shipped together, (not assembled).

CL

Bore e f 1 to 50 68 72 72 77 51 to 100 81 85 85 90 101 to 150 93 97 97 102 151 to 200 106 110 110 115 201 to 300 131 135 135 140 301 to 400 156 160 160 165 401 to 500 185 185 190 51 to 100 25 25 25 25 101 to 150 37.5 37.5 37.5 37.5 151 to 200 50 50 50 50 201 to 300 75 75 75 75 301 to 400 100 100 100 100 401 to 500 125 125 125 1 to 50 12.5 12.5 12.5 12.5 20 25 32 40 68 72 72 77 35 35 35

5 Port Solenoid Valve Series SY3000/5000/7000/9000

rate: 50% Stroke 300 mm Series MB, CA2 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation SY3140-01 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5140-02 800 700 600 500 400 300 200 100 0 SY7140-03 800 700 600 500 400 300 200 100 0 SY9140-04 Cylinder is in extending.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(For details, refer to page 100.) CEcompliant DC AC 43 Body Ported 10-SY3000/5000/7000/9000 Specifications Directional Control Valves Air Grippers Modular F. R.

1

P CXWM10, CXWL10 4-J Herical insert thread depth K F P 4-M4 x 0.7 Helical insert thread depth 6 CXWM16 CXWL16 F 25 35 32.5 37.5 42.5 55 67.5 80 F 34.5 47 53 53 65.5 78 90.5 103 P 25 30 60 75 90 90 90 90 P 52 52 65 90 90 90 90 90 I I CXWM10 CXWL10 Stroke 25 mm 50 mm 75 mm 100 mm 125 mm 150 mm 175 mm 200 mm Stroke 25 mm 50 mm 75 mm 100 mm 125 mm 150 mm 175 mm 200 mm F 21 26 26 26 F 35.5 38

Tie-rod Type Hydraulic Cylinder

2 M27 x 2 38 6.5 140 19 27 20 16 112 35.5 16 24 12 35 34 1/2 27 35 32 77 137 8 160 43 100 M16 x 2 M33 x 2 42 9 174 22 28 24 20 140 45 18 27 12 38 38 3/4 36 40 36 94 155 8 (mm) Without rod boot With rod boot Bore size (mm) H l ZZ e f h ZZ 40 66 185 55 25 92 211 50 73 201 60 28 99 227 1/4 stroke 63 80 212 65 30 106 238 80 90 236 80 32 116 262 100 100 258 100 35 123 281 1/5 stroke 125 100 261

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

Series CH2E/CH2F/CH2G/CH2H Limit stroke charts/Bore sizes 32, 40 Symbol Mounting orientation Symbol Mounting orientation Symbol Mounting orientation Symbol Mounting orientation F F F F F F F F F F F Bore size 32 B rod 2000 5 2 4 8 3 7 1 1000 6 500 Stroke (mm) 100 50 10 0.1 0.5 1 5 10 20 Load (kN) Bore size 40 B rod C rod 2 4 3 7 3 7 5 2000 4 8 1 5 8 6 2 1 1000 6 500 Stroke (mm) 100 50 0.5

C85

40) (100) 89 0.5 W W W F 10.0 (40) (40) (40) 74 36 0.7 93 (40) 54 37 26 33 0.3 69 G 41 27 39 19 25 0.5 52 C8525 33 22 32 15 20 0.7 C8520 43 1.0 Foot: L Rod side flange: F Head side flange: G (100) (40) (40) (40) (40) (100) 0.3 L (100) (40) (40) (40) (40) (100) 0.5 W W F W (100) (40) (40) (40) (40) (100) 0.7 (40) (40) (40) (100) 79 38 0.3 0.1 G (40) (40) 60 29 37 0.5 76 600 500 400 300 1000

CM2

With Rod Boot Data l Z Symbol h B3 e f Stroke Bore size (mm) 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 36 17 30 68 81 93 106 131 156 181 12.5 25 37.5 50 75 100 125 160 173 185 198 223 248 273 25 36 17 32 72 85 97

7

9 100 12 100 12 100 15 100 15 100 Note 1) Apparent power: The value at ambient temperature of 20C and when the rated voltage is applied.

CQ2

mounting height. 20.5 23.5 M14 X 1.5 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 28.5 20.5 23.5 28.5 26 28.5 33.5 26 28.5 33.5 32.5 35.5 43.5 32.5 35.5 43.5 Standard (mm) Bore (mm) 32 40 50 63 80 100 Stroke range (mm) 5 to 100 5 to 100 10 to 100 10 to 100 10 to 100 10 to 100 O N M I E L A H D F J K P Q S U W Z B C M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 M16 X 2.0 M20 X 2.5 10.5 10 13

MY1

G D Za -X 4-MM 20E1 E1 E4 E4 E3 E3 C E2 E2 F B Data G D Section Za detail (Adjustable range) Section Z detail (Adjustable range) Q P Zb JJ F B3 K B2 H B1 C1 Z B F A L 2 x 2-LD Section Zb detail (Adjustable range) H A H A holding bolt (mm) A 110 131 B 110 130 C 55 65 D 70 80 F 126 149 G H 37 37 Model MY-J50 MY-J63 Applicable bore size MY1B50 MY1B63 90 100 J Mounting direction (1) Mounting

MXQ

Bore size/Stroke (mm) 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Standard type With buffer With end lock Axial piping type With buffer and end lock With buffer, Axial piping type Nil F R (2) P FR (2) Adjuster option FP Nil

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Type of actuation Bracket 1 2 Normally closed Normally open Nil: Without bracket F: With bracket AC specifications (50/60Hz) 1 2 3 4 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] 3 port Thread type For type "W", DC voltage is only available. F Nil Rc G N T NPT NPTF Brackets are not installed.

CNA

CNA63 or more. 0.5 MPa Graph (4) Load in the direction of rod extension Load in the direction of rod retraction m 0.3 MPa Graph (5) F 0.4 MPa Graph (6) m 0.5 MPa Graph (7) F 9-7-6 7 Model Selection Series CNA Selection Graph Graph (5) Graph (2) 0.3 MPa P < 0.4 MPa 0.3 MPa P < 0.4 MPa 1000 1000 500 400 300 500 400 300 100 80 200 200 100 63 CL 80 50 40 100 100 Load weight: m (kg) Load

CNA

CNA63 or more. 0.5 MPa Graph (4) Load in the direction of rod extension Load in the direction of rod retraction m 0.3 MPa Graph (5) F 0.4 MPa Graph (6) m 0.5 MPa Graph (7) F 9-7-6 7 Model Selection Series CNA Selection Graph Graph (5) Graph (2) 0.3 MPa P < 0.4 MPa 0.3 MPa P < 0.4 MPa 1000 1000 500 400 300 500 400 300 100 80 200 200 100 63 CL 80 50 40 100 100 Load weight: m (kg) Load

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Control Valves Air Grippers Modular F.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

ZP 40HB ZP HB ZP HB 40 50 63 80 100 125 F F 4 x 9.5 F 4 x 8 4 x 6 3 x 6.5 4 x 5 G 3 x 4 Y 3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions (mm) Dimensions (mm) Dimensions (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41 28 43 20.5 30 13 63 65 46 68 31.5 50 4.5 21.5 100 103 69 107 47.5 80 35.5 ZP125HB ZP50HB ZP80HB 50 52 36 54

Table of Contents

A B C D E F G H J Bracket dimensions Bracket part no.