Bore Size: 32mm, Port Thread: Bore 10, 15: M Thread, Bore 20, 25, 32, 40: Rc, Stroke: 400mm, Switch Rail: Switch Rail, Auto Switch: Z73--Reed, DC Volt., AC Volt, 2 Wire, LED, Lead Wire or Prewired Connector: 3m, Number: -

Bore Size: 32mm, Port Thread: Bore 10, 15: M Thread, Bore 20, 25, 32, 40: Rc, Stroke: 600mm, Switch Rail: Switch Rail, Auto Switch: Z76--Reed, DC Volt., 3 Wire, LED, Lead Wire or Prewired Connector: -, Number: -

Bore Size: 32mm, Port Thread: Bore 10, 15: M Thread, Bore 20, 25, 32, 40: Rc, Stroke: 200mm, Switch Rail: Switch Rail, Auto Switch: Y7P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Bore Size: 32mm, Port Thread: Bore 10, 15: M Thread, Bore 20, 25, 32, 40: Rc, Stroke: 350mm, Switch Rail: Switch Rail, Auto Switch: Y7BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: -, Number: -

When working with delicate materials such as Silicone wafers, magnetic disks, or LCD substrates, non-shock actuation must be balanced with high speed/throughput. The REA provides the features needed to allow rapid transfer with a speed of up to 300mm/sec but virtually eliminates shock impact. Integrated cushion spears allow smooth acceleration and deceleration, while also simplifying construction

When working with delicate materials such as Silicone wafers, magnetic disks, or LCD substrates, non-shock actuation must be balanced with high speed/throughput. The REA provides the features needed to allow rapid transfer with a speed of up to 300mm/sec but virtually eliminates shock impact. Integrated cushion spears allow smooth acceleration and deceleration, while also simplifying construction

Electric Actuators

a = 1000 L1 (mm) Pitching m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) m a = 2000 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 L3 (mm) 2000 L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load

Table of Contents

a = 1000 L1 (mm) Pitching m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) m a = 2000 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 L2 (mm) Mer Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 L3 (mm) 2000 L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load

LJ1H

of gravity (mm) m a = 2000 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 2000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 2 3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

LJ1H

of gravity (mm) m a = 2000 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 2000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 2 3 Standard Motor/Horizontal Mount Specification Series LJ1H10 Dimensions/LJ1H101PB Scale:

2

3000 Flow rate L/min (ANR) 00 1000 2000 3000 4000 5000 Flow rate L/min (ANR) 0 0 AC60-B Rc1 AC55-B Rc1 AC50-B Rc1 0.6 0.6 0.6 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0 0 0 4000 6000 8000 2000 10 0 4000 6000 8000 2000 10 0 4000 6000 8000 2000 10 0 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min

Table of Contents

The spacing (l ) of the support must be no more than the values shown in the graph on the right. 200 190 (kg) m 180 170 160 l 150 140 (2400) (2400) (2400) (2400) (2400) (2400) 130 120 Weight (m) m l 110 Caution 100 (2000) (2000) (2000) (2000) (2000) (2000) 1. If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation.

Electric Actuator with Integrated Guide

Model Allowable Moment (Nm) Allowable dynamic moment Model Mounting orientation Load movement direction LTF6 200 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a Mep L1 (mm) Pitching 100 m a=1000 a=2000 a=3000 L1 30 20 10 0 Transfer load m (kg) L2 200 a=1000 a=2000 a=3000 Mer L2 (mm) Rolling Yawing 100 m L2 Mer 30 20 10 0 m Transfer load m (kg) 200 a=1000 a=2000 a=3000 L3 (mm) 100

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

2500 300, 400, 500 600, 700, 800 900, 1000, (1100) 1200, (1300, 1400) 1500, (1600, 1700) (1800, 1900), 2000 2500, 3000 300, 400, 500 600, 700, 800 900, 1000, (1100) 1200, (1300, 1400) 1500, (1600, 1700) (1800, 1900), 2000 LEF Stroke [mm] Note 1) LEJ Actuator specifications LEL Work load [kg] Note 2) Horizontal 5 15 25 Max. speed [mm/s] 2000 2000 2000 LEM Max. acceleration/deceleration [mm

Battery-less

kg] Work load [kg] 2000 2000 2000 2000 1500 1500 1500 1500 L4 [mm] L4 [mm] L4 [mm] L4 [mm] L4 1000 1000 1000 1000 X 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500

Electric Actuator/Slider Type

2500 300, 400, 500 600, 700, 800 900, 1000, (1100) 1200, (1300, 1400) 1500, (1600, 1700) (1800, 1900), 2000 2500, 3000 300, 400, 500 600, 700, 800 900, 1000, (1100) 1200, (1300, 1400) 1500, (1600, 1700) (1800, 1900), 2000 Stroke [mm] Note 1) Actuator specications Work load [kg] Note 2) Horizontal 5 15 25 Max. speed [mm/s] 2000 2000 2000 Max. acceleration/deceleration [mm/s2] 20 (Refer to

Serial Network

SV1000/2000/3000 valves.

CATALOG

Note 4) Grommet type (G) is also available for C-kit, single type of VQ0/1000/2000.

SQ1000/2000

) Single solenoid type (SQ1000/2000) 4 position dual 3 port type (SQ1000/2000) 3 position type (SQ1000/2000) Positive COM specification () Positive COM specification SOL.

Single Axis Electric Actuator Series LJ1H

of gravity (mm) m a = 2000 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 2000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 2 Standard Motor/Horizontal Mount Specification Series LJ1H10 Dimensions/LJ1H101PB Scale: