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GS EIecbIC Silicon l'l.bba-(frl-l16) eo> "" 20-;'20 02-2 2~8 ";10 /16 /20 /32 .:,aiSO 04 4 B8 M8 X 1.25 '$'32 ,,~ listO Pad Dia.

Vacuum

Flat with rib Male Thread/Weight List 1 0 12 21 29l 46 20 25 72 3 1 . 7 1 3 1 5 21 29.! 46 20 25 72 1 . 8 1 6 1 8 12.121.5130r 46.4 20 67t 25 72: 26 29 3 l 29 29 30 ZPR16 31 57 61 68 Applicable Tube 64 64 65 68 69 67 70 '5h2" tube may be substituted for4mm.

Vacuum

Flat with rib Male Thread/Weight List 1 0 12 21 29l 46 20 25 72 3 1 . 7 1 3 1 5 21 29.! 46 20 25 72 1 . 8 1 6 1 8 12.121.5130r 46.4 20 67t 25 72: 26 29 3 l 29 29 30 ZPR16 31 57 61 68 Applicable Tube 64 64 65 68 69 67 70 '5h2" tube may be substituted for4mm.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

(A, B port) Applicable tubing O.D.: 4, 5/32" : 6, 1/4" (3.2) 32.3 (Light/surge voltage suppressor) + 23 20 2-2.6 (For mounting) 11 3 28.1 [35.1] 12.7 P R1 15 R2 M5 x 0.8 (P, R1, R2 port) 1.4 (PE port) 21 L plug connector (L): SYJ5 20-L-M5 3 4 5 M plug connector (M): SYJ5 20-M-M5 3 4 5 DIN terminal (D): SYJ5 20-D-M5 3 4 5 M8 connector (W0): SYJ5 20-W0-M5 3 4 5 Approx. 300 (Lead wire length

Series VQ Metal Seal/Rubber Seal Body Ported

) 12 or less 15 or less Single Rubber seal VQ1141 6.3 (0.35) 15 or less 20 or less Metal seal VQ1240 4.5 (0.25) 12 or less 15 or less Double (latching) Rubber seal VQ1241 6.3 (0.35) 15 or less 20 or less Metal seal VQ1340 4.5 (0.25) 20 or less 26 or less Closed center 57 VQ1000 Rubber seal VQ1341 6.3 (0.35) 25 or less 33 or less Metal seal VQ1440 4.5 (0.25) 20 or less 26 or less Exhaust center

Rubber seal 5 Port Solenoid Valve Series SYJ7000

12 43.6 22 22 11.5 34 18 1/4 (R1, R2 port) 31.5 63 M plug connector (M): SYJ7140-M01 02 DIN terminal (D): SYJ7140-D01 02 M8 connector (W0): SYJ7140-W001 02 L plug connector (L): SYJ7140-L01 02 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 91 104.2 Max. .10 57.5 [64.5] 83.5 72.2 42.1 62 M8 x 1 57.1 44.5 (Lead wire length) Approx. 300 68.6 [75.6] 20 20 20 20 Pg7 95.1 [97.3]

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

Type 20 (5 Port/Body ported) How to Order Applicable solenoid valve SYJ320--M3 SYJ323--M3 SS5YJ320 05 A, B port M3 x 0.5 Applicable blanking plate assembly SYJ3000-21-1A Number of stations + + + + 02 2 stations R P R R P R : : P port M5 x 0.8 R port M5 x 0.8 20 20 stations Type 31 (4 Port/Base mounted) How to Order SS5YJ3 31 05 M3 Type 31 Type S31 ( ) Type 31 Type S31 Single solenoid

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Type 20 (5 Port/Body ported) How to Order Applicable solenoid valve SYJ320--M3 SYJ323--M3 SS5YJ320 05 A, B port M3 x 0.5 Applicable blanking plate assembly SYJ3000-21-1A Number of stations + + + + 02 2 stations R P R R P R : : P port M5 x 0.8 R port M5 x 0.8 20 20 stations Type 31 (4 Port/Base mounted) How to Order SS5YJ3 31 05 M3 Type 31 Type S31 ( ) Type 31 Type S31 Single solenoid

IDX-OM-W093

-T IDF70-20-T IDF80-20-T IDF90-20-T M3.5 M4.0 8.5mm 9.5mm IDF60-30-T, IDF70-30-T,IDF80-30-T, IDF90-30-T M3.5 8.5mm [3.2.5 ] IDF60/70/80/90 Series 12-3 IDX-OM-W093 T 12.5 IDF60/70-20-T A B AC 200/200,220V 50/60Hz CM OLR FM MC MC2 PRS PRS2 ILS THR C01 C11 TB CN GFCI EDV PE TDR BK WH GR SY BU IDF80/90-20-T BR B A A B YE AC 200/200,220V 50/60Hz OR G/Y / IDF60/70

Series AK1000

22.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 0 0.00 0 20 40 60 80 Flow rate (slpm, N2) AK1000HF 100 psig (0.69 MPa) 30 psig (0.21 MPa) Inlet pressure: 50 psig (0.34 MPa) 60 0.41 50 0.34 Delivery pressure (psig) Dlivery pressure (MPa) 40 0.28 30 0.21 20 0.14 10 0.07 0 0.00 0 20 40 60 80 100 120 140 160 180 200 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International

<br>Check the part number list below.<br>Ex.) For the DC type with a 300 mm lead wire, the part number will be “SY100-30-4A,” and for the DC type with a 2000 mm lead wire, the part number will be “SY100-30-4A-20.”<br><br>

<br>Therefore, the allowable leakage voltage of the AC type is now 12.5% or less of the rated voltage (compared with 20% or less of the rated voltage for the VS7/VP7).<br>If a leakage voltage exceeding 12.5% of the rated voltage remains in the circuit when the valve is turned OFF, the pilot valve may not recover.

<br>This can be set by selecting the display unit reference when the flow switch is set. <br>Standard: Temperature 20℃, 1 atm (101.3 kPa), Relative humidity 65%<br>Reference: 0℃, 1 atm (101.3 kPa) <br>Note) Only the standard state can be displayed for PFMV series flow switches.

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IDX-OM-U010

During operation: 20 to 45oC During storage: 0 to 50oC (when there is no drain water inside of the piping) Avoid locations where temperature substantially changes. Avoid locations where strong magnetic noise occurs. (Avoid locations where strong electric field, strong magnetic fields, or surge voltage occur).

IDX-OM-W094

7-4 IDX-OM-W094 7.5 IDFA60/70/80/90 Series 7-5 IDX-OM-W094 A 8 A 8.1 8.2 A (10) 8.3 8.4 IDFA60-20-A IDFA70-20-A IDFA80-20-A IDFA90-20-A 10 m 3/min(ANR) 186 300 462 576 10 1) ANR 65% 2) IDFA60/70/80/90 Series 8-1 IDX-OM-W094 A 8.5 IDFA60/70/80/90 Series 8-2 IDX-OM-W094 C 9 C 9.1 9.2 1) 2) IDFA60/70/80/90 Series 9-1 IDX-OM-W094 L 10 L L 10.1 0 () 10.2 ADH4000-04 ADH4000

IDX-OM-W095

10A 15A 20A 30A R410A (HFC) GWP:2088 (6) 39010g 53010g 63010g 78010g 0.1MPa 12mm R1 R1 1/2 R2 49kg 68kg 95kg 110kg 1 2 1 2[3275%] 3 4 5R 30mA 6IPCC4 AR4 R410A GWP2090 7L V1.6MPa IDFC60/70/80/90 Series 7-1 IDX-OM-W095 oC 35 40 45 50 55 60 65 70 75 80 1.58 1.46 1.09 1.00 0.79 0.64 0.55 0.51 0.49 0.47 MPa 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.01.6 0.67 0.79 0.88 0.91 1.00 1.02 1.04 1.09 20

IDX-OM-V020

Do not modify the internal electrical wiring of the product. 12.2 Operation / Error signal output Operation mode signal (Contact output) Operation signal During operation: contact "close" Error signal During error: contact "close" Contact capacity Rated load voltage 240 VAC or less / 24 VDC or less Maximum load current 5A (resistance load) / 2A (inductive load) Minimum applicable load 20

<br>The old IT1000/2000/IT4000 series, however, can be ordered for maintenance purposes (as of May 2021).<br>Despite this, we recommend replacing any old products with a current ITV1000/2000/3000 series product.<br>Note) If the input signal of the old IT series product was a 2-wire type current type, only 4 to 20 mADC signal wiring was required, with power supply wiring not required.

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

(max. 20 stations) 3 SX3000 5 SX5000 Connector mounting position Symbol Mounting position U U side D D side Valve stations A, B port size Note Symbol 02 Stations SX3000 SX5000 2 stations Port size 4 One-touch fitting 6 One-touch fitting Mixed Symbol Port size 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting Mixed Symbol C4 C6 M Double wiring specification C4 C6 C8 M 08 02 8 stations