LG1H Refer to pages starting with 181 for mounting. 30 95 B 100 95 8(4)-6.2 (160) () () 110 95 20 95 A (140) () () A B Stroke Model LG1H202PA-100-F LG1H202PA-200-F LG1H202PA-300-F LG1H202PA-400-F 100 200 300 400 50 150 250 70 170 270 Dimenstions inside ( ) are for a 100 mm stroke. Positioning Time Guide Positioning time Positioning time (sec.)
400 200 VXB215 B E(H) 100 300 400 500 600 200 VXB215 C F(H) 100 300 400 500 600 700 800 200 Flow rate Q [kg/h] How to read the graph The sonic range pressure to generate a flow rate of 300 kg/h is P1 0.3 MPa for the VXB215C F(H).
Cannot connect the speed controller when the indicator window direction is 90 or 270. Refer to page 6 for L8.
300 310.5 17 223.5 280.5 300 310.5 18 234 291 312.5 323 19 244.5 301.5 325 335.5 20 255 312 337.5 348 21 265.5 322.5 350 360.5 22 276 333 362.5 373 23 286.5 343.5 375 385.5 24 297 354 375 385.5 1 55.5 112.5 137.5 148 VV5QC21 (L3) (L4) L2 L1 47 34.5 Manual override Indicator light 76.5 1 38.5 P = 16 ( 12) 13 1 Approx. 5.5 Approx. 10.5 (5.5) 127 Approx. 3.5 105.5 80 (35) (46.5) 50.5 Mounting
300 310.5 17 223.5 280.5 300 310.5 18 234 291 312.5 323 19 244.5 301.5 325 335.5 20 255 312 337.5 348 21 265.5 322.5 350 360.5 22 276 333 362.5 373 23 286.5 343.5 375 385.5 24 297 354 375 385.5 VV5QC21 (L3) (L4) L2 L1 47 34.5 Manual override Indicator light 76.5 1 38.5 P = 16 ( 12) 13 1 Approx. 5.5 Approx. 10.5 (5.5) 127 Approx. 3.5 105.5 80 (35) (46.5) 50.5 Mounting hole for 4-M5 Release
Next, the viscosity of 15 mPs and the discharge rate of 270 mL/min in the required specification example are converted to the amount of discharge for clear water. Since 45% of the clear water discharge is equivalent to 270 mL/min in the required specifications, 270 mL/min 0.45 = approximately 600 mL/min, indicating that a discharge rate of 600 mL/min is required for clear water. 3.
Ventilation direction Ventilation direction ID C IDG Drain tube (O.D.: 0.4 [10 mm], Length: 31.5 [0.8 m]) IDK AMG H L K N 4 x 0.5 [4 x 13 mm] M Power cable with plug (Length: 110 [2.8m]) AFF Dimensions Unit: inch [mm] AM A B C D E F G H J K L M N Q Model Port size 1 11.8 [300] 23.7 [603] 22.8 [578] 1.6 [41] 2.1 [54] 16.6 [396] 3.4 [87] 10.2 [258] 1.7 [43] 0.6 [15] 10.6 [270] 4.0 [101] 15.0
Symbol Rotation angle Symbol Rotation angle 90 Standard 90 IN OUT Nil A IN OUT 90 90 180 180 A IN OUT B IN OUT 180 180 270 270 B IN OUT IN OUT C 270 270 IN OUT C *1 Available for the VXS23 to 26. *2 Bracket is packed in the same container as the main body. *1 Available for the VXS23 to 26. *2 Bracket is packed in the same container as the main body.
Qmax 55.5 C = Qmax: Max. suction flow rate [L/min (ANR)] C: Conductance [dm3/(sbar)] 397 Model Selection Vacuum Equipment Selection Example 7 P Transfer of Semiconductor Chips Selection conditions: (1) Workpiece: Semiconductor chips Dimensions: 8 mm x 8 mm x 1 mm, Mass: 1 g (2) Vacuum piping length: 1 m (3) Adsorption response time: 300 msec or less 1.
SUP = 0.5 MPa 150 SUP = 0.4 MPa SUP = 0.4 MPa 200 SUP = 0.3 MPa SUP = 0.3 MPa 100 SUP = 0.2 MPa SUP = 0.2 MPa 100 50 0 5 0 0 10 0 10 15 20 25 20 30 40 50 Discharge rate (L/min) Discharge rate (L/min) PAF3413 Air Consumption (3 Hz) PAF5413 Air Consumption (2 Hz) 200 Air consumption (L/min [ANR]) Air consumption (L/min [ANR]) 300 150 SUP = 0.5 MPa SUP = 0.5 MPa SUP = 0.4 MPa 200 SUP = 0.4
MHZL2-20 27.6 270 With One-touch fitting With M3 port With M5 port With hose nipple Basic type (tapped in open/close direction) Side ported Side ported Side tapped Flat type finger Through-holes in open/close direction With One-touch fitting for coaxial tubing DMHZL2-25 33.6 470 Closed Series Variations Open Values inside ( ) are for standard series MHZ2. 20Action Bore size (mm) Series A
MHZL2-20 27.6 270 With One-touch fitting With M3 port With M5 port With hose nipple Basic type (tapped in open/close direction) Side ported Side ported Side tapped Flat type finger Through-holes in open/close direction With One-touch fitting for coaxial tubing DMHZL2-25 33.6 470 Closed Series Variations Open Values inside ( ) are for standard series MHZ2. 20Action Bore size (mm) Series A
200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.
291 15 287 274 14 270 257 13 253 240 12 236 223 11 219 206 10 202 189 9 185 172 8 168 155 7 151 138 6 134 121 5 117 104 4 100 87 L plug connector (L) DIN terminal (D) M plug connector (M) Built-in speed controllers (Lead wire length) MAX. 11 300 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 MAX. 10 : With light/surge voltage suppressor 3-3-46 46 5 Port Solenoid Valve Base Mounted
750 20 to 550 10 to 300 Actuator specifications 451 to 500 10 to 600 5 to 300 20 to 900 12 to 600 6 to 300 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 501 to 600 20 to 900 12 to 540 6 to 270 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 601 to 700 20 to 630 12 to 420 6 to 230 24 to 800 16 to 620 8 to 310 30 to 750 20 to 550 10 to 300 Parallel Stroke range
st Over 200 st to 300 st 30 st or less 25 st or less Over 300 st Over 300 st Over 30 st to 100 st Over 25 st to 100 st Over 100 st to 200 st Over 100 st to 200 st Over 200 st to 300 st Over 200 st to 300 st 30 st or less 25 st or less Over 300 st Over 300 st 12 16 20 25 32 40 50 63 300 300 167 167 20 24 24 24 300 300 300 300 171 172 174 174 24 24 24 28 105 105 117 117 40 44 44 44 121
Standard length is 300 mm, but the following lengths are also available.
Standard length is 300 mm, but the following lengths are also available.
72 64 [65.3] 123 87.8 [90.4] 103.8 [106.4] (Lead wire length) 300 41.6 300 54 [60.5] (Lead wire length) [ ] for AC Other dimensions are the same as the grommet style
stations) Dimensions L n 2 49 61 87.5 98 3 68 80 100 110.5 4 87 99 125 135.5 5 106 118 137.5 148 6 125 137 162.5 173 7 144 156 187.5 198 8 163 175 200 210.5 9 182 194 225 235.5 10 201 213 237.5 248 11 220 232 262.5 273 12 239 251 275 285.5 13 258 270 300 310.5 14 277 289 312.5 323 15 296 308 337.5 348 16 315 327 350 360.5 17 334 346 375 385.5 18 353 365 387.5 398 19 372 384 412.5 423 20 391