Electric Actuator/Slider Type

to 200 84.5 205 to 300 102 25 20 to 35 160.5 130 55 25 60 101 123 63.8 12 18.5 16.5 5.4 50.3 125.3 38.3 30 40 M6 x 1.0 10 8.5 40 to 100 68 105 to 120 190.5 160 125 to 200 85 205 to 300 102 32 Size Stroke range (mm) OA OB P Q S T U V WA WB WC X XA XB Y Z 35 26 70 15 to 35 54 4 5 26.5 8.5 40 to 100 50 33.5 105 to 120 95 125 to 200 70 43.5 205 to 300 85 51 25 M6 x 1.0 12 80 18 30 95 6.8 40

MB

B TA TL TU TC TX TE TO TT TR TS TH TF TDH10 MB-S03 32 40 50 63 80 100 125 32 40 50 63 80 100 125 +0.070 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 +0.084 0 47 60 60 80 80 100 115 46 52 65 75 95 114 136 45 60 60 70 70 90 105 8.5 10 10 15 15 15 18.5 62 80 92 110 130 158 186 50 63 75 90 110 132 160 74 97 109 130 150 184 212 12 17 17 20 20 26 26 13 17 17 22 22 24 24 10 12 12 14 14 17 25 35

Cylinder with Lock

[mm] Bore size Standard stroke Max. stroke 32 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 2000 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 2000 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 100 25, 50, 80, 100, 125, 160

Table of Contents

50 70 Note 1) J dimension is at fully closed.

MXS Series Air Slide Table

MXS16L-10 MXS16L-20 MXS16L-30 MXS16L-40 MXS16L-50 MXS16L-75 MXS16L-100 MXS16L-125 125 173 223 70 70 Air Slide Table (Symmetric type) MXSIL Series Dimensions MXS 20 L /Symmetric type ZZ Z Basic type 0.5 45.5 50 13 M 5H9 5 deep +0.030 0 2-M6 X 1 thread 13 deep N -1 X F 2 27 25 F 5H9 5 deep +0.030 0 22.5 (With stroke adjuster at extension end) 30 30 FF 58 76 46 6-M5 X 0.8 thread 8 deep 6 2

CS1

72 8 48 105 M30 X 1.5 30 47 53.1 46 18 44 M30 X 1.5 Y-16 40 32 80 8 55 110 M36 X 1.5 34 46 63.5 55 21 53 M36 X 1.5 Y-18 50 40 100 8 70 125 M40 X 1.5 54 42.5 69.3 60 23 57 M40 X 1.5 Y-20 50 40 100 8 70 125 M45 X 1.5 54 42.5 80.8 70 27 67 M45 X 1.5 Y-25 9 86 160 81 63 50 126 M56 X 2 53 98.1 85 34 82 M56 X 2 Y-30 9 175 87 M64 X 2 66 105 80 63 160 95 38 92 M64 X 2 110.0 Use a single knuckle

15

[mm] Size Stroke range [mm] MA MC MD MH ML MO MR XA XB 15 to 39 24 32 50 M5 x 0.8 6.5 4 5 40 to 100 42 41 101 to 124 75 125 to 200 59 49.5 201 to 400 76 58 25 20 29 20 to 39 22 36 50 M6 x 1 8.5 5 6 40 to 100 36 43 101 to 124 80 125 to 200 53 51.5 201 to 500 70 60 32 25 30 50 to 70 24 50 44 65 M8 x 1.25 10 6 7 75 to 120 45 60.5 125 to 200 58 67 205 to 500 86 81 100 505 to 800 135 63 38 857

CL

Bore size (mm) 100 125 140 160 Kit no.

C95

L3 d1 H9 MB1 Part no. d3 h KJ27D KJ36D KJ42D M27 x 2 M36 x 2 M42 x 2 110 125 142 70 80 90 37 43 49 51 56 60 4 4 4 36 41 46 125 160/200 250 30 35 40 CA2 CS1 C76 C85 C95 CP95 NCM NCA D-X 20Data 6-12-39 40 Refer to Page 6-16-1 for details on auto switches.

LX

(A contact) 50 75 100 125 150 50mm 75mm 100mm 125mm 150mm Use a driver with CE marking. N.O.

ISO Cylinder

JA30-10-125 1 floating joint * Refer to page 12 for dimensions of accessories.

Stability of suction position,

0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50UM ZP3E-125UM 4 8 Displacement [mm] Displacement [mm] 3 6 2 4 N, S, U, F, CL N, S, U, F, CL 1 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-63UM 6 Displacement [mm] 4 N, S, U, F, CL 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure

CL

140 160 125 to 160 Note) 125 to 160 with auto switch type is not available.

CXS

, 75 90, 100 25 20 15 100 80 10 30 35 40 45 50 60 70 75 80 90 100 10 15 20 25 30 35 40 45 50 60 70 75 80 90 Model 30 40 50 100 105 115 125 130 65 70 75 80 85 90 95 CXS10 97 92 87 82 102 107 112 117 122 132 142 147 99 94 179 89 109 114 119 124 129 139 149 154 159 169 104 25 35 45 CXS15 55 45 100 105 110 120 130 135 140 150 160 70 75 80 85 90 95 16 Standard Type Dual-Rod Cylinder Series

CA2

Bore size (mm) Standard stroke (mm) 2040 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Data 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Intermediate strokes not listed above are also available.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

to 200 59 49.5 205 to 400 76 58 25 20 46 29 63 50 to 200 98.5 138.5 12.5 (13.5)* 138.5 178.5 12.5 (13.5)* 4 8 205 to 500 505 to 800 20 to 35 22 36 50 * L lead M6 x 1 8.5 5 6 40 to 100 36 43 105 to 120 80 125 to 200 53 51.5 205 to 500 70 60 32 25 55 30 50 to 70 24 50 44 65 M8 x 1.25 10 6 7 75 to 120 45 60.5 125 to 200 58 67 205 to 500 86 81 100 505 to 800 135 63 38 52.2 741 LEY Series AC

Floating Joint

, 140 160 JAF20-8-125 JAF30-10-125 JAF40-14-150 JAF63-18-150 JAF80-22-150 JAF100-26-150 JAF140-30-150 JAF160-36-150 8 10 14 18 22 26 30 36 19 25 32 65 75 90 125 150 48 52 70 36 40 52 45 55 65 82 100 21 24 31 41 50 59.5 79 96 6 6 9 12 16 19 24 29 6.6 6.6 9 9 11 11 18 22 7 8 11 13.5 16 20 22 24 13 17 22 27 32 41 46 55 19 20.5 27 34.5 43.5 52 73.5 86 1.25 1.25 1.5 1.5 1.5 1.5 1.5 1.5 32.5 36

Table of Contents

2 Detent assembly VF4000-12A Refer to How to Order Pilot Valve Assembly on page 3-8-70. Pilot valve assembly !

CLS

200 250 46 8 100 54 M30 x 1.5 33 27 48 8 105 54 M30 x 1.5 39 30 55 8 110 60 M36 x 1.5 39 34 70 8 125 67 M40 x 1.5 44 42.5 70 8 125 67 M45 x 1.5 44 42.5 86 9 160 75.5 M56 x 2 66 53 Rod End Nut Material: Rolled steel Applicable bore size (mm) d H B C D Model NT-12 NT-16 NT-18 NT-20 NT-25 125, 140 160 180 200 250 M30 x 1.5 18 46 53.1 44 M36 x 1.5 21 55 63.5 53 M40 x 1.5 23 60 69.3 57 27 M45

Table of Contents

Selection Graph (1) Selection Graph of Pad Diameter by Lift Force Horizontal (Reference value) 125 -40kPa -45kPa -50kPa -55kPa -60kPa -65kPa -70kPa -75kPa -80kPa -85kPa 100 Pad diameter (mm) 80 63 50 40 10 30 50 70 100 200 300 Lifting force (N) Selection Graph (2) Selection Graph of Pad Diameter by Lift Force Vertical (Reference value) 125 -40kPa -45kPa -50kPa -55kPa -60kPa -65kPa -70kPa