Rotary Table/

to the plate (also the same in case of a thicker plate) = m 2 r2 = m 5 2r2 = m 4 r2 = m 12 a2 + b2 !

3

Consult with SMC regarding water resistant types with the above model numbers. 2 1 m type lead wire is only applicable to D-A93. Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches marked with are produced upon receipt of order. For D-P3DWA, 32 to 63 are available.

CJ5-S

t l m L Part no.

CJ5-S

t l m L Part no.

17

Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ There are other applicable auto switches other than the listed above. For details, refer to page 1197. For details about auto switches with pre-wired connector, refer to pages 1648 and 1649.

CG5-S

t l m L (mm) Part no.

ZSE F/ISE

or more (at 50VDC) between all lead wires and enclosure 10 to 500 Hz with 1.5 mm amplitude or 98 m/s2, whichever is smaller 980 m/s2 in X, Y, Z directions 3 times each (Not energized) 3% F .S. or less of measured pressure at 25C in temperature range of 0 to 50C Pressure receiving area: Stainless steel 630, Fittings: Stainless steel 304 A2: URJ 1/4 B2: TSJ 1/4 5-wire oil proof heavy-duty cord

Step Motor Controller With Step data Teaching Function (Servo / 24VDC)

If the cable length exceeds 5 m, the speed / pushing force will be reduced by a maximum of 10 % per 5m. (If cable length is 15 m: Maximum 20 % reduction.) [Transportation] Caution (1) Do not carry or swing the product by the motor or the cable 18 No.JXC-OMW1019-A 9. Electric actuators / Common precautions 9.1 Design and selection Warning (1) Be sure to read the Operation Manual.

Ionizer Nozzle type IZN10 Series IZS

Intermittent control timer (P.460) 449 IZN10 Series Accessories Bracket L-bracket/IZN10-B1 Pivoting bracket/IZN10-B2 Fixed mounting Pivot mounting Power supply cable DIN rail mounting bracket/IZN10-B3 [Standard length] IZN10-CP (3 m) IZN10-CPZ (10 m) [Non-standard length] IZN10-CP -X13 01 Cable length 1 m 2 m 01 02 Manifold Single unit The L-bracket and the DIN rail mounting bracket

CG5-S

t l m L H1 B1 Metric (mm) (mm) Part no.

LECA6_C

RLS BK RLS 19 - 5.4 1 (3m) CN4 CN1 EMG C24V M24V 24V 0V 0V 20 - 2 DC24V EMG () DC24V 0V Ry Ry U (1 ) RG+ RG0V M 24V C 24V EMG BK RLS Ry 24V 0V (2 ) RG+ RG0V M 24V C 24V EMG BK RLS Ry 24V 0V (3 ) RG+ RG0V M 24V C 24V EMG BK RLS Ry 24V 0V OFF 21 - (3) () DC24V M24V EMG () DC24V 0V Ry Ry U (1 ) RG+ RG0V M 24V C 24V EMG BK RLS Ry 24V 0V (2 ) RG+ RG0V M 24V C 24V EMG

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

ISE60 A2 22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

F/ISE

ISE60 A2 22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction None Nil TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

PSE540/560

Do not drop, bump, or apply excessive impact (PSE540: 980 m/s2, PSE560: 500 m/s2) while handling. Although the body of the sensor may not be damaged, the inside of the sensor could be damaged and lead to malfunction. 2. The tensile strength of the cord is 50 N. Applying a greater pulling force to it can cause malfunction.

LECP6_C

, 1 (3m) CN4 CN1 EMG C24V M24V 24V 0V 0V 20 - 2 DC24V EMG () DC24V 0V Ry Ry U (1 ) BK RLS EMG Ry C 24V 24V 0V 0V M 24V (2 ) BK RLS Ry EMG C 24V 24V 0V M 24V 0V (3 ) BK RLS Ry EMG C 24V 24V 0V M 24V 0V OFF 21 - 3() DC24V M24V EMG () DC24V 0V Ry Ry U (1 ) BK RLS EMG C 24V Ry 24V 0V M 24V 0V (2 ) BK RLS EMG C 24V Ry 24V 0V M 24V 0V (3 ) BK RLS EMG C 24V Ry 24V

LEF-OM007xx

200 to 230VAC B2 B1,B2 B1,B2 Without lock Nil Without lock Nil 400 400 40 40 S8 S8 Cable length With lock B With lock B Without cable Without cable Nil Nil Ball screw lead Stroke 2m 2 2m 2 Size Size 100mm 100 100mm 100 5m 5 5m 5 40 32 25 40 32 25 10m 10m A A 1000 1000mm 1000mm 1000 12mm 12mm 16mm 16mm 20mm 20mm A A The length of motor, encoder and lock cables are same.

PSxx-OMG0005CN

IP65 -1060 -2070 () 3585RH() AC250 V1 50 M(DC50 V) 2F.S.(050 25)3F.S.(-1060 25) CEUL/CSARoHS 01 02 C01 N01 N02 A2 B2 R1/8 M50.8 Rc1/8 NPT1/8 R1/4 NPT1/4 M50.8 URJ1/4 TSJ1/4 M50.8 M50.8 C3604SUS316L PSE563 5.1 3 m 2 0.2 mm 1.12 mm PSE56--28: 2 5.1 3 m 2 0.2 mm 1.12 mm 193 g 200 g 194 g 201 g 187 g 203 g 193 g 101 g 108 g 102 g 109 g 95 g 111 g 101 g -12No.PS-OMG0005CN-E [mA]

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

M If using the JXCm1m-BC, please use the latest version of the JXC-BCW (parameter writing tool). M There are currently 3 versions available: version 1 products (V1.m or S1.m), version 2 products (V2.m or S2.m), and version 3 products (V3.m or S3.m).

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

D-LC05: Lead wire 0.5 m D-LC30: Lead wire 3 m D-LC50: Lead wire 5 m For the applicable auto switch model, refer to the table below. Applicabie Auto Switch/Refer to page 11-1-1 for further information on auto switches.

Table of Contents

D-LC05: Lead wire 0.5 m D-LC30: Lead wire 3 m D-LC50: Lead wire 5 m For the applicable auto switch model, refer to the table below. Applicabie Auto Switch/Refer to page 11-1-1 for further information on auto switches.