Vacuum System Peripherals:

For vacuum pump servies: Series ZX 13-14-19 3. Series ZM 13-14-20 4.

High Vacuum Angle Valve

G G Heater A A [mm] Series Valve size A B C D E Fn G H J K 25 50 121 48 27 12 40 26 44 21 40 65 171 66 39 11 55 41 67 29 50 70 185 79 31 11 75 52 76 29 9 XLC XLG 19 Heat-resistant 2-Color Indicator Solid State Auto Switch: Direct Mounting Type D-M9NJ/D-M9PJ RoHS Refer to the SMC website for details on products that are compliant with international standards.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Refer to pages 11-4-18 to 11-4-19 for details of made-to-order specifications.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Refer to pages 11-4-18 to 11-4-19 for details of made-to-order specifications.

CRB2/CRBU2/CRB1

Symbol: C4 Symbol: C1 Add connecting ports on Body (A). (An additionally machined port will have an aluminum surface since it will be left unfinished.) Change of rotation.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

(The standerd valve has an individual exhaust for the pilot valve.) 2.10-38 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size Series M5 (VQZ100 only) VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 SY VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

Table of Contents

, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 2-C4, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 4.5 4.5 M3 mounting hole M2.5 mounting hole Residual pressure release manual override DIN rail clamp screw 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread D side U side Stations 1 2 3 Dimensions

ARM10/11

N3 N7 C6 C8 C10 N7 N9 N11 4 6 5/32 1/4 6 8 10 1/4 5/16 3/8 Option Option Nil X17 Nil X17 None None Oil-free Oil-free Straight type Elbow type Straight type Elbow type 6.5 X X 12.5 X X Y Y X 3 3 7 X 11.5 11.5 11.5 Y 19 19.5 22 X 5 5 5.5 5 X 19 20 22 19 Y 20 23 26 20.5 Fitting size 4, 5/32 6 1/4 Fitting size 4, 5/32 6 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4

ARM10/11

N3 N7 C6 C8 C10 N7 N9 N11 4 6 5/32 1/4 6 8 10 1/4 5/16 3/8 Option Option Nil X17 Nil X17 None None Oil-free Oil-free Straight type Elbow type Straight type Elbow type 6.5 X X 12.5 X X Y Y X 3 3 7 X 11.5 11.5 11.5 Y 19 19.5 22 X 5 5 5.5 5 X 19 20 22 19 Y 20 23 26 20.5 Fitting size 4, 5/32 6 1/4 Fitting size 4, 5/32 6 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4

Proposals for Energy Saving

4 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 No.

4/5 Port Air Operated Valve SYJA3000 Series

45 0.39 0.18 0.69 0.39 0.12 0.44 2 position Body ported A, B port: C4 (One-touch fitting for 4) P, R port: M5 x 0.8 0.40 0.19 0.69 0.40 0.12 0.43 Closed center M5 x 0.8 SYJA520-C4 Exhaust center Pressure center Single Double 0.40 0.15 0.56 0.37 [0.37] 0.10 [0.11] 0.41 [0.41] 0.40 [0.37] 0.15 [0.10] 0.57 [0.41] 0.37 0.10 0.41 55 3 position 41 45 0.36 0.19 0.70 0.40 0.12 0.47 2 position A,

VK300

(-Q) (S) 42 (-Q) VV3K3-20 (-Q) 21 (-Q) VV5K3-20 (-Q) 21 (-Q) Manifold base Manifold base Caution Mounting Screw Tightening Torques M3: 0.6 Nm Body ported VK300-41-1A Base mounted VK300-41-2A Manifold gasket and screw assembly Note1) Mounting direction is fixed, do not mount on opposite side.

PSxx-OMM0006CN

) ZS-35-D (W1,WF1,M5,C4,C6) ZS-35-F +(01,N01) ZS-35-G +(W1,WF1,M5,C4,C6) -10No.PS-OMM0006CN-E M8(3 ) 01 N M L ISE40A 1/ 2 ISE40A -0.11.000 MPa Y ZSE40A 0.0-101.3 kPa K + T + 1 01 R1/8(M5) N01 NPT1/8(M5) A A D D N NPN1 M8 P PNP1 /M8 1 L M SI2 M8 P (psi)1 1 2kPaMPa 1 ZS-24-A A M35 L,M45 L, 2 ZS-24-D D M35 L,M45 L, 2 / V100-49-1-1 300 mm() V100-49-1-2 500 mm() V100-49-1-

VK3000

Refer to the above drawing for DIN terminal dimensions. n L 1 50 27 2 69 46 3 88 65 4 107 84 5 126 103 6 145 122 7 164 141 8 183 160 9 202 179 10 221 198 11 240 217 12 259 236 13 278 255 14 297 274 15 316 293 16 335 312 17 354 331 18 373 350 19 392 369 20 411 388 L1 L2 1428 VK3000 Series Specific Product Precautions Be sure to read this before handling the products.

VK300

(S) 42 Manifold base Manifold base Caution Mounting Screw Tightening Torques M3: 0.6 Nm Body ported VK300-41-1A Base mounted VK300-41-2A Manifold gasket and screw assembly Note 1) Mounting direction is fixed, do not mount on opposite side.

VK3000

5 Port Direct Operated Poppet Solenoid Valve Rubber Seal Series VK3000 Base mounted (Side ported) Type 41 Manifold Grommet: G DIN terminal: D VV5K3-41Station -M5 VK VZ VF VFR VP4 VZS VFS ~ = ~ = VS4 VQ7 EVS VFN Solenoid is at the same side as A port: VV5K3-S41Station Built-in One-touch fitting: VV5K3-41Station -C4 ~ = Refer to the above drawing for other dimensions.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Manifold Specifications for 41 and 42 Type Manifold Specifications for 41 and 42 Type SS5Y5-41 SS5Y5-42 SS5Y7-42 Port size Flow characteristics Model 52-SY740 52-SY540 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) 1,5,3 Model Applicable valve 4,2 (A,B) (P ,EA,EB) b Cv c[dm3/(sbar)] c[dm3/(sbar)] Single base / B mounting Manifold style b Cv SS5Y5-41 1 (SUP) / 3/5 (EXH) Common SUP / Common EXH 1/4

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

(Manifold specification sheet on page 41.)

Title not found

(800) 526-7661 1/4-28 Straight Male Thread to Tube 1/4-28 Male Straight Thread to Tube Fibre Gasket Supplied 5/16 Hex Typ. 7 8 3 4 11 16 19 32 19 32 19 32 19 32 19 32 19 32 3 8 1 4 Typ.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VS7 C6: Onetouch fitting for 6 VVQZ200010A2 VV5QZ2205C 1.12-19 VQZ1000/2000/3000 Body Ported Dimensions: VQZ1000 VV5QZ12 C Station Grommet (G) 27.5 (11) (35) 44.5 Mounting holes (5.5) n-C3, C4, C6, M5 C3: One-touch fittings for 3.2 C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread 20 (7.5) DIN rail clamp screw U side n 5 4 4 4 4 4 SMC SMC 14 P=10.5 2 2 2 2 (L4) (L3)