ZP

across flat 8 (Hexagon) M5 x 0.8 Width across flat 8 (Hexagon) M5 x 0.8 5.5 5.5 8 8 (14.5) (15) 6.5 7 0.8 1.2 2 2 6 8 6.7 8.8 ZP2-TB10MU-B5 ZP2-TB15MU-B5 M5 x 0.8 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 5.5 5.5 8 8 8 7 (16) (15) 2 2 2 1.2 10 15 15.6 10.6 4 Symbol/Type Short-type Pad EU: Flat 2, 4, 6, 8, 15 Pad diameter Space-saving in the height direction How

Table of Contents

MGPM, MGPL Common Dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW Q CV 16 20 25 25, 50, 75, 100, 125, 150, 175, 200, 250 71 58 8 8 5 30 11 8 64 M4 15 15 22 M5 x 0.8 12 M5 x 0.8 4.3 8 4.5 M5 x 0.8 40 10 19 16 78 1.5 62 10 10 6 36 10.5 8.5 83 M5 18 18 24 M5 x 0.8 13 M5 x 0.8 5.6 9.5 5.5 1/8 37.5 10.5 25 18 25, 50, 75, 100, 125, 150

ZP

M6 M8 M5 M6 M8 M5 M6 M8 M4 M5 M6 M8 Rc 1 8 Model ZPT02 to ZPT08 (3.5) except 2, 4 2.5 (3) except 2, 4 3.5 () except 2, 4 (3.5) 2.5 (3) 3.5 () ( )( )( ) 10 (7) 10 (6.5) 12 (6) (13) 10 (6.5) 12 (6) (12) 12 (6) (13) ZPT10 10 (6.5) 12 (6) (13) ZPT13 11 (7) 15 (7) 15 (13) ZPT16 ZPT20 (8.5) 15 (8) 26 (17) (16) (8.5) 15 (8) 26 (17) (16) (10) 15 (10) 15 (18) (17) (8.5) 15 (8) 16

AC

10 0 1 VY170 0 1 10 12 01 02 0 1 0 1 01 02 0 1 VY190 0 1 14 20 M5 01 0 1 VY110 VY1D00-M5 VY1A0 -M5 VY1B0 VY120 VY130 Model 14 M5 01 04 02 03 04 20 10 M5 Port P A R mm2 M5 01 02 01 02 02 03 04 06 10 12 11 2 1 Port size M5 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 4 1 300 17 2 M5 M5 1 1 1 4 2 10 5 0.28 16 0.9 25 1.4 590 33 5 0.28 0.16 0.13 0.007 0.11 1%F.S. 0.5%F.S. 16 0.9 25 1.4

CL

28 5 4 41 20 M26 x 1.5 M10 x 1.25 203 194 11.5 137 9 41 24 24 27 12 5.5 30 15 33.5 6 7 45 25 M26 x 1.5 M10 x 1.25 211 199 14.5 139 12 41 24 24 27 15 5.5 34.5 15 37.5 6 7 45 32 M32 x 2 M14 x 1.5 244 232 14.5 167 12 41 24 24 29 15 7 42.5 21.5 46.5 8 7 50 40 9-2-26 25 Fine Lock Cylinder Double Acting, Single Rod Series CLG1 20, 25, 32, 40 How to Order CL Without auto switch CLG1 100 L E N 25

CL

28 5 4 41 20 M26 x 1.5 M10 x 1.25 203 194 11.5 137 9 41 24 24 27 12 5.5 30 15 33.5 6 7 45 25 M26 x 1.5 M10 x 1.25 211 199 14.5 139 12 41 24 24 27 15 5.5 34.5 15 37.5 6 7 45 32 M32 x 2 M14 x 1.5 244 232 14.5 167 12 41 24 24 29 15 7 42.5 21.5 46.5 8 7 50 40 9-2-26 25 Fine Lock Cylinder Double Acting, Single Rod Series CLG1 20, 25, 32, 40 How to Order CL Without auto switch CLG1 100 L E N 25

SYJ300/500/700

x 0.8 1/8 1/8 1/8 1/8 1/8 Type SS3YJ5-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5

ZP

across flat 8 (Hexagon) M5 x 0.8 Width across flat 8 (Hexagon) M5 x 0.8 5.5 5.5 8 8 (14.5) (15) 6.5 7 0.8 1.2 2 2 6 8 6.7 8.8 ZP2-TB10MU-B5 ZP2-TB15MU-B5 M5 x 0.8 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 5.5 5.5 8 8 8 7 (16) (15) 2 2 2 1.2 10 15 15.6 10.6 4 Symbol/Type Short-type Pad EU: Flat 2, 4, 6, 8, 15 Pad diameter Space-saving in the height direction How

Table of Contents

1 15-9-41 3 Dimensions AS2000E/3000E 2-port size L7 Max. Min.

Free Mount Cylinder

M5 x 0.8 depth 8 M5 x 0.8 depth 8 M6 x 1.0 depth 9 Without auto switch With auto switch Bore size (mm) 5 st 38 41 35 41 45 47 S 15 st 48 56 50 56 60 62 Z S Z 15 st 61 72 66 75 83 89 10 st 43 46 40 46 50 52 5 st 51 57 51 60 68 74 10 st 56 62 56 65 73 79 5 st 38 41 45 51 55 57 10 st 43 46 50 56 60 62 15 st 48 56 60 66 70 72 5 st 51 57 61 70 78 84 10 st 56 62 66 75 83 89 15 st 61 72 76 85 93

Air Cylinder

30 25 M5 x 0.8 16 16 25 30 32 Rc1/8 16 16 28.5 25 40 Rc1/8 16 16 33 20 50 Rc1/4 18 18 40.5 20 63 Rc1/4 18 18 47.5 20 80 Rc3/8 22 22 60.5 20 100 Rc1/2 22 22 71 20 20 M5 x 0.8 16 15 (16) 23 30 25 M5 x 0.8 16 15 (16) 25 30 32 Rc1/8 16 15 (16) 28.5 25 40 Rc1/8 16 15 (16) 33 20 50 Rc1/4 18 17 (18) 40.5 20 63 Rc1/4 18 17 (18) 47.5 20 80 Rc3/8 22 22 60.5 20 100 Rc1/2 22 22 71 20 MB MB1 CA2 CS1

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) Th9 Z U V S Q N A F M E J G H I K1 B C D K2 L P 0 0.043 12 5 to 30 19.5 25 35.5 15.5 3.5 22 32 1.5 44.4 37.4 10.5 M3 x 0.5 5.2 M5 x 0.8 6 6 5 3.5 15 0 0.052 16 5 to 30 22.5 29 41.5 15 3.5 28 38 1.5 48 41 10 M4 x 0.7 6 M5 x 0.8 8 8 6 3.5 20 0 0.043 20 5 to 50 24.5 36 48 18.5 5.5 36 47 2 55 46 10.5 M5 x 0.8 8 M5 x 0.8 7 10 8 4.5 13 0 0.043

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

1.0 0.68 1.0 0.43 0.52 0.36 0.49 0.37 0.35 0.27 0.13 0.21 0.25 0.20 0.26 0.17 0.25 0.74 0.81 0.92 0.80 0.96 1.0 1.0 0.32 0.28 0.24 0.23 0.25 0.25 0.30 0.19 0.20 0.22 0.19 0.24 0.24 0.26 M5 x 0.8 1/8 1/8 1/8 1/8 1/8 Type 10-SS3YJ5-40-M5 Type 10-SS3YJ5-40-01 Base mounted for internal pilot C4 1/8 1/8 M5 x 0.8 1/8 Type 10-SS3YJ5-41-M5 10-SYJ54M Type 10-SS3YJ5-41-01 Type 10-SS3YJ5-41-C4 Type

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

M5 X 0.8 20 stations 20 P Port Note) If more than 10 stations, supply air to both sides of P port and exhaust air from both sides of R port. M5 X 0.8 SY 41 Type Applicable solenoid valve SYJ314-l SYJ314M-l SYJ324-l SYJ324M-l How to Order SS3YJ3-41-05 --M3 SYJ 41 Type S41 Type Coil is located on same side as the A port.

SMC Pneumatic Clean Series

37 37 30 21.5 15 15 15 46.5 37.5 33.5 28 7 5.5 5.5 5 1/8 45 41 41 37 M26 x 1.5 M26 x 1.5 M20 x 1.5 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 154 122 120 116 21 19.5 19.5 15.5 26-0.033 0 7 7 7 5 4 4 1/4 1/8 1/8 14 12 10 16 13 13 26-0.033 0 32-0.039 0 82 36 10 8 M32 x 2 With air cushion Cushion valve (Width across flats 1.5) WB C2 2-FD Relief port M5 x 0.8 2-NN GB WC WA GA GC B 2-P Width across

ZX

41 1 trimmer Pressure sensor 51 Filter unit (F) M5 x 0.8 External release port 3.6 (Mounting hole) Vacuum switch 1 10 19 13.6 2-R1.8 (Mounting hole) Vacuum switch Supply valve Air operated Release valve External release Release flow rate adjusting needle Interface plate (63.5) 18 15.5 4 2-3.3 Mounting hole M5 (or M6) (PE port) M5 (or M6) (PV port) Vacuum supply pressure port (V port) Vacuum

Electric Actuator/Slider Type

Description Material Note 15 Cover plate Aluminum alloy Coating No.

VM

B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62

3 Port Air Operated Valve Series SYJA300

0.30 0.19 0.20 0.22 0.19 0.24 0.24 0.26 0.19 0.20 0.22 0.19 0.24 0.24 0.26 M5 x 0.8 1/8 1/8 1/8 1/8 1/8 Type SS3YJ5-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 Type SS3YJ5-41-01 1/8 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5

F

7 7.8 17 13 14 14.5 2.6/2.2 2.6 3.2 M5x0.8 KJT23-M5 7 7.8 17 13.5 14.5 14.5 3.2/2.7 3.1 3.2 R(PT)1/8 KJL23-01S 10 7.8 17 15 15 14.5 2.6/2.2 6.7 3.2 R(PT)1/8 KJT23-01S 10 7.8 17 15.5 15.5 14.5 3.2/2.7 7.3 4 M3x0.5 KJL04-M3 7 8.9 17.5 13 15 14.5 0.8 2.2 4 M3x0.5 KJT04-M3 7 8.9 17 13.5 15.5 14.5 0.9 3 4 M5x0.8 KJL04-M5 7 8.9 17.5 13.5 15 14.5 3.5 2.7 4 M5x0.8 KJT04-M5 7 8.9 17 14 15.5 14.5