Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

IO-Link unit EX600-LBB1 (Class B) 3Ch 46 -94No.EX-OMX1011 EtherNet/IPTM configuration assembly The Configuration data per unit type is described below.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

(S) 5/16 13.2 30.1 21.5 40 14.2 16 AS231FSG1-02-03 (S) 5/32 7.2 9.6 12 1/8 13 (12.7) 24 AS231FSG1-02-07 (S) 1/4 11.2 19 33.8 21.4 43.9 26 AS231FSG1-02-09 (S) 5/16 13.2 34.9 23.5 46 14.2 27 AS231FSG1-02-11 (S) 3/8 15.9 20.9 38.1 24.7 47.3 15.6 28 AS331FSG1-02-07 (S) 1/4 3/8 19 11.2 12.9 16.6 20.2 36 21.4 57.8 63.1 61.7 57.9 56.5 13.3 24.5 19.2 49 AS331FSG1-02-09 (S) 5/16 13.2 37.1 23.5 59.9

SYJ300-OMU0003

-20SS5YJ3-21PSS5YJ3-21SA 3SYJ3000-33-1 R SYJ312SYJ312M SYJ300 3 SYJ322SYJ322M SYJ300 3 SS5YJ3-31-S31SS5YJ3-32-S32SS5YJ3-32SA SS5YJ3-46-S46SS5YJ3-32P SYJ3000-33-1 SYJ3000-33-1 3 R R 3AB SYJ314SYJ314M SYJ324SYJ324M SS5YJ3-41-S41 3SYJ3000-33-1 R 3AB SYJ314SYJ314M SYJ324 SYJ324M SS5YJ3-20 SS5YJ3-41 B3 A B3 A M1.7 : 0.12N.m 17 No.SYJ300-OMU0003 Assy SYJ32(R)(-Q)) (SYJ34(R)(-Q)) SYJ300

TABLE OF CONTENTS

NPT PORTS NPT PORTS WT. 0.25 350 350 1/16 1/16 .09 .09 73JJ9ZGV 73JJ9ZCV K73JJX 250 250 3/32 3/32 .22 .22 73KK9ZGV 73KK9ZCV K73KKX 175 175 1/8 1/8 .35 .35 73NN9ZGV 73NN9ZCV K73NNX 125 125 5/32 5/32 .45 .45 73OO9ZGV 73OO9ZCV K73OOX 100 100 3/16 3/16 .50 .50 73PP9ZGV 73PP9ZCV K73PPX 50 50 1/4 3/16 .78 .50 73RP9ZGV 73RP9ZCV K73RPX 3-WAY NORMALLY CLOSED GROMMET WHEN ORDERING VALVES OR REPAIR

LEC-OM02904

C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

02 09 02 9 stations 2 stations 9 stations 2 stations Specified layout Note 2) Specified layout Note 2) (Up to 18 solenoids possible) (Up to 18 solenoids possible) 18 18 18 stations 18 stations Note 2) Note 1) Double wiring: Single, double, 3 position and 4 position solenoid valves can be used on all manifold stations.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

L (10) 8 Dimensions (24) (35) Applicable fittings size d 4 Model A L D 10-KQ2P-04 16 32 6 6 10-KQ2P-06 18 35 8 8 10-KQ2P-08 20.5 39 10 10 10-KQ2P-10 22 43 12 12 10-KQ2P-12 24 44.5 14 10-KQ2P-01 16 31.5 5 10-KQ2P-03 16 32 6 10-KQ2P-07 18 35 8.5 10-KQ2P-09 20.5 39 10 10-KQ2P-11 22 43 11.5 5.5 Rail mounting pitch 12.5 0 1 2 3 4 5 6 7 8 9 No.

Table of Contents

(33) 42 (35) 48 (35) 44 (37) 47 (34) 43 (36) ZPY40 49 (35) 50 (37) 49 (35) 44 (38) 46 (38) ZPY50 ( ): Figures for female thread connections.

One-touch Fittings Series KQ2

D1 D2 L1 L2 M A 5 32 3 16 3 16 1 4 1 4 5 16 5 16 3 8 3 8 1 2 1 2 KQ2L01-03 KQ2L01-05 KQ2L03-05 KQ2L03-07 KQ2L05-07 KQ2L05-09 KQ2L07-09 KQ2L07-11 KQ2L09-11 KQ2L09-13 KQ2L11-13 9.6 7 10 10 8 3 7 6 3 8 11 12 17 17 30 25 17 17.5 25 13.5 2.2 2.5 3 2.5 1 8 15.5 33 33.5 26 34.5 35.5 36.5 37.5 40.5 41.5 43 21.5 22.5 14.5 23.5 23 24.5 23.5 5 32 16 18 10.4 3 16 3.5 16.5 19.5 10 11.4 1 4 4.6 17 20.5

VM

R-12F-12F 22 12 12 46 63 31.5 31.5 21.5 4 67 14 21.8 21.8 17.5 3.2 Applicable tubing O.

SV

Double wiring specifications 09 02 9 stations 20 Note) For 20 stations (2) 2 stations Specified layout (Up to 18 solenoids possible.)

Vacuum System Peripherals:

46 e Valve Model Fill in the blanks below with symbols of necessary specifications.

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 9 Stations, A B Port Size: M5 (Base Mounted M5X0.8)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 9 Stations, A B Port Size: C4 (ø4 One-touch Fitting)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 9 Stations, A B Port Size: M5 (Base Mounted M5X0.8), P R Port Thread: T (NPTF)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 9 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 9 Stations, A B Port Size: ø4 One-touch Fitting, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 9 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: NPTF

7ND9071en

ATEX 033X VTT 09 ATEX 034X Ui 24 V, Ii 380 mA, Pi 5.32 W, Ci 5 nF, Li 10 H.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Port size N M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 Needle Valve/Flow Characteristics AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) Effective