Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 4 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 6 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 10 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 3 Stations, A B Port Size: M3X0.5 Type 31, S31, P R Port Thread: -

2

)-A 03-A Y510-(02)-A 03-A Y610-03-A (04)-A Y610-(03)-A 04-A 02A VHS40-03A 04A VHS40-06A VHS50-06A 10A Pressure relief 3 port valve Note 6) VHS20-01A 02A VHS30-02A 03A Attachment 02-A E400-03-A 04-A 06-A Piping adapter Note 6) E100-M5-A 01-A E200-02-A 03-A 02-A E300-03-A 04-A E500-06-A E600-06 10 02-A IS10E-4003-A 04-A 06-A Pressure switch with piping adapter Note 6) 01-A IS10E-2002-A

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(mm) <M3, M5> <M3, M5> Weight (g) Note) Model L1 L2 L3 A M D 2-applicable tubing M3 x 0.5 KJY23-M3 KJY23-M5 KJY23-01S KJY04-M3 KJY04-M5 KJY04-01S KJY06-M5 KJY06-01S 2.8 3.2 7.4 3.1 3.5 7.7 4.5 7.5 Reference dimensions after R thread installation.

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Type AS1200-M3 Direct cylinder elbow type 2 Bore size JIS Symbol Direct cylinder flat elbow type 4 Symbol Bore size Applicable series Control type AS1200-M3 AS1400-M3 M3 M3 x 0.5 Meter-out Meter-in 0 1 AS120-M5 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 M5 x 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 P.15-11-3 Thread type Cylinder side R Tube side Rc Symbol Metric thread (M3

1

SY7000 Round head combination screw SY3000-23-24A (M2 x 32) SY5000-221-1A (M3 x 32.5) SY7000-221-1A (M3 x 36.5) Part numbers shown on the left are for 10 valves (20 pcs.). (30 pcs. for the SY7000) Valve mounting screw q Hexagon socket head cap screw SY3000-222-1A (M2 x 32) SY5000-222-1A (M3 x 32.5) SY7000-222-1A (M3 x 36.5) Part numbers shown on the left are for 10 valves (10 pcs.).

CATALOG

/2 (N)AS4200-04 M3 M3x0.5 M5 M5x0.8 01 18 02 14 03 38 04 12 Courtesy of Steven Engineering, Inc. !

KJ

(mm) <M3, M5> <M3, M5> Weight (g) Note) Model L1 L2 L3 A M D 2-applicable tubing M3 x 0.5 KJY23-M3 KJY23-M5 KJY23-01S KJY04-M3 KJY04-M5 KJY04-01S KJY06-M5 KJY06-01S 2.8 3.2 7.4 3.1 3.5 7.7 4.5 7.5 Reference dimensions after R thread installation.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Model Tightening torque Thread size 10-SY3000 M2 0.8Nm 0.16Nm 10-SY5000 10-SY7000 10-SY9000 M3 M4 M3 1.4Nm 0.8Nm 491

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AMH150-03 AMH250-03 AMH250-03 AMH350-04 AMH350-04 AMH450-06 AMH450-06 AMH550-06 AMH550-10 AMH650-14 AMH850-20 AMH850-20 IDG10-03 IDG20-03 IDG30-03 IDG50-03 IDG75-04 IDG100-04 AME150-03 AMF150-03 AME150-03 AMF150-03 AME250-03 AMF250-03 AME250-03 AMF250-03 AME350-04 AMF350-04 AME350-04 AMF350-04 AME450-06 AMF450-06 AME450-06 AMF450-06 AME550-10 AMF550-10 AME550-10 AMF550-10 AME650-14 AMF650

V100

SY11 A 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0 0.22 100 kPA to 0.6 Large flow 0 to 0.7 N.C. SY13(A): 15 SY14(A): 26 (14) SY13(A): 13 SY14(A): 24 (12) (1) SY12 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0.6 0.14 100 kPA to 0 Standard 0 to 0.7 N.O. (1) SY12 A 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0.6 100 kPA to 0 0.22 Large flow 0 to 0.7 N.O.

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Note Option mounting diagram Single valve AXT632-17-4 (M3 x 37) 3 Valve 0 Blanking plate (VVQ4000-10A1 5 ) AXT632-38-1 (M3 x 14) 4 For manifold Blanking plate Valve + Individual SUP spacer (VVQ4000-P1 5 02 03 ) q AXT632-17-10 (M3 x 62) 3 For manifold w AXT632-17-19 (M3 x 26) 2 Valve + Individual EXH spacer (VVQ4000-R1 5 -02 03) q AXT632-17-10 (M3 x 62) 3 For manifold w AXT632-17-19 (M3 x

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x 0.35 x 19 M3 x 0.35 x 23 M3 x 0.35 x 24 M3 x 0.35 x 28 M3 x 0.35 x 68 M3 x 0.35 x 72 M3 x 0.35 x 73 M3 x 0.35 x 77 y u Components Ejector unit + Vacuum switch/Filter unit i o For nozzle size 10, 13, 15 M3 x 0.35 x 84 4 [For ZSE4 spec.]

SY

(Cv = 2.1) Series CS1 SGP3/8 x 1m AS420-03 (Cv = 4.11) AN400-04 (Cv = 5) Base mounted type SY7140 -03 (Cv = 1.2) Series MB/CA1 Series CS1 SGP3/8 x 1m AS420-03 (Cv = 4.11) AN300-03 (Cv = 3.67) SY9140 -04 (Cv = 2.8) Steel tube size x Length Speed controller Silencer Steel tube size x Length Speed controller Silencer Steel tube size x Length Speed controller Silencer SGP1/2 x 1m AS420-04 (Cv

SX

SX7120-02 SV AS200-02 AN110-01 SZ Conditions [When using SGP (Steel pipe)] Base mounted Series MB Series CS1 SGP10A x 1 m AS420-03 AN300-03 SY SX7140-03 Tube x Length Speed controller Silencer SYJ SX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1-6-3 4 Courtesy

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VX2322-03 VX2232-03 VX2332-03 VX2242-03 VX2342-03 VX2110-01 VX2120-01 VX2130-01 VX2110-02 VX2120-02 VX2220-02 VX2320-02 VX2130-02 VX2230-02 VX2330-02 VX2240-02 VX2340-02 VX2250-02 VX2350-02 VX2260-02 VX2360-02 VX2220-03 VX2320-03 VX2230-03 VX2330-03 VX2240-03 VX2340-03 VX2250-03 VX2350-03 VX2260-03 VX2360-03 VX2260-04 VX2360-04 2 3 4.5 2 0.59 1.2 2.4 0.59 1.2 1.5 0.6 0.2 1.5 0.6 1.5 3.0

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

: 0.6 Nm M3: 0.6 Nm Note) Mounting direction is not flexible.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

AS121F-M3-02 AS121F-M3-01 26.8 24.3 5.2 6 M3 x 0.5 1/8" 7.2 19.7 26.6 24.1 24 21.5 4 8.4 10.5 5.5 11 2.4 5.5 24.3 21.8 11.4 2 7.5 6 8.8 M3 x 0.5 16.1 10 12.7 AS121F-M5-02 AS121F-M3-03 27.3 24.8 M5 x 0.8 7 11.5 3 5/32" 9.3 AS121F-M3-23 AS121F-M5-01 3.2 8.4 10.5 M5 x 0.8 1/8" 17.3 5.5 7.2 16.1 26.6 24.1 24 21.5 4 19.7 12.7 M3 x 0.5 22.1 8.4 AS121F-M3-04 AS121F-U10/32-01 4 9.3 10 1/8" 10-32UNF