Air Fittings & Tubing D1 D2 L1 L2 M 15 23 15 22 25 17 24 24 27 30 36 31 52 59 58 KQ2F04-01 KQ2F04-02 KQ2F06-01 KQ2F06-02 KQ2F06-03 KQ2F08-01 KQ2F08-02 KQ2F08-03 KQ2F10-02 KQ2F10-03 KQ2F12-02 KQ2F12-03 KQ2F12-04 KQ2F16-03 KQ2F16-04 1 8 1 4 1 8 1 4 3 8 10 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35 37 41 38 43 11 16 5.6 4 14 17 14 17 19 14 17 19 17 19 4 14 11 13 15 11 13 14 14 15 13.1 10.4 17 12 6 1 8 KQ2F16 26.1
43 53 43 ZC(D)UKD32 ZC(D)UKR32 ZP 29 34 38 18.5 19.5 60.5 65.5 69.5 50 51 Note) ZPU-X11: Flat type only.
-02 VX2330-02 VX2240-02 VX2340-02 VX2250-02 VX2350-02 VX2260-02 VX2360-02 VX2220-03 VX2320-03 VX2230-03 VX2330-03 VX2240-03 VX2340-03 VX2250-03 VX2350-03 VX2260-03 VX2360-03 VX2260-04 VX2360-04 2.0 1.5 2.0 1.5 1.5 1.5 1.0 1/8 (6A) 0.9 0.5 1.1 0.6 0.5 0.5 1.0 Construction/Components 260 0.4 0.2 0.45 0.2 0.2 0.15 0.45 2.0 1.5 2.0 1.5 1.5 1.5 1.0 Water oil air 3.0 Steam 1.0 VX21/22/23 (Orifice
Input block stations (Sm) Refer to page 77. 21 For 20 output points(T) For 18 output points (PG/PGC) Symbol Stations Note 02 2 stations Double wiring1 Symbol Stations Note 02 2 stations Double wiring1 26 pins PGC 20 pins PHC 10 pins TC Spring type terminal block box 43 T Terminal block box L1 Lead wire 34 cores 55 L2 17 cores L3 9 cores S6m 09 9 stations 02 2 stations Specified layout2
12 I 12 5 21 8 6 21 8 6.2 27 ZPT40g 40 43 18.5 6 8 6.2 32 6.5 3.3 2PTSOl!
M5 X 0.8 Body ported 3.6 (0.2) 43 45 SYJ522 N.O. VK SYJ514 N.C. Base mounted (With sub-plate) 57 (Without sub-plate 43) 59 (Without sub-plate 45) Rc(PT)1/8 4.5 (0.25) SYJ524 N.O. VZ Note 1) At DC. When AC is used, add 1g.
P, E port location U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) Pilot type Internal pilot External pilot Nil R Valve stations Series 10-SV1000 Series 10-SV2000 P: Flat ribbon cable 26 pins PH: Flat ribbon cable 10 pins P: Flat ribbon cable 26 pins PH: Flat ribbon cable 10 pins 02 02 02 02 2 stations 2 stations 2 stations 2 stations Double wiring
02 Pressure center VFS2510-E-01 02 DIN terminal: Double VFS2210-D Y-01 02 Closed center VFS2310-D Y-01 02 Exhaust center VFS2410-D Y-01 02 Pressure center VFS2510-D Y-01 02 EVS VFN With light/surge voltage suppressor Lead wire O.D.
ZP3-T13UM;-A12-02 ZP3-T16UM;-A12-02 Mounting Adapter Part No.
36.5 42 36.5 43.5 78 88 CH2F 41.5 36.5 41.5 36.5 41.5 76 86 50 CH2H 42 36 42 36 42.5 77 87 CH2E 48.5 43 47 43 50.5 85 95 CH2F 46.5 43 46.5 43 48.5 83 93 63 CH2H 48.5 43 47 43 50.5 85 95 CH2E 58.5 55.5 57 55.5 59 93.5 103.5 CH2F 56.5 55.5 56.5 55.5 57.5 92 102 80 CH2H 59 55.5 57.5 55.5 59.5 94 104 CH2E 66.5 67 66.5 67 69.5 104 114 CH2F 65.5 67 65.5 67 68 102.5 112.5 100 CH2H 67.5 67 67.5
-12 400 200 70% 50% 10% 0 800 MB 80 600 Stroke mm AS5000-02 AS420-02 400 200 0 AN300 -KM12 T1209 800 MB 100 600 Stroke mm AS5000-02 AS420-02 400 200 0 800 CS1 125 600 Stroke mm AS5000-02 AS420-02 400 200 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding different conditions
NT-02 NT-03 NT-04 13 15.0 12.5 M8 x 1.25 5 M10 x 1.25 17 19.6 16.5 6 M14 x 1.5 22 25.4 21.0 8 2 x LD Mounting Nut Applicable pin part no. Part no.
Cooling water (l/min) 180C Inlet air temperature Correction factor Air flow (l/min (ANR)) Model 50C 70C 100C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 40 44 46 39.5 43 44.5 41 43 45.5 A B C A B C A B C A B C A B C A B C A B C 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36 34.5 36 37 34.5 35.5 36 34.5 35.5 36 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 38 40 42.5 38
-M5-A Y24-01-A 02-A Y34-01-A 02-A Y44-02-A 03-A Y54-03-A 04-A 1 in part numbers for a round type pressure gauge indicates a pipe thread type.
Y60 Interface G36-10-01 G36-10-01G46-10-02 G46-10-02 G46-10-02 G46-10-02 G46-10-02 G36-10-01 1.0MPa G27-10-R1 Pressure gauge (G27-10-R1)(4) G36-2-01 G36-2-01 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G36-2-01 0.2MPa AD43 AD43 AD44 AD44 AD44 AD44 AD44 N.O.
-02 M14x1 17 17 31.5 15 15 17 13.1 3/8 3/8 KQE11-36 1/8-14 25.4 25.4 35.5 14.5 23 21 7 6 38 KQE06-03 M14x1 19 17 33.5 17 15 17 13.1 1/2 3/8 KQE13-36 1-12 28.57 28.57 36.5 14.5 26 22 9.6 8 14 KQE08-02 M16x1 17 19 33 12 17 18.5 26.1/18 1/2 1/2 KQE13-37 1-12 28.57 28.57 40.5 18.5 26 22 9.6 8 38 KQE08-03 M16x1 19 19 35 15 17 18.5 26.1/18 10 14 KEQ10-02 M20x1 22 24 35 12 21 21 41.5/29.5 10 38
75 M plug connector (M): VQZ2150 1(R)-M-01 02 57 (Lead wire length) 300 58.5 <63.5> Cross section 0.23 mm2 Cover diameter 1.5 92 62 Indicator light 73.5 103.5 < >: AC 2-7-42 Base Mounted 43 43 Series VQZ1000/2000/3000 Plug Lead Unit: Single Unit VQZ2000 2 position double Grommet (G): VQZ2250 1(R)-G-01 02 300 109 (Lead wire length) 54.5 24 9 9 24.5 mounting hole R4 4 VQC A 4 B 2 15 SMC
ZP32B B32 32 34 4 15 24.5 29 18.9 37 14 ZP40B B40 40 43 7 18 29.2 34 24.4 48 16 D I M E N S I O N S ZP VA C U U M PA D S ZP50B B50 50 53 7 18 33.2 38 32.4 57 19 H O W T O O R D E R ZP V A C U U M P A D S ZP F L AT T Y P E PA D W I T H R I B P A D D I A M E T E R P A D M AT E R I A L Part No Type A C B D E F Y 02 2 04 4 06 6 08 8 10 10 13 13 16 16 20 20 25 25 32 32 40 40 50 50 N Nitrile Rubber
ASR430F-02-08S(-F20) ASR430F-02-10S(-F20) ASR530F-02-06S(-F20) ASR530F-02-08S(-F20) ASR530F-02-10S(-F20) ASR530F-02-12S(-F20) ASR530F-03-06S(-F20) ASR530F-03-08S(-F20) ASR530F-03-10S(-F20) ASR530F-03-12S(-F20) ASR630F-03-10S(-F20) ASR630F-03-12S(-F20) ASR630F-04-10S(-F20) ASR630F-04-12S(-F20) ASQ430F-02-06S(-F20) ASQ430F-02-08S(-F20) ASQ430F-02-10S(-F20) ASQ530F-02-06S(-F20) ASQ530F-02-08S
43 D-C73C, D-C80C D-B5, D-B6 D-B59W Bore size (mm) B 28.5 28.5 29.5 32.5 40.5 40.5 Hs 24.5 27 30.5 35 40.5 47.5 A 30 30 31 35.5 43 43 B 28.5 28.5 29.5 32.5 40.5 40.5 B 22.5 22.5 23.5 26.5 34.5 34.5 B 25.5 25.5 26.5 29.5 37.5 37.5 Hs 27 29.5 33 37.5 43 50 A Hs 27 30 33.5 38 43.5 50.5 A 27 27 28 32.5 40 40 Hs 27.5 30 33.5 38 43.5 50.5 CS1 20 25 32 40 50 63 24 24 25 29.5 37 37 C76 C85 C95 D-H7