Hg increase in pilot setpoint per 5 psi increase in supply, Media: Filtered Air (5 micron) Part Number Adjustment Range (In. Hg) Maximum Overpressure (In. Hg) Deadband (In. Hg)   Min. Max.   Typ. Max.

Hg increase in pilot setpoint per 5 psi increase in supply, Media: Filtered Air (5 micron) Part Number Adjustment Range (In. Hg) Maximum Overpressure (In. Hg) Deadband (In. Hg)   Min. Max.   Typ. Max.

Hg increase in pilot setpoint per 5 psi increase in supply, Media: Filtered Air (5 micron) Part Number Adjustment Range (In. Hg) Maximum Overpressure (In. Hg) Deadband (In. Hg)   Min. Max.   Typ. Max.

Hg increase in pilot setpoint per 5 psi increase in supply, Media: Filtered Air (5 micron) Part Number Adjustment Range (In. Hg) Maximum Overpressure (In. Hg) Deadband (In. Hg)   Min. Max.   Typ. Max.

Hg increase in pilot setpoint per 5 psi increase in supply, Media: Filtered Air (5 micron) Part Number Adjustment Range (In. Hg) Maximum Overpressure (In. Hg) Deadband (In. Hg)   Min. Max.   Typ. Max.

Title not found

Hg) mm of mercury (mm Hg) 1" Hg = 25.4mm Hg Flow*** cubic feet per minute (cfm) cubic decimeters per sec (dm3/sec) 2.12 cfm = 1 dm3/sec Force pound (f) or lb. (f) Newton (N) 1 lb (f) = 4.44 N Mass pound (m) or lb.

Title not found

Hg) mm of mercury (mm Hg) 1" Hg = 25.4mm Hg Flow*** cubic feet per minute (cfm) cubic decimeters per sec (dm3/sec) 2.12 cfm = 1 dm3/sec Force pound (f) or lb. (f) Newton (N) 1 lb (f) = 4.44 N Mass pound (m) or lb.

%silltr

rabr coltm nm (Hg) nilllnote. mcrcuy colurm in (Hg). ind|ge tne|trty colu|m mils-0,001 ilch h-hch n foot cr culic cgntmater L = titsr gal (U.S,).

SL5200

design (No poppet spring in the wetted area) For UHP gas delivery Flow capacity Standard: to 30 slpm HF (option): to 130 slpm Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e SL52 S M FV4 FV4 02 2PW Delivery pressure Option Ports Delivery pressure Code 0.5 to 10 psig (0.0034 to 0.07 MPa) Sub-atmospheric (A): 100 mm Hg

COQ2BP

) psi psi psi m 3.2810 2.5357 x 10-3kg/cm2 0.0351 8 6.897 0.06897 0.0703 kg/cm2 kPa bar kgiem2 Area in2 in2 1t2 mm(Hg) 0.0197 psi Area mm2 cm2 m2 645.16 6.4516 0.0929 in2 torr 0.0197 psi mm2 0.0016 em2 0.1550 in2 kPa 0.145 psi ft2 bar 14.50 psi kgcm2 14.224 psi m2 10.765 Energy h Ib It Ib kWh Volume in3 in3 1t3 1t3 aim 14.7 psi Volume mm3 6.10x 10-5 1.356 1.356 3.6 16387 16.387 mm3 em3 (

CXT

(NA) (NA) Q + Stroke Data d Bore size (mm) Standard stroke (mm) A PA (N) (NA) PB PW Q E F G GP H HG HN HP HT L Slide Ball bushing 32 25, 50, 75, 100 10.5 28 20 45 27 9.5 110 66 26.5 67.6 64 33.5 100 14 53 70 120 160 121 40 25, 50, 75, 100 11.5 36 25 52 31 10.5 130 78 30.5 77.6 74 40.5 136 12 51 90 140 190 159 PA dimension is the center sorted factor of the L dimension.

Table of Contents

(NA) (NA) Q + Stroke Data d Bore size (mm) Standard stroke (mm) A PA (N) (NA) PB PW Q E F G GP H HG HN HP HT L Slide Ball bushing 32 25, 50, 75, 100 10.5 28 20 45 27 9.5 110 66 26.5 67.6 64 33.5 100 14 53 70 120 160 121 40 25, 50, 75, 100 11.5 36 25 52 31 10.5 130 78 30.5 77.6 74 40.5 136 12 51 90 140 190 159 PA dimension is the center sorted factor of the L dimension.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

MY3A25 MY3A40 MY3A63 A B C E G H HG JJ KK L LD LL LW M N 55 06.0 18 2 09.5 27 05.0 M4 x 0.7 05.0 065 03.5 22.5 041 06 13.5 M5 x 0.8 75 09.5 25 2 14.0 37 07.4 M5 x 0.8 07.5 095 05.5 27.5 061 08 20.0 M6 x 1 120 14.0 38 2 18.0 54 12.0 M6 x 1 12.0 160 08.6 40.0 090 12 27.0 M8 x 1.25 160 17.0 60 3 20.5 84 16.5 M8 x 1.25 22.0 220 11.0 50.0 134 16 31.0 NE NG NH NW PA PB PC PD PG Q QW T TT UU YW

CXT

Q+Stroke (NA) Cylinder form 12 16 (mm) d Bore size (mm) Standard stroke (mm) A B C E G GP H HA HG HN HP HT J JK L LD Slide Ball bushing 12 15, 25 8 4 16 25 7.5 50 34 6 14.5 34 33 18 M5 X 0.8 9.5 68 4.3 8.5 10 16 15, 25 9.5 5 18 29 6.5 65 40 6.5 16 39.5 39 21 M6 X 1 9.5 75 5.2 7.5 12 20 25, 50 11 6.5 25 36 8.5 80 46 9 18 44.1 45 24 M8 X 1.25 10 86 6.9 9.5 16 25 25, 50 11 6.5 25 40 8.5 90 54

Compact Cylinder High Magnetic Field Design CDQ2BP Series

micrometer) mm = millimeter cm = centimeter m = meter mils = 0.001 inch in = inch ft = foot @ = cubic centimeter L = liter gal (U.S.) = U.S. gallon g = gram kg = kilogram Oz = OunCe lb = pound gf=gram-lorce kgf=kilogram-force N = neMon lbf=pound-force N . m = n e M o n m e t e r kg.m=kilogram-meter ft. lb = foot pound mm (H2O) = millimeter water column in (H2O) = inches water column mm (Hg

Sine Rodless Cylinder Series REBR Direct Mount Type

1/8 65 75 27 103 9.5 79 Series REBH Dimensions/25, 32 Dual axis type/REBHT LL 138 4-M thread depth MM PA XB PB 2-Rc 1/8 LW S + Stroke EB EA HC HP NL HG HT HA H HB NT PP PS N A Z + Stroke W Square nut for body mounting J TW (mm) Model A EA EB H HA HB HC HG HP HT J LL LW M MM N REBHT25 REBHT32 125 28.5 79 63 46 46 61.5 19.5 58.5 35 M6 x 1.0 56 119 M6 x 1.0 10 20.5 30 90 75 52.5 57.5 72.5

±1"Hg, Max Vacuum: 29.92" Hg, Positive Pressure: None, Switching Tolerance: ±1"Hg, Weight: 18 grams

V

L 400mm Hg 1 Torr = 0.0197PSI I N L E T P O R T 10 10mm Tube 12 12mm Tube 16 16mm Tube 03 Rc3/8 04 Rc1/2 T03 3/8NPTF T04 1/2NPTF 10 10mm Tube 12 12mm Tube 02 Rc1/4 03 Rc3/8 T02 1/4NPTF T03 3/8NPTF Courtesy of Steven Engineering, Inc. !

CDQ2BP series

micrometer) mm = millimeter cm = centimeter m = meter mils = 0.001 inch in = inch ft = foot @ = cubic centimeter L = liter gal (U.S.) = U.S. gallon g = gram kg = kilogram Oz = OunCe lb = pound gf=gram-lorce kgf=kilogram-force N = neMon lbf=pound-force N . m = n e M o n m e t e r kg.m=kilogram-meter ft. lb = foot pound mm (H2O) = millimeter water column in (H2O) = inches water column mm (Hg

Barbs VMW-4104-25-W/K-P85 25" Hg with Adjusting Knob and 1/8" ID Barbs