Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

, relief port JIS class 2 +1.0 0 mm M5 x 0.8 M5 x 0.8 11 Clean Room Series Microspeed Cylinder Series 10/11 -CM2X Series 10/11 -CM2X How to Order Clean room series 10 11 Mounting Relieving type Vacuum type B L F G BZ Basic Type Axial foot type Front flange type Rear flange type Boss-cut basic type C(D)M2X L 40 10 150 C73 With auto switch (with built-in magnet) Boss-cut front flange type

100

G Pressure gauge*7 E Vacuum pressure switch (Vacuum 2 outputs) F Vacuum pressure switch (Compound pressure 2 outputs) !

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

lVFl 10

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

IR1000/2000/3000

Standard part number X1 Clean room specifications Specifications Non-grease specifications Cleanliness Bleed port Class 10 With M5 fitting (applicable tube O.D. 6) Manifold Specifications (except type IR2120 and series IR3000) 6 IR1000/2000: M5 fitting (applicable tube O.D. 6) IR3000: Rc(PT) 1/2 female thread EXH port Grease Teflon grease 2 to 8 station manifold type regulators.

ZQ-OM01401

ZQ1-LW6-N-A 1) N NPN P PNP (1) 3 Assy ZQ1-PL11-A 4 Assy ZQ1-FC1-A 5 (10 ) ZQ1-FE2-A 6 ZQ1-CV 7 V VVQ1000-50A-C4 (1) 50A-M5 (M5x0.8) (1) 50A-C3 3.2 () 50A-C4 4 () 8 (10 ) 50A-C6 6 () ZK1-CP-A F1-LC3 3.2 () F1-LC4 4 () 9 Assy ZQ1-BK1-A 25 - No.ZQ-OM01401-B 7.3 b a a a 1. (2 ) 2.

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) 8

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

How to Order Manifold Assemblies (Example) Double solenoid (24VDC) SY3260-5G-C6 (2 sets) Cylinder port size M5: M5 x 0.8 Example Single solenoid (24VDC) SY3160-5G-M5 (2 sets) Cylinder port size C6: With 6 One-touch fitting Manifold base (4 stations) SS5Y3-60-04U R D side Port R C8: With 8 One-touch fitting P Stations 1 2 n Port P C8: With 8 One-touch fitting U side SS5Y3-60-04U 1 set (type

Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 3 (Common), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: G (Grommet Lead Wire 0.3m), Surge Suppressor: None, Manual Override: None, Port Size: M5 (Body Ported M5X0.8)

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard, Valve Type: 5-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Open, Pipe Port Type: M, Port Size: M5, Connecting Tube Diameter: -, Pressure Rating(MPa): 0.15 to 0.7, Driving Type: Pilot Type

MHx-OMY0005

. <> AS1211F-M3 AS1201F-M5 AS1000 AS1002F 2-4. 1. 2. 2. 4. 1. () 2. 5 3. 4. 5 10 2-5 1.

I

++t&F Eft!

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

Series P port/Thread VV2Q22-05 1 set Manifold part No. 2 3 VQ20 VQ30 Rc3/8 NPT3/8 NPTF3/8 G3/8 VQ21M1-5G-C6 00N 00T 00F 4 sets Valve part No. (Stations 1 to 4) Stations VQ21M1-5G-C8 1 set Valve part No.

Valve width is 7mm. 3 port solenoid valve, direct operated, Valve width: 7mm, Weight: 5g (single unit valve), Operation noise: 38dB(A) or less, Power consumption: 0.35W (std), 0.1W (w/power saving circuit), VALVE, BASE MOUNT W/SUB-PLATE, VALVE, S070 SOLENOID VALVE,3-PORT, MI, S070 BASE MOUNT M5), .07348 lb

Valve width is 7mm. 3 port solenoid valve, direct operated, Valve width: 7mm, Weight: 5g (single unit valve), Operation noise: 38dB(A) or less, Power consumption: 0.35W (std), 0.1W (w/power saving circuit), VALVE, BASE MOUNT W/CLIPS, VALVE, S070 SOLENOID VALVE,3-PORT, MI, S070 BASE MOUNT M5), .02565 lb

Valve width is 7mm. 3 port solenoid valve, direct operated, Valve width: 7mm, Weight: 5g (single unit valve), Operation noise: 38dB(A) or less, Power consumption: 0.35W (std), 0.1W (w/power saving circuit), VALVE, BODY PORTED, STACKING, VALVE, S070 SOLENOID VALVE,3-PORT, MI, S070 BASE MOUNT M5), .02700 lb

Valve width is 7mm. 3 port solenoid valve, direct operated, Valve width: 7mm, Weight: 5g (single unit valve), Operation noise: 38dB(A) or less, Power consumption: 0.35W (std), 0.1W (w/power saving circuit), VALVE, BODY PORTED, VALVE, S070 SOLENOID VALVE,3-PORT, MI, S070 BASE MOUNT M5), .02081 lb

Valve width is 7mm. 3 port solenoid valve, direct operated, Valve width: 7mm, Weight: 5g (single unit valve), Operation noise: 38dB(A) or less, Power consumption: 0.35W (std), 0.1W (w/power saving circuit), VALVE, BASE MOUNT W/SUB-PLATE, VALVE, S070 SOLENOID VALVE,3-PORT, MI, S070 BASE MOUNT M5), 1.54323 lb

Valve width is 7mm. 3 port solenoid valve, direct operated, Valve width: 7mm, Weight: 5g (single unit valve), Operation noise: 38dB(A) or less, Power consumption: 0.35W (std), 0.1W (w/power saving circuit), VALVE, BASE MOUNT W/SUB-PLATE, VALVE, S070 SOLENOID VALVE,3-PORT, MI, S070 BASE MOUNT M5), .02204 lb

Valve width is 7mm. 3 port solenoid valve, direct operated, Valve width: 7mm, Weight: 5g (single unit valve), Operation noise: 38dB(A) or less, Power consumption: 0.35W (std), 0.1W (w/power saving circuit), VALVE, BODY PORTED, STACKING, VALVE, S070 SOLENOID VALVE,3-PORT, MI, S070 BASE MOUNT M5), .02023 lb