AKH/AKB Series Check Valve with One-touch Fitting

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction

Vacuum Unit

How to Order Manifold w r q e ZZK2 A P 2 L 04 If the manifold parts (set of end plates for both ends and tension bolts) are shipped unassembled, please refer to page 33. q Stations w System/Port e Supply valve and release valve wiring1 Symbol System Port Symbol Stations 01 1 station 02 2 stations Symbol Wiring Selectable wiring for manifold r (Refer to page 16.)

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Grease pack GR-X-005 (5g) Caution 1. Be careful of the snap ring springing out.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

OUT port size Material Symbol 01 02 Port size 1/8 (6A) 1/4 (8A) Stations Symbol Nil S Material Brass Stainless steel D side U side 1 2 3 4 5 n 02 : 10 2 stations : 10 stations All IN ports are 3/8. Refer to the L dimension table on page 7 regarding the maximum number of stations.

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

OUT port size Material D side U side 1 2 3 4 5 n Symbol 01 02 Port size 1/8 (6A) 1/4 (8A) Stations Body material C37 Symbol Nil H Seal material FKM FKM 02 : 10 2 stations : 10 stations Stainless steel All IN ports are 3/8. Refer to the "L" dimensions on page 6 regarding the maximum number of stations.

Series VCL

OUT port size Material D side U side 1 2 3 4 5 n Symbol 01 02 Port size 1/8 (6A) 1/4 (8A) Stations Body material C37 Symbol Nil H Seal material FKM FKM 02 : 10 2 stations : 10 stations Stainless steel All IN ports are 3/8. Refer to the "L" dimensions on page 6 regarding the maximum number of stations.

VCW

OUT port size Material Symbol 01 02 Port size 1/8 (6A) 1/4 (8A) Stations Symbol Nil S Material Brass Stainless steel D side U side 1 2 3 4 5 n 02 : 10 2 stations : 10 stations All IN ports are 3/8. Refer to the L dimension table on page 7 regarding the maximum number of stations.

ZQ-OM01401

B 2 4 () 3) (2)Q1 3 6 () (3)Q2 5 4 () (10) (1):U 4) ) (5) ( [kPa] 7) Assy EA NPN2 EB PNP2 0 to -100 N EC NPN1 + C EE PNP1 + D FA NPN2 (1):M FB PNP2 9) 7) (PD) -100 to 100 FC NPN1 + FE PNP1 + S 5) F C 4) ZFC 5) (6) (7) D 7)VQ100 Ass yP.41 (2)Q2 (3)LO 8)(2)J1,J2Q2 P.8 (3)C 7 - No.ZQ-OM01401-B ZZQ108A-L O C-A (1) (2) (3) (4) (3) (PD) (1) B (: P ) 01

ZL3-OM00801

ZL3-LW1-N-A 1 1) N NPN P PNP 2 ZL3/ZL6 ZL3-EJ1-H-A 1 2) 1) M 0.35 MPa H 0.50 MPa 4 M4x110 2)1 :0.760.84Nm V * 1 3 ZL3 ZL3-SC1-A 4 ZL3 ZL3-SE1-A 1 2 18 No.ZL3-OM00801-A 5 ZL6 ZL6-SC1-A () * 6 ZL3/ZL6 ZL3-EP1-1 -A 1 1 Rc F G N NP 7 ZL3/ZL6 GZ33-K1K-01-X56 (kPa ) GZ33-K1K-01-X56 (inHg/psi ) * *inHg/psi 8 ZL3 ZL3-AD3-A 19 No.ZL3-OM00801-A 8. 8.1 ZL3 12 1 22 3(

VCL

OUT(2) 1 Thread type Rc NPT G Nil N F IN(1) Voltage 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC Port size Class 3 Port size 1/8 (6A) 1/4 (8A) Class 2 Class 4 Symbol 01 02 03 04 06 3/8 (10A) 1/2 (15A) Class B in AC has a rectifying circuit built-in. Class H is AC only. No rectifying circuit.

VCW

Series VC 2 3 4 Class 2 Class 3 Class 4 OUT port size VDW Port size 1/8 (6A) Symbol 01 02 Stations Uside D side 1/4 (8A) Material VQ Stations 1 2 3 4 5 n 02 2 stations All IN ports are 3/8.

100

Model GZ33-K1K-01-X56 GZ33-P1C-N01-X55 Pressure unit kPa inHg/psi dual scale Pressure range 100 to 100 kPa 30 inHg to 14 psi Connection thread R1/8 NPT1/8 Accuracy Vacuum 3% F.S., Positive pressure 5% F.S.

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

D I N 'E Terminal 'T Conduit Temlnal 'H 24' Lead hing 01 %'(AXSrd.) t M5 NOM 10-32 ilanual Overrida _Recessed, Nonlocking (Std.)

lVFl 10

D I N 'E Terminal 'T Conduit Temlnal 'H 24' Lead hing 01 %'(AXSrd.) t M5 NOM 10-32 ilanual Overrida _Recessed, Nonlocking (Std.)

3M/SMseries

) (olN cmnector] (Conduit teminal) Manifold NVF5000 # NW5F5-20 NVF3000 NW5F3-30 Type CYL port Exhaust B mount Common, lndividual o TVpe/Rubber Seal NVF3OOO SyrnUot Douuo NVF323O (B) (A) cl c2 Gompact size and llght weight _1.04inch wide Large flow capacitY -cv1.o(%) Body Ported Slngl NVF313O (B) (A) Low power consumption -1.8WDC WF333O Exhaust Conter NVF343O GNced Center (B) (A) (B) (a) 01

Super Compact Direct Acting 2/3 Port Solenoid Valve Series S070

Body ported Base mounted Body ported Bar stock type Stacking type Meeting miniaturisation needs of analysers, medical equipment and semiconductor manufacturing equipment Series S070 Extremely light weight 5g (Valve single unit) Coming out in May, 2002 Operation noise 38dB(A) or less Easy to increase or decrease the number of stations.

VFS4000-OMY0001

(1) 5 No.VFS4000-OMY0001 (2) 6 No.VFS4000-OMY0001 3 VF4000-9A B 4 () () 7 No.VFS4000-OMY0001 5 1) DIN DIN (+,-) AC DC100V DC24V 810 3 1.25Y-3L1.25-3.5S1.25-4M 0.6Nm 0.6Nm COM (DIN No.3), 8 No.VFS4000-OMY0001 2) , , 1.25-3.5M1.25Y-3L1.25-3M +0.6Nm 3) 1.25-31.25-3S1.25Y-3N1.25Y-3S +0.6Nm 9 No.VFS4000-OMY0001 /01 A+ AB+ BVFS4100 A A VFS4200 A A B

This is a legacy product, and replaced bySYJ514M-5G-01, VALVE, SOL BASE MOUNTED *LQA, VALVE, VZ300 SOL VALVE 3-PORT, NA, VZ300 BASE MT 1/8, .20412 lb

Electro-Pneumatic Proportional Valve

Base mounted Body ported Base mounted Voltage 5 6 24VDC 12VDC Port size Nil M5 01 01F 01N 01T Without sub-plate (PVQ13, 33) With sub-plate (PVQ13 only) Rc 1/8 G 1/8 NPT1/8 NPTF 1/8 Electrical entry Orifice size L type plug connector, with lead wire (PVQ13 only) M type plug connector, with lead wire (PVQ13 only) Grommet (PVQ31, 33) L 03 04 06 08 16 23 40 0.3mm ( for PVQ13) 0.4mm ( for PVQ13

Function: 1 (2 Position Single), Piping: 4 (Base Mounted), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: G (Grommet Lead Wire 0.3m)