VCA

AXT632-68-2 VCA23-VVCA20-3-1 VV2CA2Material Mounting screw Steel Manifold valve Note 1) Gasket HNBR Manifold base Al Note 1) Gasket is included with manifold valve . Series VCA30/40 Series VCA30 Series VCA40 Material Description Description No. Part no. AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 No. Part no.

VCA

AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 Material Part no.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

SMC Pneumatic Clean Series

7 5.5 5.5 5 46.5 37.5 33.5 28 188 154 152 144 1/8 88 64 62 62 8 8 8 6 6 5 50 45 45 41 M26 x 1.5 M26 x 1.5 M20 x 1.5 26-0.033 0 11 8 8 16 13 13 1/4 1/8 1/8 26-0.033 0 32-0.039 0 10 8 M32 x 2 10112122Axial foot style (L) / CM2WL, CM2WL Standard port Relief port H H + Stroke A K F G 2-P (Rc, NPT, G) AL H2 G F A K B H1 2-NN AL Relief port 2-M5 x 0.8 LH Width across flats B1 (This drawing shows

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1 ' l. , r t } | , a x Tspe 20R Xlanifold : Top Ported (External Pilot),l NYV3.L]-2OR{E!IEe!!") inch (mm.i Grommet (G) , (H) 0 1 8 ( 4 . 5 ) D ' a . H E 6 "o id' g : R ; i L Type Plug Connector(L) M Type Plug Connector(M) 0.47 t12t 0.33 {8.5) l f r!

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1 ' l. , r t } | , a x Tspe 20R Xlanifold : Top Ported (External Pilot),l NYV3.L]-2OR{E!IEe!!") inch (mm.i Grommet (G) , (H) 0 1 8 ( 4 . 5 ) D ' a . H E 6 "o id' g : R ; i L Type Plug Connector(L) M Type Plug Connector(M) 0.47 t12t 0.33 {8.5) l f r!

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

1 ' l. , r t } | , a x Tspe 20R Xlanifold : Top Ported (External Pilot),l NYV3.L]-2OR{E!IEe!!") inch (mm.i Grommet (G) , (H) 0 1 8 ( 4 . 5 ) D ' a . H E 6 "o id' g : R ; i L Type Plug Connector(L) M Type Plug Connector(M) 0.47 t12t 0.33 {8.5) l f r!

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

M8 connector Cable length For connector cable of M8 connector, refer to page 90. 1 2 3 4 7 300 mm 500 mm 1000 mm 2000 mm 5000 mm 4 Series SYJ3000 2 Position Single [ ]: AC G H G H Grommet (G), (H): SYJ3120-M3 With bracket: SYJ3120-M3-F G: Approx. 300 H: Approx. 600 (Lead wire length) 54.4 [56.6] 28.4 32.2 22 2-3.5 (For mounting) 3.2 7.1 13.2 16.4 10 + 8.2 A B 4 19.3 7 11.5 Manual override

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

M8 connector Cable length For connector cable of M8 connector, refer to page 1-5-78. 1 2 3 4 7 300 mm 500 mm 1000 mm 2000 mm 5000 mm 1-5-7 Series SYJ3000 2 Position Single [ ]: AC G H G H Grommet (G), (H): SYJ3120-M3 With bracket: SYJ3120-M3-F G: Approx. 300 H: Approx. 600 (Lead wire length) 54.4 [56.6] 28.4 32.2 22 2-3.5 (For mounting) 3.2 7.1 13.2 16.4 10 + 8.2 A B 4 19.3 7 11.5 Manual

3 Port Solenoid Valve Series SYJ300/500/700

N.O. 1 (P) 3 (R) 1 (P) 3 (R) a c e d a c e d (A) (A) 2 2 g g 3 (R) 1 (P) 3 (R) 1 (P) b b f f Component parts Replacement parts Note Zinc die-casted No.

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

hole For top mounting (M4) 2 x M6 mounting hole For top mounting (M4) Manual override (Non-locking) (Coil positioning pin) (Coil positioning pin) 3 x 1/4 3 x 1/4 2 x M6 x 1 for bottom mounting 2 x M6 x 1 for bottom mounting Note) There is also VT317-H (Lead wire length: 600 mm).

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: Rc, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: -, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: Rc, Material: H (Stainless Steel Body, FKM Seal, Class B Coil)

VT317

for bottom mounting 2-M6 x 1 for bottom mounting VG VP S070 Note) There is also VT317-H (Lead wire length: 600 mm).

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: Rc, Material: Brass Body, NBR Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: Rc, Material: Brass Body, NBR Seal, Class B Coil, Option: F (Foot Bracket)

Fitting Type: B (Branch Tee), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 5G (Tube O.D. 1/4", Tubing Size 3/4"x5/8"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: F (Female), Thread: N (NPT)

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: NPT, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: Rc, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: G, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -