Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) R F (h9) E (g6) Q Y P A B C D G K L M N Model 90 180 270 CDRB2BW10-S CDRB2BW15-S CDRB2BW20-S CDRB2BW30-S 18.5 18.5 25 25 24 29 36 43 9 12 14 16 4 5 6 8 M3 x 0.5 depth 5 29 34 42 50 15 20 29 40 29 29 30 31 14 18 20 22 3 4 4.5 5 9 10 10 12 0.5 0.5 0.5 1 10 15 20 30 25 25 25 25 M5 x 0.8 M5 x 0.8 M3 x 0.5 M3 x 0.5 M3 x 0.5 depth 5 M4 x 0.7 depth 7 M5 x 0.8 M5 x 0.8 M5 x 0.8 depth 10 11-2

Modular F.R.L. Unit

F 25 30 41 50 50 G 20 24 35 40 40 J 7 12 14 18 18 K 4.5 5.5 7 9 9 K 4.5 5.5 7 9 9 L 2.8 3.2 4 4 4.6 M 40 50 71 88 88 B 126 177 242 278 278 Q 0 5 3.5 1.5 1.2 AC10A AC20A AC30A AC40A M5 x 0.8 35 60 80 110 110 48 73 86 92 93 56 83 110 145 155 108 160 201 239 242 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 27 30.5 38.5 38.5 _ _ _ AC40A-06 Optional specification Note 1) Note 1) For optional specifications

Table of Contents

(mm) <M5, M6> <M5, M6> A Weight (g) D P M L Model Urethane 2-applicable tubing KAU23-M5 38 9.6 15.5 34.5 9 M5 x 0.8 M6 x 1 2.2 2.2 10 38.5 3.4 2.9 11 1 8 KAU23-M6 KAU23-U01 11 3.2 9.6 KAU04-M5 39.5 M5 x 0.8 M6 x 1 4 2.2 2.2 KAU04-M6 10 11 10.4 16 36 10.4 40 4 1 8 KAU04-U01 11 4.2 4.2 K 1 4 KAU04-U02 42 16 14 KAU06-M5 42.5 M5 x 0.8 M6 x 1 39 2.2 2.2 12 KAU06-M6 43 13 M Connection thread 17

Modular Design with Uniform Body Style

E 300 L 03 D L-shaped piping adapter q w e q Body size [Applicable AC size] 200 [AC20] 300 [AC30] 400 [AC40] 500 [AC40-06] 600 Symbol Description [AC50, AC60] w Pipe thread type Nil Rc V V V V V N NPT V V V V V F G V V V V V + 01 1/8 V V 02 1/4 V V V 03 3/8 V V 04 1/2 V V V e Port size Port size 06 3/4 V V 10 1 V Standard Specifications Fluid Air Ambient and fluid temperatures 5

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25 2B 14 5 23 8 6 23 8 8 29 12 6.2 4 1.8 12 29 6 23.5 8 8 29.5 1 2 6.2 4.5 2.3 ZPT3~ 32 35 14.5 5 23.5 8 29.5 1 2 Deep type F:M5X O .8 F:M6 x l F:M8 x l .25 F :~ vi D I E 1 G D I E IG D I E 1 G D I E G MOdel ,A ;B Ic ZPT25D 25 28 20 5 129 1 8 6 129 1 8 8 135 1 1 2 6.2 135 1 12 1 0 I 16 Flat type Deep type/ ZPT10D ' 16D Flat type Deep type/ ZPT40D only F F F F Widlh across Width acro5$ flats

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

number will be VF113c, VF123c. 3-4-5 6 Series VF1000 How to Order Port size (P, A, B) Thread type Only when 01 (1/8) M5 01 M5 x 0.8 Nil F N T Rc G NPT NPTF 1 8 EA, EB port: M5 x 0.8 Option F With bracket Body ported VF1 1 2 1 L 01 0 Not installed when delivered Manifold VF1 1 3 0 1 L 01 Port size (A, B) Body option Type of actuation Coil rated voltage M5 01 M5 x 0.8 Electrical entry 0 Standard

Rotary Actuator/Vane Type

F E Y2 F Y2 CRQ2X MSQX L L E MRQ 2 x Q4 2 x Q4 K K C B D G D G B C U H U H M T N M T 25.5 N (34.5: Connector type) 2 x R 1 2 x R Auto switch P P W1 W Auto switch Size: 20, 30 Size: 40 W W 2 67 8 15 8 When D-M9m is used 32.5 1.

Battery-less

1 !2 u r q !7 y Component Parts No.

1

Combination description Holder mounting bracket X416 1 2 1 1 1 1 1 1 1 X417 1 1 1 1 1 2 1 1 1 A, L, H, AS, LS, HS Nil W Z A L H AZ LZ HZ Nil W A L H MY1 B X168 Bore size Stroke Auto switch Suffix X416 on one side X416 on both sides X416 on one side, X417 on the other side X416 on A unit side X416 on L unit side X416 on H unit side X416 on A unit side, X417 on the other side X416 on L unit

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8

F

T O R M A L E/M A L E N I P P L E: 1/8-1/8 H E X 1/4-1/4 H E X 3/8-3/8 H E X 1/2-1/2 H E X F L U S H TA P E R P L U G S: 18, 14, 38, 12, 34 P O R T S I Z E 3 M3 5 M5 01 18 3/4-3/4 H E X C O N F I G U R AT I O N See Product Selectors T U B E S I Z E ( W H E R E A P P L I C A B L E) 3 3.8mm OD 2mm ID 4 4mm OD 2.5mm ID 6 6mm OD 4mm ID H O W T O O R D E R M A L E/M A L E N I P P L E H O W T

Series VQ Base Mounted Metal Seal/Rubber Seal

VVQ1000-19AC3 C4 C6 M5 C3 C4 C6 M5 F P L VS VS7 Check valve for prevention of back pressure assembly [-B] VVQ1000-57A DIN rail mounting bracket [-D] VVQ1000-AR-1 Regulator unit VVQ1000-R-1-C6 Individual EXH spacer VVQ1000-18A Refer to p.1.10-157 for cylinder port fittings.

High Vacuum Angle Valve

How to Order [Option] XLGV M9N 16 A 1 G L Flange size 16, 25, 40 1 q e u r t XLGV M9N 50 A 1 G L Flange size 50, 63, 80 i w y o !0 !

REA/REB

-X 20Stop Data 10-2-11 11 Series REA Dimensions REA25/32/40 Effective thread depth J L 0 0.1 B NN G 4-MM H G 2-port size X D I NB NB T N K W N S + Stroke F NA F R ZZ + Stroke (mm) B D F G H I K L MM x J N NA NB NN Model Port size REA25 REA32 REA40 Rc 1/8 46 27.8 13 8 20.5 34 10 70 M5 x 0.8 x 8 15 30 13 M26 x 1.5 Rc 1/8 60 35 16 9 22 40 15 80 M6 x 1.0 x 8 17 36 15 M26 x 1.5 Rc 1/4 70 43 16

REA/REB

L1 Data n = 1 + 2 + 3 + 4 = 0.333 + 0.125 + 0.25 + 0.27 = 0.978 1 And it is possible to use. 10-2-79 Table Deflection Amount Displacement of Table due to Pitch Moment Load Displacement of Table due to Yaw Moment Load Displacement of Table due to Roll Moment Load Guide central axis (1 axis type) F F A F L L A L Guide central axis (1 axis type) Opposite port side M1 = F x L A M2 = F x L M3

Smooth Cylinder/Low Speed Cylinder

Without auto switch With auto switch Stroke range (mm) Bore size (mm) C D E I H J K L M Q 11.5 A A B F 5.5 B F Q P M5 x 0.8 P 5 10 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 30 23 32 40 33 7.5 10.5 13 16 45 60 1/8 M8 x 1.25 4.5 14 7 34 10.5 1/8 7.5 40 36.5 46.5 38.5 48.5 33 29.5 39.5 30.5 40.5 40 46.5 39.5 8 11 13 16 52 69 1/8 M8 x 1.25 5 14 7 40 8 11 1/8 50 48.5 40.5 10.5 10.5 15 20

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Body Material Aluminum Body Material Brass A A 2 x J 4 x J A A 2 x J 4 x J B C F B B C F B 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 C F C D E D E F D E D E Body Material: Aluminum [mm] Body Material: Brass [mm] Size Port size A B C D E F J 20 1/8, 1/4 11 36 6 34 46 1.5 5.3 30 1/4, 3/8 13 46 7 40 56 1.5 Size Port size A B C D E F J 20 1/8 52 24 9 36 64 1.5 6 20, 30 1/4, 3/8

ZP

adsorption (sec) QL: Leakage volume during workpiece adsorption L/min (ANR) Note 1) Q = + QL T1 T2 = 3 x T1 Max. suction flow rate Qmax = (2 to 3) x Q L/min (ANR) Ejector Select the ejector with the greater maximum suction flow rate from the Qmax indicated above.

MY1

ftlb 1 kg = 2.2046 lb 1 in = 25.4 mm F1 M1 = F x L M F x L M F x L F F L L L 90 Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1MW/CW How to Order MY1 M W 25 300 A93 Number of auto switches Guide type 2 pcs. 1 pc.