Table of Contents

K L M N P Q R S T U V W Y Z 473 Model A 360 570 948 1354 1612 2112 1724 1 2 3 4 1 2 1 2 3 4 3 4 3 4 3 4 1 2 1 2 3 4 10 10 12 18 18 18 18 4.5 4.5 4.5 6.0 6.0 6.0 8.0 94 94 150 139 139 139 195 60 60 60 66 66 66 70 120 140 140 140 120 140 140 140 220 60 60 90 100 100 100 200 193 193 238 289 289 289 357 293 293 326 354 354 354 428 159 159 215 219 219 219 159 159 245 264 264 264 203 203 266

High Vacuum Angle Valve

XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions

7

4 !4 u u VX2 i i VXK !0 !2 !0 !2 VXD VXD !1 t !1 t VXZ o y o y IN(P1) !3 VXS r !3 IN(P1) r OUT(P2) VXB B A OUT(P2) A B VXE IN(P1) C C IN(P1) e e q w VXP q w VXD2A VXD2B VXR !4 i VXH !4 u u !0 VXF A B !1 i VX3 !2 !0 !2 VXA o !1 t !3 o OUT (P2) w IN(P1) !3 B r OUT(P2) A r IN (P1) e C e IN(P1) C q w q VXD2E, 2F, 2G VXD2C, 2D Component Parts Operation When coil !

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic style (Through-hole): CQ2WB U 2-H thread effective depth C (Opposite side, too) Q Q 2-Rc 3/8 (Port size) I Width across flats K CUJ 11 D D 32 22 M E CU Minimum lead wire bending radius 10 2.5 Auto switch CQS Note 1) Flat washer 4 pcs. 4-N through-hole CQM 2 x 4-OA thread depth RA B + Stroke A + 2 (Stroke) K J M E 2 x 4-OB counterbore depth RB L L + Stroke CQ2 S (Opposite side, too)

ZP

5 4 ZQ 5 6 8 32 34 29 39 57 ZPY32B Applicable Tubing Applicable Tubing ZF Q R Applicable tube P Q R Applicable tube P N4 (Nylon tube, 4/2.5) N6 (Nylon tube, 6/4) U4 (Urethane tube, 4/2.5) U6 (Urethane tube, 6/4) 13.5 15.5 5 7 1.8 2.5 ZP N4 (Nylon tube, 4/2.5) N6 (Nylon tube, 6/4) U4 (Urethane tube, 4/2.5) U6 (Urethane tube, 6/4) 14.5 16.5 5 7 1.8 2.5 13.5 15.5 5 7 1.8 2.5 ZCU 14.5 16.5 5

This is a legacy product, and replaced byVT307-5DO1-01N-Q, VT3 BASE MT 1/8, VALVE, VT3/VO3 SOL VALVE 3-PORT, NA, VT3 BASE MT 1/8, 0.34012 lb

Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: M (M Plug Connector w/Lead Wire 0.3m), Manual Override: Non-locking Push Style, Port Size: 01N (NPT1/8), CE Compliant: Q (CE Marked)

Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: G (Grommet w/Lead Wire 0.3m), Manual Override: Non-locking Push Style, Port Size: 01N (NPT1/8), CE Compliant: Q (CE Marked)

Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Manual Override: Non-locking Push Style, Port Size: 01N (NPT1/8), CE Compliant: Q (CE Marked)

Function: R (External Pilot), Coil Voltage: 5 (24VDC), Lead Wire: M (M Plug Connector w/Lead Wire 0.3m), Manual Override: Non-locking Push Style, Port Size: 01N (NPT1/8), CE Compliant: Q (CE Marked)

Function: R (External Pilot), Coil Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Manual Override: Non-locking Push Style, Port Size: 01N (NPT1/8), CE Compliant: Q (CE Marked)

Manifold Type: 42 (Base Mounted), Valve Stations: 2 Stations, A, B Port: 01N (NPT1/8), CE Marked: Q (CE Marked)

Manifold Type: 42 (Base Mounted), Valve Stations: 3 Stations, A, B Port: 01N (NPT1/8), CE Marked: Q (CE Marked)

Manifold Type: 41 (Base Mounted), Valve Stations: 3 Stations, A, B Port: 01N (NPT1/8), CE Marked: Q (CE Marked)

Function: K (High Pressure 0.9W), Coil Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Manual Override: Non-locking Push Style, Port Size: 01N (NPT1/8), CE Compliant: Q (CE Marked)

Auto Switch Guide

RS Q G RS H A Weight RZQ (g) MI W S D-G5BA Auto switch model 0.5 Lead wire length (m) CEP1 3 68 5 108 CE1 Auto Switch Internal Circuit CE2 Dimensions OUT (+) Brown ML2B Main circuit of switch C J G5-S 4 CV OUT () Blue Indicator light MVGQ CC Indicator light/Display method 4.5 mounting hole RB Operating range J Most sensitive position Indication Green Red Red D-X Optimum operating position

Modular F.R.L. Unit

J Drain guide 1/4 Note 4) AFM30, 40 Nil Rc AFM20 to 40 1/8 1/4 3/8 1/2 3/4 01 02 03 04 06 R Flow direction: Right to left AFM20 to 40 N Note 1) NPT D Float type auto drain (N.O.)

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Pad Type Lislf} Vacuum Entry"Mounling SmIxj TlTeEif ~~zeJ n .s ."0-"16 'DiiltiMi) j 04 4 Tube 06 6 Tube ~I 08 B Tube ~20 ':" 32 140-5Il : I 4 h 2 4 6 8 10 13 16 20 25 32 40 50 Ast type T Rat with rib DNptype Bellows type M5 x Q.8 '1\6' M6 x 1 2' U A8 Ma XI I ~1 B4 M4 x 0.7 B5 M5 x O .8 J~ 86 M6 X' , ,'. , Bjj M8xl.25 AS j!

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300