Table of Contents

4 !5 !6 !7 No. q w e r t y u i o !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

4 !5 !6 !7 No. q w e r t y u i o !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

4 !5 !6 !7 No. q w e r t y u i o !

Rotary Actuator/Vane Type

6 q w !4 !2 w !4 o !0 !7 !1 q !5 !1 Double shaft type Single shaft type Single shaft type Component Parts Double shaft type DNo. Description Material Note No.

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Pad Type Lislf} Vacuum Entry"Mounling SmIxj TlTeEif ~~zeJ n .s ."0-"16 'DiiltiMi) j 04 4 Tube 06 6 Tube ~I 08 B Tube ~20 ':" 32 140-5Il : I 4 h 2 4 6 8 10 13 16 20 25 32 40 50 Ast type T Rat with rib DNptype Bellows type M5 x Q.8 '1\6' M6 x 1 2' U A8 Ma XI I ~1 B4 M4 x 0.7 B5 M5 x O .8 J~ 86 M6 X' , ,'. , Bjj M8xl.25 AS j!

Modular F.R.L. Unit

3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 How to Order How to Order AR 30 1N AR 30 BG F X430 03 BG F N X425 03 Regulator Regulator For high/low temperature For high pressure 25 30 40 50 60 20 25 30 40 50 60 Body size Body size X430 X440 Low temperature High temperature Thread type Thread type Nil Rc Nil Rc N NPT N NPT F G F G

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic style (Through-hole): CQ2B U H thread effective depth C 2-Rc 3/8 Q F (Port size) I 4-N through-hole 11 32 M D 22 E Lead wire Minimum lead wire bending radius 10 2.5 Auto switch Note) 2 x 4-OB counterbore depth RB (Opposite side also) With flat washer 4 pcs.

REA/REB

RS Q G RS H A RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-2-69 69 Series REBR Construction: 15, 25, 32 !6 !9 i !2 !1 !0 @1 r t e u y @0 q @2 @4 @8 @9 !3 !8 !7 #0 @6 o @3 w @7 !5 @5 !4 REBR15 Component Parts No. Description Body No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 2) Common to single solenoid and double solenoid 568 Exploded View of Manifold 1021-VQ2000 Plug-in Unit: Exploded View (F/P/J/L/G/S kit) Manifold block assembly D-side end plate assembly U-side end plate assembly Housing assembly and SI unit S kit P/J kit F kit G kit L kit q !3 o !0 u !5 w !2 !6 !4 !

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 2) Common to single solenoid and double solenoid 568 Exploded View of Manifold 1021-VQ2000 Plug-in Unit: Exploded View (F/P/J/L/G/S kit) Manifold block assembly D-side end plate assembly U-side end plate assembly Housing assembly and SI unit S kit P/J kit F kit G kit L kit q !3 o !0 u !5 w !2 !6 !4 !

ZP

Model A B C Y D P Q R Model A B C D E F Flat Flat with ribs P Q R F F U C U C U C 1.2 1.6 2.6 4.8 7 9 ZPY20 20 25 32 23 14 28 5 4.5 2.3 1.8 1.7 N4 (Nylon tube 4/2.5) N4 (Nylon tube 4/2.5) 13.5 5 1.8 14.5 5 1.8 24 42 4 4 5 ZPY04U ZPY06U ZPY08U 8 35 6 0.8 ZPY25 14.5 24.5 42.5 N6 (Nylon tube 6/4) ZPY32 N6 (Nylon tube 6/4) 15.5 7 2.5 2.5 16.5 7 2.5 1 Deep U4 (Soft tube 4/2.5) U4 (Soft tube 4/

REA/REB

RS Q G RS H A RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-2-69 69 Series REBR Construction: 15, 25, 32 !6 !9 i !2 !1 !0 @1 r t e u y @0 q @2 @4 @8 @9 !3 !8 !7 #0 @6 o @3 w @7 !5 @5 !

JIS Standard Hydraulic Cylinder

+ l 2 x Rc P 4 x FD J MM FY BB D E e Air release K F MA l C Width across flats G f Air release 10 NA FT A SS NB B SS + Q + l S + Stroke FX M H ZZ + Stroke ZZ + Q + l + Stroke FZ (mm) With rod boot Stroke range (mm) Bore size (mm) l e J B BB C F GA GB M NA NB P R S FD FT FX FY FZ SS f Q B-rod C-rod B-rod C-rod 32 27 15 M10 x 1.25 25 to 1400 58 16 21 15 11 37 31 3/8 39 130 11 11 88 40 109

New

M Conduit terminal 24 VDC With surge voltage suppressor 1/8 3.2 N 100 VAC 1/4 Stainless 5/32 4 steel P 110 VAC 7/32 5.6 Q 200 VAC W 1/8 3.2 X Y 5/32 4 3/8 R 230 VAC 7/32 5.6 S Conduit 24 VDC With surge voltage suppressor C E F 1/8 1/8 3.2 VX2 T 100 VAC 1/8 3.2 U 110 VAC 1/4 5/32 4 V 200 VAC G C37 7/32 5.6 W 230 VAC J 1/8 3.2 K L 3/8 5/32 4 Faston terminal Single 7/32 5.6 3 Size 3 Unit Q

CQ2

Contents No. q w e r t y u i o !0 !1 !2 !3 !4 !

MY1

6 @7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 No. q w e r t y u i o !

High Vacuum Angle Valve

XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions

MXS Series Air Slide Table

0 HA GA 5H9 4 deep +0.030 0 A B NN-M6 X 1 thread 12 deep 6 1 26 5.1 9.5 10.5 10.5 A B 24 10.5 24 10.5 H (NN-1) X H G Cross section AA Cross section BB (mm) Model F 35 35 35 40 30 55 65 70 GA 16 16 16 16 51 61 109 159 KA NA 2 2 2 2 2 4 4 4 N 4 4 4 4 6 6 6 8 HA 40 40 40 50 30 70 70 70 G 16 16 16 16 21 26 39 19 H 40 40 40 50 30 35 35 35 NN 2 2 2 2 3 4 5 7 I 10 10 10 10 15 40 55 68 J 40 40 40

smcmaintenancepartslist

2 #4 e !8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

+ l 2-RcP 4-FD R J MM FY BB D E e Air release K F MA l C Width across flats G f Air release 10 NB NA FT A SS B SS + Q + l + Stroke S + Stroke FX H M ZZ + Stroke ZZ + Q + l + Stroke FZ (mm) With rod boot Bore size (mm) Stroke range (mm) l J B BB C F GA GB M NA NB P R S FD FT FX FY FZ SS e f Q 32 M10 x 1.25 58 62 38 16 21 15 11 37 31 3/8 39 130 11 11 88 40 109 30 52 21.5 15 25 to 1400 1/3.5