High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 A XLS Series Dimensions XLS/Without control power supply D Lead wire AWG20, O.D.: 2.63 mm E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(D, Y) Manual override (Non-locking) Double Single VK 197.5 (3 position: 226.5) Y: 217.5 (3 position: 246.5) D: 218.5 (3 position: 247.5) 218.5 (3 position: 247.5) Y: 108.5 (3 position: 123) D: 109.5 (3 position: 124) (3 position: 124) (3 position: 113.5) VZ (Pitch) (Mounting hole) VF 6-Rc 3/8 (P, R port) 6-Rc 3/8 (P, R port) 6-Rc 3/8 (P, R port) 6-Rc 3/8 (P, R port) (With individual EXH

A

www.stevenengineering.com I 5.17 AIR PREPARATION MODULAR TYPE ACCESSORIES BRANCHING UNITS H O W T O O R D E R "T" TA K E-O F F Y A P P L I C A B L E FRL S E R I E S 1 1000 2 2000 3 3000 4 4000 5 4000-06 6 5000, 6000 Fits between modular units using 'Y' Type Connectors Cannot be installed adjacent to combined filter/regulator unit D I M E N S I O N S T TA K E O F F D I M E N S I O N S X TA

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AW20 (K) to 40 (KJ !

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

o o r P ) a P M ( g i s p ) 5 . 1 ( 0 2 2 ) a P M ( g i s p e r u s s e r P . r e p O . x a M ) 0 . 1 ( 0 5 1 a i d e M l i O , r e t a W e r u t a r e p m e T d i u l F d n a t n e i b m A ) C 0 6 ~ 5 ( F 0 4 1 ~ 0 4 l e d o M A B C D E F G H I J K L 5 T L A ) 4 7 1 ( 5 8 . 6 ) 0 7 ( 6 7 . 2 ) 6 1 ( 3 6 . ) 7 ( 8 2 . ) 1 9 ( 8 5 . 3 ) 6 0 1 ( 7 1 . 4 ) 7 9 1 ( 6 7 . 7 ) 4 2 ( 4 9 . ) 2

Table of Contents

(3.2) C4 (4) C6 (6) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-82 P. 2-4-84 Built-in silencer Built-in silencer 2-4-5 6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-4-6 7 Cylinder Speed Chart Use as a guide for

Regulator for 2 MPa ARX 20

Piston assembly Valve Valve spring No. 4 5 6 1348104A 1348105 1348109 SUP OUT 2 ARX 20 Dimensions Panel cutout dimensions 26 R2.5 SUP OUT SMC K C O P A A L U S H 12 37 54 25 1.6 (max. thickness 4.5) 44 79.5 (when regulating pressure = 82) 5.4 10 31.5 OUT OUT 35 Options Bracket Panel nut Material 1348110A POM, NBR (gasket) Material 1348112 SPCC (black zinc chromated) Part No. Part No.

High Vacuum Angle Valve

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16

PSxx-OMM0006CN

(M8(3 )11 ) 01 X M ISE40A 2 K ISE40A -0.11.000 MPa ZSE40A 0.0-101.3 kPa ZSE40AF -100.0100 kPa 1 01 R1/8 (M5) A A N01 NPT1/8 (M5) W1 Rc1/8 B B WF1 G1/81 D D M5 M5X0.8 () E C4 4 C6 6 F + 1IS0228-1 P10/1 X NPN2() Y PNP2() 1 R NPN2 +/ T PNP2 +/ M SI2 P (psi)1 S NPN2 +/ 1 2kPaMPa V PNP2 +/ -9No.PS-OMM0006CN-E /1 1 01 N01 W1 WF1 M5 C4 C6 A A ZS-24-A X X X B B ZS-24-B X X X X X D

PFxx-OMS0001CN

6 6 6 zhi chi ON OFF ON OFF OU2 -30No.PF-OMS0001CN-A <>OUT1 [F 1] [oUt1][()] [oU1] [] [1ot] [] 32 33 34 36 -31No.PF-OMS0001CN-A a.

PFxx-OMP0001CN

55 mA 3F.S. 3F.S. 1F.S.(0.05S 2F.S.) 5F.S.(050 25 ) NPN PNP 80 mA (NPN) DC28 V () NPN 1 V (80 mA ) PNP 2 V (80 mA ) 4 0.05 0.1 0.5 1 2 5 0 -62No.PF-OMP0001CN-F PFMB7501 PFMB7102 PFMB7202 15 V420 mA () 1 k 6 24 V 600 12 V 300 7 0.4 V ()30 msec. 8 9 L/mincfm 10 3 Lft -25525 L/min -501050 L/min -1002100 L/min (-44 [ 0]) (-99 [ 0]) (-1919 [ 0]) 0999,999,990 L 1 L/min

PFxx-OMO0004CN

55 mA 3F.S. 3F.S. 1F.S.(0.05S 2F.S.) 5F.S.(050 25 ) NPN PNP 80 mA (NPN) DC28 V () NPN 1 V (80 mA ) PNP 2 V (80 mA ) 4 0.05 0.1 0.5 1 2 5 0 -65No.PF-OMO0004CN-E PFMB7201 15 V420 mA 1 k 6 24 V 600 12 V 300 7 0.4 V () 30 msec. 8 9 L/mincfm 10 3 Lft -10210 L/min(-11 L/min [ 0]) 0999,999,999 L 1 L/min 1 L LED 3 7 ON (OUT1:OUT2 IP40 AC1000 V 1 50 M (DC500 V )

PSxx-OMG0001CN

-22No.PS-OMG0001CN-H , (2030 ) -23No.PS-OMG0001CN-H PSE300 ( ) No.1 ON ON OFF Yes No No.2 OFF ON No.1 OFF No.3 No.4 No.5 No.6 No.7 -24No.PS-OMG0001CN-H No.8 Yes No No.9 No.9 No.10 No.11 No.12 No.13 No.14 No.15 No.16 -25No.PS-OMG0001CN-H No.

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6 !2 !8 !5 !7 @1 @0 !9 !1 !0 MGP CY CX CK1 C(L)K CDJZ2B10/16-Z-B C(L)KU CKQ Component Parts CKZ2N No.

Smooth Cylinder/Low Speed Cylinder

4 6 21.5 4 6 6 4 8 1.5 [1] 6 3.5 6 3.5 22.5 10 7.5 10 25 7.5 2.5 10 7.5 4.5 3.5 [1] 7 5.5 7 5.5 24.5 11 9.5 11 27 9.5 1.5 0 32 0.5 11 9.5 2.5 Note 1) [ ]: Denotes the values of D-A93.

Vacuum Unit

V port type A C Metric size 06 6 8.25 4 08 8 11.4 6 Inch size 07 1/4" 9.7 4.76 09 5/16" 11.4 6 PV port type B Metric size 06 6 9.7 Inch size 07 1/4" 12.3 37 Vacuum Unit ZK2mA Series Dimensions: Single Unit A B G For high-noise reduction silencer exhaust For port exhaust ZK2 K m mmWA-m K to S E2, 3 Exhaust (EXH) port Metric size: 08 (8) Inch size: 09 (5/16") E Exhaust port Ejector system,

SMC Pneumatic Clean Series

H F N1 1.5 Width across flats NA N2 FT Cushion valve (Width across flats 1.5) WB 4-FD S + Stroke Z + Stroke ZZ + Stroke FY 40 (mm) 13 8 AL D K MM NA NN B1 B2 Bore size 6 6 6 6 ZZ Z H H2 H1 S P N1 I F C2 A 52 40 40 34 B FX FZ FY GB FT 4 7 FD E 20-0.033 0 N2 GA GC WA WB WC 42.5 34.5 30 24 8 8 8 47.3 37 37 30 6 6 5 108 82 80 80 11 8 8 8 1/8 36 31 31 31 16 13 13 13 125 46.5 37.5 33.5 28 7 5.5

Compatible Fluid: Air / Water, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Body Material: Resin, Application: Individual Item, Connection Type: Tube Connection, Tube Diameter: φ8, Operating Temperature Range(°C): -10～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 6, IP Rating: IP65, Acquired

Compatible Fluid: Air / Water, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Body Material: Resin, Application: Individual Item, Connection Type: Tube Connection, Tube Diameter: φ8, Operating Temperature Range(°C): -10～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 6, IP Rating: IP65, Acquired

Compatible Fluid: Air / Water, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Body Material: Resin, Application: Individual Item, Connection Type: Tube Connection, Tube Diameter: φ10, Operating Temperature Range(°C): -10～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 6, IP Rating: IP65, Acquired