Model: 4 (VDW40), Voltage: 5 (24VDC), Power-saving Circuit: None, Electrical Entry Direction: L2 (90° Left Direction), Orifice Diameter: 6 (6.0 mm), Port Connection Type: C8 (One-touch fitting for ø8), Body Material and Coil Insulation Type: B (PPS Body, EPDM Seal, Class B Coil), Option: None

Model: 4 (VDW40), Voltage: 5 (24VDC), Power-saving Circuit: E (Power-saving Circuit), Electrical Entry Direction: Piping Direction, Orifice Diameter: 6 (6.0 mm), Port Connection Type: C10 (One-touch fitting for ø10), Body Material and Coil Insulation Type: B (PPS Body, EPDM Seal, Class B Coil), Option: None

Title not found

p10 24 sole.o a. Possib A, B port size (metric) A, B port size (inch) l)6 Orerolch fttirg . o 1 2 ou une lolan nftro une-Ioucn I rrrnq o5/T6 Onerouch litl ng 08 One-rouch ifi ng ;oon" lo*1,lit'^ ot'z une rou.n I rlnq A, B porls mixed ncaseotmixedsp.cilicalonaM) nd.aleseparaleyonamarrolo : _.:.. :,1 r,'r.:r, .., 68 Manifold Flat Ribbon Cable Connector Series Connector type ?

A

4, 6 S Y M B O L S Primary pressure Bar Flow ln/min H O W T O O R D E R M I N I AT U R E R E G U L AT O R (N)ARJ1020F (N)ARJ1020F M5 D I M E N S I O N S S E R I E S NARJ 04 4mm 06 6mm Japanese N North American M5 M5X0.8 Panel Mount Dimension Model A B C D E F G H J NARJ1020F-M5-04 21 10.4 4 M5X0.8 6 10.6 3.5 15.5 50 NARJ1020F-M5-06 22 12.8 6 Courtesy of Steven Engineering, Inc. !

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT325 VT325V (Vacuum spec. type) VT325 VT325V (Vacuum spec. type) 0.55 kg (For AC) 0.60 kg (For DC) Note) Values for a single valve unit.

PFxx-OMS0001CN

8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4

PSxx-OMM0006CN

/4 n_1=B+(A-B)/4 A= H_1= (A-B)/2 H_1= (A-B)/2 B= OUT2P_1n_1H_1P_2n_2H_2 ( 1) -35No.PS-OMM0006CN-E [F 5] / / 0 <> [F 5] -36No.PS-OMM0006CN-E [F 5] / 5 ms ooo1 C_5 10 ms o.r1 () () ( ) OUT2 C_5C_5 C_5() EEPROM -105.0105.0 kPa -210210 kPa -0.1051.050 MPa -1.1551.155 MPa 10.0-105.0 kPa -115.0115.0 kPa -37No.PS-OMM0006CN-E [F 6] 5R.D. <> [F 6] [FSC] 1 [F 6] -38No.PS-OMM0006CN-E

XL-OMY0003

SUS304> 5 (SUS304) () 2 4 (A6063) < A6063> C D E E F C H B G A A mm A B C D E F G H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003 5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003 6 6-1. 1 1P4P5 10 XL-OMY0003 6-2 1 2 b 3 1 2 O 4 a aa b O O

High Vacuum L Type Valve

) 2 5 Body (Material: A6063) Valve (Material: SUS304) 6 Valve seal 2 (Maintenance part) 3 (Valve seal 2) Nut assembly (Maintenance part) (Set of a nut and a washer) 9 Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) (Shaft) 11 XL-OMS0001-B 5-2.Dimensions C E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20

ZB-OM00301

() () () () () () () Q1 N.C. () () () () () () 5 DC24V Q2 () () 6 DC12V Assy 1) Ass'y 2 L L AXT661 LO L M L2) (mm) 300 MO L2) 14A ()()() 6 600 (NC) 1) 10 1000 13A () () 20 2000 300mm 30 3000 3 Ass'y ZB1-VQ110U(M1.7X15)2 2)M ZB1-VQ110U-B (M1.7X22)2 3) ZB1-VQ110L(M1.7X22)2 ZB1-VQ120U(M1.7X15)2 B () ZB1-VQ120U-B (M1.7X22)2 3) ZB1-VQ110(M1.7X15)2 4) 3 ZB1-VQ110-B (M1.7X22)2 V Assy

CG1-OM0227

P1357 D-H7BA,G5BA BBA3,BBA4 5 (30%) 13 14 () (mm) 1) () 2) 6. 15 7 Best Pneumatics No. P.12631371 Best Pneumatics No. P.13281329 (NC=b )(D-F9G,F9H )Best Pneumatics No. P.1290 (D-G5NB )Best Pneumatics No. P.1320 16 / 17 3. 3-1. 1 2 3 4 5 6 7 8 9 10 3-2. 2040 50100 18 3-2-1. 02 50 3-2-2. 1 6 2 7 6. 7. 3 19 3-2-3.

IR20-OM00008

(B),2 (C),(B)(A), () (B)(C) (A) BLEED (B) (C) OUT SUP SUP. 1 1 M Pa/ m ( B) m 2 N / m m m M Pa M Pa/ m m M Pa B m /N (A) ) ( N N m / N ( C) m 2 N ( A) m 2 N -5- 3. 1 SUP OUT 2 %F.S 3 4 R B(P36202028) G 2 3 Rc,F N IR2000G43-2-01 G43-P2-N01-X30 IR2010G43-4-01 G43-P4-N01-X30 IR2020G43-10-01 G43-P10-N01-X30 021/44 Rc NNPT FG 00.0050.2MPa 1: 0.010.4MPa 20.010.8MPa

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

PFxx-OMO0004CN

8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4

ARJ1020F

M5 x 0.8 6 3.5 15.5 50 17.2 ARJ1020F-M5-06 22 12.8 6 VY1 Manifold Base (Option)/Dimensions G PPA 2-3.5 (Mounting hole) 31 (ARJ1020F-M5-04) 32 (ARJ1020F-M5-06) AL Applicable tubing O.D. 4, 6 (Mounting hole) IN (Common) Stations Manifold base part no. 4 6 10 B dimension A dimension 90 130 210 82 122 202 ARJM10-4 ARJM10-6 ARJM10-10 14-4-5 3 Miniature Regulator Series ARJ210 Lightweight body

IR10-OM00007

JIS B 8370: JIS B 8361: JIS B 9960-1: -(1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. -2- . / 1 1.5 *3) *3) 1 1 () -3- IR1000 (1) 0.2% F.S.

IR30-OM00013

Rc1/8 [2 ] 0.64 (1) (0.1MPa) (2) IR3000:0.2MPa (3)2 ON-OFF () (4) 4- (C) (C) (A) (A) (C) (A) (C) BLEED SUP OUT SU P N/ M Pa/ ( S) N N m 1 1 M Pa/m ( ) m 2 M Pa M Pa (A) /N (B) / ( ) m 2 ( A ) m 2 5- I R 3 0 0 1 SUP OUT 2 3%F.S. 3 R B(P36203018) G 2 3 RcF N IR3000G43-2-01 G43-P2-N01-X30 IR3010G43-4-01 G43-P4-N01-X30 IR3020G43-10-01 G43-P10-N01-X30 02:1/4 03

CC-Link-E

Pi n assi gn of bus adapt or si de connect or I t em Pi n assi gn I t em Socket assi gn SLD SLD 4 4 3 D B D B CCLi nk I N CCLi nk O U T 3 2 5 D G D G D A 1 2 D A N . C.

PFxx-OMP0001CN

8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4

XL-OMY0001

industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 XL-OMY0001 / 1 1.5 *3) 3)1 1 () 3 XL-OMY0001 1 &/ 1.52 2 ( ) 5 5 P-01-11 P-06-3 4 XL-OMY0001 2.2 A6063 SUS316L SUS304 5 P11 FKM 3 3[]P8 60 , 245250Hz 30m/s 5 XL-OMY0001 /H0 H4 H5 510% O 0.1mm0.2mm 6 P13 3 3 P7P8 5 P11 7 P14 P18 6 XL-OMY0001 33 5 P11