Spring Return/Double ClevisType (D) r.rclzol e*" "iaF] srotd s Clevis pin included 2A I @sil/tr SERIES NCJ2 Standard Type: Single Acting/ Spring Extend Spring Extend/Basic TYPe (B) r.rcrze [E-" "izel-lst t"l r NCJ2B10, 16 '06 (1i4') e 16 (Y8") Spring Extend/Foot TyPe (L) nc.
Spring Return/Double ClevisType (D) r.rclzol e*" "iaF] srotd s Clevis pin included 2A @sil/tr I SERIES NCJ2 Standard Type: Single Acting/ Spring Extend Spring Extend/Basic TYPe (B) r.rcrze [E-" "izel-lst t"l r NCJ2B10, 16 '06 (1i4') e 16 (Y8") Spring Extend/Foot TyPe (L) nc.
E: Contents are added. F: Measurement laws are added. G: Contents are added. H: Contents revised in several places. I: Contents revised in several places. [June 2018] J: Contents revised in several places.
A One-touch fittings KP series B Dimensions (mm) Model A B C SFE4G 6 68.5 16.5 SFE5H 8 79 20.5 SFE7J 10 89 24 Bracket SFE-BR3 14 5 3.4 (15.5) 12.5 5.4 5.4 14 24 (20) SFE-BR4/5/7 B C (J) H D (F) G A E E Dimensions (mm) Model A B C D E F G H J SFE-BR4 30 16 7 4.5 7.5 (24.5) 17 15.5 (19.5) SFE-BR5 30 10 8.2 4.5 8.1 (29) 20 18 (23) SFE-BR7 34 14 7.35 4.5 9.8 (35) 24 20 (27.3) ( ): Reference dimensions
E Key lock function 5% R.D. Display pressure value This function prevents incorrect operations such as accidentally changing the set-value. 0 Applied pressure + F Zero-out function Displayed value at the time of shipment This function clears and resets the zero value on the display of measured pressure.
Caution -4- Specifications Model S F E 11 Port size Male thread type Plug-in type One-touch fitting type Max. flow capacity Symbol Port size Symbol Port size Symbol Applicable L/min (ANR) tube O.D. 11 M50.8 3 3A 4 3F 4 30 42 R1/8 4B 6 4G 6 65 52 R1/8 5C 8 5H 8 130 53 R1/4 130 73 R1/4 7D 10 7J 10 200 Accessory (Bracket) S F E B R 3 Symbol Applicable model 3 SFE3 4 SFE4 5 SFE5 6 SFE7
() 10 m DC(-)() () * -6No.PS-OML0002CN-G ( ) () CE 050(5), * ON , 1015 10 /1 2146 LCD * -7No.PS-OML0002CN-G 01 N ISE30A 3 ISE30A -0.11 MPa Y ZSE30A 0-101 kPa ZSE30AF -100100 kPa K T 2 01 R1/8(M5) N01 NPT1/8 (M5) A1 A C4H 4mm5/32 inch C6H 6mm A2 B NH7 1/4 inch N7H A3 C C4L 4mm5/32 inch C6L 6mm B N7L 1/4 inch D + N NPN1 P PNP1 A NPN2 B PNP2 C NPN1+ D NPN1+ E
E Keylock function Indicated value of pressure 5% R.D. Prevents operation errors such as accidentally changing setting values. 0 Applied pressure + F Zero-clear function Indicated value at the time of shipment Adjustable range of display calibration function This function clears and resets the zero value on the display of measured pressure.
/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations R 1/ 4NPT 1/4G
ID Series 4-1 Daily Inspection 4 1 IDX-OM-X004 Heatless Air Dryer 4 Maintenance 4-2-2 Service parts Adsorption cylinder structural chart Adsorption cylinder part table Name of articles Number Number of the table 1 Case 2 Pipe 3 Circle of stopping Me of E type 4 Filter element Table 1 5 Oring 6 Plug 7 Oring 8 Spring 9 Panting metal 10 Filter element Table 2 11 Adsorbent 12 Snap ring 13 Oring
E Error indication With the self-diagnostic function of the Pressure switch, this indicates that there is an error which could cause a switch failure. F Fine adjustment mode Refer to "Fine adjustment of display value". A displayed pressure value can be adjusted within the range of 5%R.D. (5% of the displayed value).
/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations R 1/ 4NPT 1/4G
Pilot: Internal Pilot, Voltage: 24VDC, Lead Wire: DIN Connector, Surge Suppressor: Light & Surge Suppressor, Port Size: 3/4, Thread: Rc, Passage: Normally Closed, Option: Continuous Duty, CE Compliant: CE Compliant
Pilot: Internal Pilot, Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: Z (Light & Surge Suppressor), Port Size: 06 (3/4), Thread: Rc, Passage: A (Normally Closed), Option: E (Continuous Duty), CE Compliant: Q (CE Compliant)
Model: E (Bulkhead Connector), Applicable Tube O.D.: 06 (Ø6), Connection Thread: G02 (1/4G)
Model: E (Bulkhead Connector), Applicable Tube O.D.: 08 (Ø8), Connection Thread: G02 (1/4G)
Model: E (Bulkhead Connector), Applicable Tube O.D.: 10 (Ø10), Connection Thread: G02 (1/4G)
Model: E (Bulkhead Connector), Applicable Tube O.D.: 04 (Ø4), Connection Thread: G02 (1/4G)
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Operator for Direct Mechanical Position Feedback (various lengths Single/Double Acling Pilot Valve with Span for Easy Field Model 1P3100 (Rotary Type) Variable Posilion Bellows, Flapper & Nozzle for Field Changeable, Direct or Reverse Out 1 Port to Actuator Feedback Out 2 Port to Actuator Feedback Arm for Direct Mechanical Single or Double Acting Pilot Valves and Exhaust Valves with Flow 4g