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VM230U-02-08A VM-08A 110 g Red VM220-02-30RA VM230-02-30RA VM220U-02-30RA VM230U-02-30RA VM-30AR 58 g Black VM220-02-30BA VM230-02-30BA VM220U-02-30BA VM230U-02-30BA VM-30AB Green VM220-02-30GA VM230-02-30GA VM220U-02-30GA VM230U-02-30GA VM-30AG Yellow VM220-02-30YA VM230-02-30YA VM220U-02-30YA VM230U-02-30YA VM-30AY Push button (Mushroom) Red VM220-02-32RA VM230-02-32RA VM220U-02-32RA VM230U

03-A 02-A IS10E-3003-A 04-A Cross spacer Note 6) Y14-M5-A Y24-01-A 02-A Y34-01-A 02-A Y44-02-A 03-A Y54-03-A 04-A Note 1) in part numbers for a round pressure gauge indicates a pipe thread type.

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

Applicable model 90-BM64 90-IDG50L 90-BM65 90-IDG75L, 100L *With cap bolts (2 pcs.) and spring washers (2 pcs.) 45 Clean Air Filter 90-SFD Series How to Order 90 2 0 SFD 0 C08 Series compatible with secondary batteries Port size Connection size Note 90 Material restriction Symbol C08 C10 C12 02 N02 F02 8 10 12 Clean One-touch fittings (Series KP) Clean air filter Rc 1/4 NPT 1/4 G 1/4 Size

ZSE5-02-27L Two Output NPN Open Collector 30V, 80mA ZSE5-02-67L Two Output PNP Open Collector 80mA ISE5-02-26L None (Analog Output) 1~5V(5%F.S.)

Supply pressure: 0.3 to 1.0 MPa Set pressure: 0.2 MPa Flow rate: 0 L/min (ANR) Back pressure: 0.5 MPa Supply pressure: 0.5 MPa IR2000-02 IR2000-02 IR2000-02 ARJ 0.204 0.5 0.2 AR425 to 935 Set pressure (MPa) Set pressure (MPa) Set pressure (MPa) Set pressure P2 (MPa) 0.4 0.202 Set point 0.15 ARX 0.3 0.200 AMR 0.1 0.2 0.198 ARM 0.05 0.1 0.196 ARP 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 0

: 27.5mm2 Effective Area Model Port Size NPT A B C NAK2000-N01, 02 18, 14 50 25 22 NAK4000-N02, 03, 04 14, 38, 12 67 36 36 NAK6000-N06, 10 34, 1 95 50 50 H O W T O O R D E R ( N ) A K 2 0 0 0 S E R I E S 000 (N)AK P O R T S I Z E M O D E L 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 P O R T T H R E A D 2 1/4 4 1/2 6 1 Nil Rc(PT)* N NPT F G(PF)* * Remove N when ordering Courtesy of Steven Engineering

Conditions: Supply pressure 0.7MPa Set pressure 0.2MPa Flow rate 0 l/min (ANR) Conditions: Back pressure 0.5MPa Conditions: Supply pressure 0.5MPa IR2000-02 IR2000-02 IR2000-02 0.204 0.5 0.2 Set pressure MPa Set pressure MPa Set pressure P2 MPa 0.4 0.202 Setting point 0.15 0.3 0.200 0.1 0.2 0.198 0.05 0.1 0.196 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 0 100 200 300 400 0 100 200 300 400

1/4, 3/8 61 68 26 5.5 56 45.5 5.25 25 13.2 20.6 (N)AS3000-02, 03 Courtesy of Steven Engineering, Inc. !

0 1 Standard Micro load Port size Nil 02 N02 With gasket Rc 1/4 NPT 1/4 16-9-3 2 Series IS3000 Construction Precautions IS3000-02/3010-02 (Rc 1/4 thread) Be sure to read before handling.

Connection Rc 1/4 02 Connection Rc 3/8 03 AV eL-bracket Connection Rc 1/2 04 Bracket B Accessories AU 178 Bracket C Connection NPT1/4 N02 qAF30 wAFM30 AF Connection NPT3/8 N03 Connection NPT1/2 N04 AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Connection G 1/

(PAP331) Besides, sidebody and port are made of molded piece, that has enabled to generate lower particulate. 1 N Diaphragm material 1 With silencer AN200-02 for Air EXH. 2 When NPT port thread is necessary, use AN200-N02. 1 PTFE Long service life Operating method Durability has been improved by adopting the denaturated PTFE for the diaphragm.

regulator ITV2050-212S-X26 SMC REGULATOR SMC REGULATOR VBA UNLOCK LOCK RESET SET VE VY G 1 2 3 Stations AL Manifold base (3 stations) IITV20-02-3 (1) 1set (3 station manifold base part no.) 1set (Electro-pneumatic regulator part no.) (2) IITV20-02-3 ITV2030-312S-X26 P398020-13 ITV2050-212S-X26 1set (Blanking plate assembly part no.) 1set (Electro-pneumatic regulator part no.) (2) The

Via Garibaldi 62 I-20061 Carugate Milano, Italy TEL: 02-9271365 FAX: 02-9271365 MEXICO SMC Corporation (Mexico), S.A. DE C.V. Carr.

models are not Applicabl model Specitications 6 E Sel orergur max. 0.1 MPa ,o o Sel pressure ma-x. 0.5 MPa 3 o o Set pressure max. 0,9 MPr 5 O_l o Connection Rc 1/4 02 o o, Connection Rc 3/8 03 r) o Connectlon Rc 'l12 o4 o Bracket B O ,l Brackel c c :l: 6 A Connection NPTI/4 N02 _l ., connection NPT3/8 N03 C c co$nection NPT1/2 N04 a) Connection G 1/4 F02 o ll Connection G 3/8 F03 C al Connection

How to order SFD 1 1 0 C08 Option Symbol Option Nil None B Bracket Port size Symbol C04 4 C06 6 C08 8 02 N02 F02 Connection size Clean One-touch fittings (KP series) Rc1/4 NPT1/4 G1/4 7 Document No.DOC1018377 4. Construction and Replacement parts SFD110-C** SFD110-*02* Component Parts No.

43 70 75H 02 43 2 75 010 MPa A 75H 015 MPa 1 02 Rc1/4 N02 NPT1/4 S M12 (5m) F02 G1/4(ISO1179) L M12 (5m) 1 27 2 NPN 2 M SI 2 43 NPN 1 1 PNP 1 P psi() 1 65 PNP 1 1 2MPa 67 2 PNP 2 ZS-31-A A M12 (5 m) ZS-31-B S M12 (5 m) ZS-31-C L -8No.PS-OMH0002CN-D LCD () SET UP DOWN 4 24 ()OUT1ON LCD 4 UPON/OFF DOWNON/OFF SET -27-67 (-27-67 OUT2()) -9No.PS-OMH0002CN-D 7 7 "8"7 "-"(

Male thread nozzle 02 03 N02 N03 F02 F03 11 12 H06 H08 H10 H07 H09 H11 Rc1/4 Rc3/8 NPT1/4 NPT3/8 G1/4 G3/8 KK4P-02MS KK130P-02MS KQ2H06-02S KQ2H08-02S KQ2H10-02S KQ2H07-35S KQ2H09-35S KQ2H11-35S Threaded Thread size High efficiency nozzle S coupler plug Model no. of coupler used Low noise nozzle with male thread Metric size one-touch fitting Model no. of fitting used Extension nozzle Inch

Piping: 2 (Top Direction), Body Color: BU (Dark Blue), Piping Type: N (NPT), Connection Size: 02 [Screw-in (Port Size 1/4)]

Piping: Top Direction, Body Color: Dark Blue, Piping Type: NPT, Connection Size: 02 [Screw-in (Port Size 1/4)], Nozzle: -, Nozzle Cover: -, Flow Rate Adjustment: -