Size: ø10, Valve Type: 2 [NO (Operating Pressure 1MPa)], Sealant: NBR, Thread: Rc, Port Size: 1/8, Voltage: 200VAC 50/60HZ, Lead Wire: Grommet, Manual Override: -, Bracket: -, X200: -, CE Compliant: -

Size: ø10, Valve Type: 2 [NO (Operating Pressure 1MPa)], Sealant: NBR, Thread: Rc, Port Size: 1/8, Voltage: 110VAC 50/60HZ, Lead Wire: Grommet, Manual Override: -, Bracket: -, X200: -, CE Compliant: -

Size: ø10, Valve Type: 2 [NO (Operating Pressure 1MPa)], Sealant: NBR, Thread: Rc, Port Size: 1/8, Voltage: 110VAC 50/60HZ, Lead Wire: Grommet w/Surge Suppressor, Manual Override: Locking Style Slotted, Bracket: -, X200: -, CE Compliant: -

Size: ø10, Valve Type: 2 [NO (Operating Pressure 1MPa)], Sealant: NBR, Thread: Rc, Port Size: 1/8, Voltage: 200VAC 50/60HZ, Lead Wire: Grommet Terminal, Manual Override: Locking Style Slotted, Bracket: -, X200: -, CE Compliant: -

Size: ø10, Valve Type: 2 [NO (Operating Pressure 1MPa)], Sealant: NBR, Thread: Rc, Port Size: 1/8, Voltage: 110VAC 50/60HZ, Lead Wire: Grommet w/Surge Suppressor, Manual Override: -, Bracket: -, X200: -, CE Compliant: -

Size: ø10, Valve Type: 2 [NO (Operating Pressure 1MPa)], Sealant: NBR, Thread: NPT, Port Size: 1/4, Voltage: 24VDC, Lead Wire: DIN Terminal, Manual Override: -, Bracket: -, X200: -, CE Compliant: -

Size: ø10, Valve Type: 2 [NO (Operating Pressure 1MPa)], Sealant: NBR, Thread: Rc, Port Size: 1/8, Voltage: 200VAC 50/60HZ, Lead Wire: Grommet w/Surge Suppressor, Manual Override: Locking Style Slotted, Bracket: -, X200: -, CE Compliant: -

Table of Contents

VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.

2

-10A 10 15.9 26.7 37.9 35.7 15.6 52 AS32l1FG-G02-12A 12 18.5 29.7 40.9 34.5 17 53 AS32l1FG-G03-06A 6 10.4 21.8 33 36.4 1/4 21 16.6 50 48.4 43.5 41.9 AS 13.3 37 AS32l1FG-G03-08A 8 13.2 22.7 33.9 14.2 38 AS32l1FG-G03-10A 10 15.9 26.7 37.9 28 15.6 39 AS32l1FG-G03-12A 12 18.5 29.7 40.9 26.8 17 41 AS42l1FG-G04-10A 10 10.4 21.8 33 28.7 AS-FS 3/8 21 16.6 42.3 40.7 34.8 33.2 15.6 69 AS42l1FG-G04-

Table of Contents

Body type Plug-in type VVFS5000-10A Non plug-in type Part no.

2/3 Port Valve

VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.

SQ1000/2000

B 10A (+) () 10B (+) () () COM (+) Note) Positive COM spec. Negative COM spec.

7

VXS 8A 1/2 10 10A 1/4 VXB 15A Stainless steel A N.O. 3/8 B Grommet 100 VAC With surge voltage suppressor 1/2 VXE C 110 VAC G H J K 3/8 D 200 VAC 4 10A C37 N.C. VXP 1/2 E 230 VAC 15 15A 3/8 Stainless steel B N.O. F VXR 24 VDC 1/2 G DIN terminal 24 VDC L M 5 20A C37 N.C. VXH With surge voltage suppressor 3/4 20 H 100 VAC C N.O. Stainless steel J 110 VAC VXF 6 25A N.C.

VFS

Body type Plug-in type VVFS3000-10A Non plug-in type Part no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Stations 3 m Manual override 10 Clean series VVQ1000-10A-1 VVQ1000-10A-1 VQ1200-5 VQ1200-51 Seal 0 1 Nil: Non-locking push type (Tool required) B: Locking type (Tool required) VQ1200-5 VQ1200-51 Copper/Fluorine/Silicone free + Low particle generation VQ1200-5 VQ1200-51 VQ1200-5 VQ1200-51 21 VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51 Metal seal Rubber seal VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Stations 3 m Manual override 10 Clean series VVQ1000-10A-1 VVQ1000-10A-1 VQ1200-5 VQ1200-51 Seal 0 1 Nil: Non-locking push type (Tool required) B: Locking type (Tool required) VQ1200-5 VQ1200-51 Copper/Fluorine/Silicone free + Low particle generation VQ1200-5 VQ1200-51 VQ1200-5 VQ1200-51 21 VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51 Metal seal Rubber seal VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51

0.4

(Station 9) VV5Q11-09C6FU2 VQ1100-51 VQ1200-51 VQ1300-51 VVQ1000-10A-1 Function Symbol Specifications DC AC Note) For CE-compliant models, DC-type only.

1

9B 10B 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A Station 2 Station 3 Station 4 Station 5 10A COM 10B Station 6 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B Station 7 Station 8 If alignment is not specified, the internal wiring is double wiring (connected to SOL. a and SOL. b) regardless of number

42

The load ratio is obtained by the following formula: ((Load mass x 9.8)/Theoretical output) x 100% Conditions MB, CA2 series CS1, CS2 series Series Condition 10A x 1 m SGP (Steel pipe) dia. x Length VQ4100--03 VQ4101--03 AS420-03 Speed controller AN30-03 Silencer 10A x 1 m SGP (Steel pipe) dia. x Length VQ5100--04 VQ5101--04 AS420-04 Speed controller AN40-04 Silencer 448 INDEX Page 446 Base

V100

-5 (For VQZ100) VVQZ200-10A-2 (For VQZ200) VVQZ300-10A-2 (For VQZ300) It is used by attaching on the manifold block for being prepared for removing a valve for maintenance reasons or planning to mount a spare valve, etc.