Size: ø15, Valve Type: 1 [NC (Operating Pressure 1MPa)], Sealant: NBR, Thread: Rc, Port Size: 1/2, Voltage: 24VDC, Lead Wire: Grommet Terminal, Manual Override: Non-locking Push Style, Bracket: Bracket, X200: -, CE Compliant: -

Size: 2 (ø15), Valve Type: 1 [NC (Operating Pressure 1MPa)], Sealant: A (NBR), Thread: Rc, Port Size: 15A (1/2), Voltage: 3 (110VAC 50/60HZ), Lead Wire: D (DIN Terminal), Manual Override: Non-locking Push Style, Bracket: B (Bracket)

Size: 2 (ø15), Valve Type: 1 [NC (Operating Pressure 1MPa)], Sealant: A (NBR), Thread: Rc, Port Size: 15A (1/2), Voltage: 3 (110VAC 50/60HZ), Lead Wire: G (Grommet), Manual Override: Non-locking Push Style, Bracket: B (Bracket)

Size: 2 (ø15), Valve Type: 1 [NC (Operating Pressure 1MPa)], Sealant: A (NBR), Thread: Rc, Port Size: 15A (1/2), Voltage: 4 (220VAC 50/60HZ), Lead Wire: G (Grommet), Manual Override: Non-locking Push Style, Bracket: B (Bracket)

Size: 2 (ø15), Valve Type: 1 [NC (Operating Pressure 1MPa)], Sealant: A (NBR), Thread: Rc, Port Size: 15A (1/2), Voltage: 5 (24VDC), Lead Wire: E (Grommet Terminal), Manual Override: Non-locking Push Style, Bracket: B (Bracket)

Size: 2 (ø15), Valve Type: 1 [NC (Operating Pressure 1MPa)], Sealant: A (NBR), Thread: Rc, Port Size: 15A (1/2), Voltage: 4 (220VAC 50/60HZ), Lead Wire: DZ (DIN Terminal w/Light & Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Bracket: B (Bracket)

Size: 2 (ø15), Valve Type: 1 [NC (Operating Pressure 1MPa)], Sealant: A (NBR), Thread: Rc, Port Size: 15A (1/2), Voltage: 1 (100VAC 50/60HZ), Lead Wire: DZ (DIN Terminal w/Light & Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Bracket: B (Bracket)

Size: 2 (ø15), Valve Type: 1 [NC (Operating Pressure 1MPa)], Sealant: A (NBR), Thread: Rc, Port Size: 15A (1/2), Voltage: 5 (24VDC), Lead Wire: G (Grommet), Manual Override: Non-locking Push Style, Bracket: B (Bracket)

Size: 2 (ø15), Valve Type: 1 [NC (Operating Pressure 1MPa)], Sealant: A (NBR), Thread: Rc, Port Size: 15A (1/2), Voltage: 5 (24VDC), Lead Wire: DZ (DIN Terminal w/Light & Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Bracket: B (Bracket)

Size: ø15, Valve Type: 1 [NC (Operating Pressure 1MPa)], Sealant: NBR, Thread: Rc, Port Size: 1/2, Voltage: 220VAC 50/60HZ, Lead Wire: DIN Terminal w/Light & Surge Voltage Suppressor, Manual Override: Non-locking Push Style, Bracket: Bracket, X200: -, CE Compliant: -

Size: ø15, Valve Type: 1 [NC (Operating Pressure 1MPa)], Sealant: NBR, Thread: Rc, Port Size: 1/2, Voltage: 100VAC 50/60HZ, Lead Wire: DIN Terminal w/Light & Surge Voltage Suppressor, Manual Override: Non-locking Push Style, Bracket: Bracket, X200: -, CE Compliant: -

Size: ø15, Valve Type: 1 [NC (Operating Pressure 1MPa)], Sealant: NBR, Thread: Rc, Port Size: 1/2, Voltage: 24VDC, Lead Wire: Conduit Terminal w/Light & Surge Voltage Suppressor, Manual Override: Non-locking Push Style, Bracket: Bracket, X200: -, CE Compliant: -

Size: 2 (ø15), Valve Type: 1 [NC (Operating Pressure 1MPa)], Sealant: A (NBR), Thread: Rc, Port Size: 15A (1/2), Voltage: 5 (24VDC), Lead Wire: GS (Grommet w/Surge Suppressor), Manual Override: Non-locking Push Style, Bracket: B (Bracket)

Size: 2 (ø15), Valve Type: 1 [NC (Operating Pressure 1MPa)], Sealant: A (NBR), Thread: Rc, Port Size: 15A (1/2), Voltage: 5 (24VDC), Lead Wire: EZ (Grommet Terminal w/Light & Surge Voltage Suppressor), Manual Override: A (Non-locking Push Extended Style), Bracket: B (Bracket)

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

3 Port Solenoid Valve Metal Seal Series VZ200 1

Cv C[dm2/(sbar)] b Cv Flow characteristics 1 2 (P A) 2 3 (A R) Body ported Max. operating frequency (c/s) (AC/DC) (1) 15 21/21 or less 0.125 15 21/21 or less 0.250 Response time (ms) (AC/DC) (2) Weight (kg) (3) Note 1) Minimum operating frequency: As per JIS B 8373 (Once in 30 days) Note 2) Based on JIS B 8375-1981 (Supply pressure; 0.5 MPa; without surge voltage suppressor) Note 3) Value

Aluminum High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 XLS Series Dimensions XLS/Without control power supply D E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT C B L (mm) Grommet (G) A B C

Series KP/KPQ/KPG

Burst Pressure Characteristics Curve and Operating Pressure How to Order TPS0604 B 20 5 4 Tubing designation Burst pressure MPa Burst pressure 3 Color Roll length Color White Black Red Blue Yellow Green Symbol W B R BU Y G Length 20m bundle 100m bundle Symbol 20 100 2 1 1m = 3.28ft Max. operating pressure -20 0 0 20 40 60 80 Operating temperature C 1MPa = 145 psi F = (1.8 x C) + 32 14 Related

Series KP/KPQ/KPG

Burst Pressure Characteristics Curve and Operating Pressure How to Order TPS0604 B 20 5 4 Tubing designation Burst pressure MPa Burst pressure 3 Color Roll length Color White Black Red Blue Yellow Green Symbol W B R BU Y G Length 20m bundle 100m bundle Symbol 20 100 2 1 1m = 3.28ft Max. operating pressure -20 0 0 20 40 60 80 Operating temperature C 1MPa = 145 psi F = (1.8 x C) + 32 14 Related

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Parts (b) Lever Description Note C4: A, B port One-touch fitting for 4 C6: A, B port One-touch fitting for 6 No.