IDUS/IDFS

Inlet air temperature 35C Outlet air pressure dew point 10C Ambient temperature 35C Inlet air pressure 0.5MPa Air flow 1200 l/min (ANR) Inlet air temperature 55C Outlet air pressure dew point 10C Ambient temperature 35C Inlet air pressure 0.7MPa Air flow 350 l/min (ANR) Condition Condition A = 0.75 based on conditions q, w and e 1 1 B = 0.95 based on conditions q, w and e C = 1.00 based on

CUJ

Bore size (mm) Hard anodized Aluminum alloy CUJB4-PS 4 q Cylinder tube Electroless nickel plated Copper alloy Set of nos. above !1, !2, !3 and an exclusive grease pack.

LFE-OMY0008

[%F.S.] 2 1 0 OUT OUT OUT OUT 0 D 2D 3D 4D 5D IN IN IN IN 0 1 2 3 4 5 5 (5D) [] [] LFE13/8 inch 0.2 MPa LFE23/4 inch LFE31 inch (mm) D 5 D LFE1 11 55 LFE2 21 105 LFE3 27 135 68 No.LFE*-OMY0008 4.0 3.5 3.0 2.5 [%F.S.]

LV50-OMQ0004

[%F.S.] 4 3 2 1 OUT side IN side 0 0 D 2D 3D 4D 5D 0 1 2 3 4 5 Straight pipe length The smaller the piping size, the more the product is affected by the length of straight piping. The straight piping length shall be a minimum of 5 times (5D) the piping size to achieve a stable measurement.

CUJ

CAT.ES20-157 A Mini Free-mount Cylinder Series CUJ 4, 6, 8, 10 Mini Free-mount Cylinder Miniature body 10 13 + Stroke 17 4 15 19 CUJB4-4D 13 18 + Stroke 26 6 CDUJB6-8D 13 18 + Stroke 33 8 CDUJB8-15D 21 13.5 18 + Stroke 38 10 CDUJB10-20D 22 Length is shortened by approx. 64% max. CU Volume is reduced by approx. 70% max.

AC Servo Motor Driver (Network card type ）

frequency Depth Setting Setting Setting Setting Frequency Frequency Frequency [dB] [Hz] [Hz] [Hz] value value value value 0 1 2 3 4 5 6 7 8 9 A B C D E F -40.0 -24.1 -18.1 -14.5 -12.0 -10.1 00 01 02 03 Disabled 20 21 22 23 24 25 26 27 28 29 2A 2B 2C 2D 2E 2F 30 31 32 33 34 35 36 37 38 39 3A 3B 3C 3D 3E 3F 70 66 62 59 56 53 51 48 46 45 43 41 40 38 37 36 40 41 42 43 44 45 46 47 48 49 4A 4B 4C 4D

Table of Contents

In the case of liquid: P Q = 1.9 x 106Av (9) G Q : Flow rate [l/min] Av : Flow coefficient [m2] P : Pressure difference [MPa] G : Relative density [water = 1] In the case of saturated aqueous vapor: Q = 8.3 x 106Av P(P2 + 0.1) (10) Q : Flow rate [m3/s] Av : Flow coefficient [m2] P : Pressure difference [Pa] P1 : Relative density [MPa]: P = P1 P2 P2 : Relative density [MPa] Front matter 4

Table of Contents

0 t t r i w e r i u w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!

2/3 Port Valve

-6A VNA1-8A VNA1-10A EZ, TZ, DZ: 9mm longer 4.2-7 VNA 10A, 15A, 20A, 25A Port size EZ, TZ, DZ: 9mm longer Main Port Rc(PT) A H I J K R F G L M B S N C T P D U Q E Model 3 8 1 2 3 4 VNA2-10A VNA2-15A VNA3-20A VNA4-25A 72.5 80.5 74.5 79.5 82.5 125.5 142.5 24.3 63 124 2.3 52 42 25 26 28 34 4.5 14 55 60.5 73 1 84 100 92 108 135.5 137 153 154 170 83.5 89.5 88.5 94.5 91.5 97.5 28.3 33.3 80 90

Air Slide Table

ZZ MXQ 20A-mm2 With end lock (20) Q Pilot port 2 x M5 x 0.8 Dimensions [mm] 5 J 3 7 Model J Q MXQ20A-10Zm2 91.5 MXQ20A-20Zm2 MXQ20A-30Zm2 101.5 MXQ20A-40Zm2 111.5 MXQ20A-50Zm2 127.5 MXQ20A-75Zm2 161.5 MXQ20A-100Zm2 234.5 38 0.5 9.5 3 72 16.2 10 53 61 MXQ20A-125Zm2 259.5 MXQ20A-150Zm2 284.5 3 MXQ20A-10Z2 7 5 J * Dimensions other than those listed above are the same as those for the standard

1

SY 3 5 1 0 0 1 q w r e t y u i o !0 !1 Base mounted q Series !

New

Body material: Aluminum, C37, Stainless steel Body material: Resin q q t t w w y u i y u i e e r r o o IN OUT IN OUT !0 !0 Component Parts Component Parts No.

7

3 IN(P1) r OUT(P2) VXB B A OUT(P2) A B VXE IN(P1) C C IN(P1) e e q w VXP q w VXD2A VXD2B VXR !4 i VXH !4 u u !0 VXF A B !1 i VX3 !2 !0 !2 VXA o !1 t !3 o OUT (P2) w IN(P1) !3 B r OUT(P2) A r IN (P1) e C e IN(P1) C q w q VXD2E, 2F, 2G VXD2C, 2D Component Parts Operation When coil !

VFR

1, Metal joint q, w End plate (D) !2, Connection bracket q, w, Gasket e, r, O-ring y, u End plate (D) !2, Connection bracket q, w, Gasket e, t, O-ring y, u Non plug-in type Plug-in type VVF4000-3A-2 !

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY3000 SY3000-26-9A(-Q) SY5000 SY5000-26-20A(-Q) SY7000 SY7000-26-22A(-Q) SY9000 SY9000-26-2A(-Q) Series Gasket assembly part no. SY3000-GS-2 SY5000-GS-2(-Q) SY7000-GS-2(-Q) Series Assembly part no.

SY

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 +0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q : Air flow rate [l/min (ANR)] S : Effective area (mm) P : Pressure drop (P1 P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures Multiply

VFS

0, Terminal i, Metal joint q, w, Gasket r, Receptacle assembly Manifold block !0, Metal joint q, w, Gasket r End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, Gasket e, t, O-ring y, u End plate (D) !2, Metal joint q, w, Gasket e, t, O-ring t, y 03 04 VVF4000-1A-1Plug-in type Manifold block assembly !

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Body type Plug-in type VVFS2000-20A-1 Non plug-in type VVFS2000-20A-2 Part no.

HRS100/150

Right Left Rear Front w q Parts List e Part no. Applicable model No.

Thermo-chiller

/Japanese 1 pc.), Y-strainer 20A 1 pc., Barrel nipple 20A 1 pc., Drain pan for the pump Weight (dry state) 333 lbs (151 Kg) 339 lbs (154 kg) Note 4) q Facility water temperature: 90F (32C), w Circulating fluid: Tap water, e Circulating fluid flow rate: Rated flow, r Power supply: 200 VAC Note 5) q Facility water temperature: 90F (32C), w Circulating fluid: Tap water, e Circulating fluid temperature