Table of Contents

1 1 C G LJ1 10 S W X10 Guide type Slider guide S X10 Non-standard motor Series Series 10 Series 20 Series 30 Limit switch 10 20 30 Nil W None B contact specification 2 pcs.

Proposals for Energy Saving

After Improvement Nozzles are attached S1 S2 Nozzle 1.5 Effective area ratio Pressure loss: Small 3.5 : 1 1.5 P Work piece P Upstream side S: 22.6 Nozzle side S: 6.4 S: S = 3.5 : 1 1.5 4 0.25MPa 0.225MPa 0.002MPa Effective area (mm) P Effective area ratio Nozzle size (mm) Number of nozzles Regulator pressure (P) Outlet pressure (P) Collision pressure (P) S S The pressure that the work

Electric Actuator with Integrated Guide

SETUP I PORTOPORTLOOP SEC mm2/s LABEL PRO Main modes ALM mm/s L C Directs a program operation. RUN Operation mode ACTUATOR & CONSTRUCTION SYSTEM CONTROLLER POWER ALARM STOP Executes a JOG operation. JOG JOG operation mode HOLD /BS UP L R Monitors operating condition. MON Monitor mode DOWN MODE ENT /ESC Directs alarm code display and clear.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

The smoothness of the surface and closeness of the oxidize layer can effect (increase/decrease) this. 7 Ultimate pressure Ultimate pressure is P=Q/S, where the sum of mass flow rates for outgassing (Qg) and leakage (Ql) is Q(Pam3/s), and the exhaust speed is S(m3/s). The ultimate pressure is measured with Qg, QlS shown as above, and the ultimate pressure of the pump itself.

XM, XY

The number of adjustment nut (its pitch is 1 mm) rotations and initial exhaust conductance should be confirmed referring to the figure on the right. x Opening of the initial exhaust valve (valve S) When the pilot pressure is applied to the pilot port S, the valve S is removed from the valve S seal assembly, and the valve opens the adjusted amount. c Opening of the main exhaust valve (valve

ITV

P4 is selected by the ON/OFF combination of S1 and S2.

AC Servo Motor Driver (MECHATROLINK-III type)

The station address is set using the rotary switches S1 and S2. (1) Settings of the Rotary Switches S1 and S2 Set the station address using the rotary switches S1 and S2.

Dedicated Controller

SETUP I PORTOPORTLOOP SEC mm2/s LABEL PRO Main modes ALM mm/s L C Directs a program operation. RUN Operation mode ACTUATOR & CONSTRUCTION SYSTEM CONTROLLER POWER ALARM STOP Executes a JOG operation.

CEx-OMQ0013

P16 s1 s1 s1 s1 s2 s2 s2 s2 ... ... ... ... s32 s32 s32 s32 0.5mm) 1 2 , 2. 30mm 30mm 3.

CATALOG

I f a p re s s u re g re a t e r t h a n t h e s e t p re s s u re i s re a c h e d , t h e u n i t w i l l o p e n , c l o s i n g w h e n p re s s u re i s l e s s t h a n s e t pressure.

V

P D I M E N S I O N S (N)VM1000 T O G G L E D I M E N S I O N S (N)VM1000 P U S H B U T T O N PT= Pre-travel OT= Over travel TT= Total travel S Y M B O L S (N)VM1000 T O G G L E S Y M B O L S (N)VM1000 P U S H B U T T O N S Y M B O L S (N)VM1000 O N E W AY Courtesy of Steven Engineering, Inc. !

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

mm/s or less !

15

[mm/s] (Operating condition) a1: Acceleration [mm/s2] T1 = V/a1 [s] T3 = V/a2 [s] = = 0.57 [s] T2: Constant speed time can be found from the following equation.

Table of Contents

Fixed 4% F .S.

Title not found

Vcior on up to 4 S des Ava able (lvlagnet Type) s NCQT very Cornpact sides and do Black Line s NCOB Outer Rcd C rcll] is B;mba Flat lrt Fla'.1r, s re!'

Title not found

mbe' ol scteno ds ror m red s ni e a rd d.lLhlevrrn! The naxrmln nJmbe I or sr.t o.s s delermried by lr toLa i!nbe,ot so enords n :he case.t n red s I 19. use Lhe o.ror s,,m.o -K i \ : o$ Soleh hi' Lateral Plug in Style Manifold Series SVI 000/2000/3000/40W F r !

Slider Type Ball Screw Drive/11-LEFS Series

LECSB2-S 200 to 230 V V V C1 LECSC1-S 100 to 120 V V C2 LECSC2-S 200 to 230 V V V S1 LECSS1-S 100 to 120 V V S2 LECSS2-S 200 to 230 V V V Note 1) The motor and encoder cables are included.

LEC-OM07605CN

PA23] STO IEC/EN 61800-5-2STO ON/OFF (MR Configurator2) SSCNET/H (MR Configurator2) (MR Configurator2) 1 8 1. 1.6 (1) LECS S 2 T5 S SSCNET/H ACT5, T6 T5 50W,100W ACT7 200W T7 ACT8 400W T8 (2) a) ACT9 T9* 750W * AC200VAC240V 50/60Hz 2 5 A S LE C S M A AC S B M B E 2m 2 5m 5 10m A S R 1 9 1. bSSCNET (LECSS-S/LECSS2-T) LE-CSS-MR-J3BUSM cI/O (LECSS-S/LECSS2-T) 1 LE C S

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

0 Driver type*6 Nil Without option B With lock Nil Without cable S Standard cable R Robotic cable (Flexible cable) Compatible driver Power supply voltage [V] Nil Without driver A1 LECSA1-S 100 to 120 A2 LECSA2-S 200 to 230 B1 LECSB1-S 100 to 120 B2 LECSB2-S 200 to 230 C1 LECSC1-S 100 to 120 C2 LECSC2-S 200 to 230 S1 LECSS1-S 100 to 120 S2 LECSS2-S 200 to 230 11LEJS 11LEJS 25Au Vacuum port

: S (with Soft Start Function)