EXxx-OMU0020CN

US1 LED . 6-6 US1 LED US1 OFF US1 OFF , (17 V ) US1 (17 V 20.4 V) ON US1 ON 21.6 V 6.4.6. US2 LED . 6-7 US2 LED US2 OFF US2 OFF , (17 V ) US2 (17 V 21.6 V) ON US2 ON 22.8 V 49 No.EX-OMU0020CN 6.5.

CG5-S

(mm) Applicable fitting size 4 6 8 10 12 Applicable tubing O.D. (mm) Connection threads Model Model 4 6 8 10 12 KGL04-99 KGE04-01 R 1/8 4 KGL06-99 -02 R 1/4 KGL08-99 KGE06-01 R 1/8 KGL10-99 6 -02 R 1/4 KGL12-99 -03 R 3/8 KGE08-01 R 1/8 Plug-in Reducer KGR -02 8 R 1/4 -03 R 3/8 Applicable tubing O.D.

Valve Single Unit

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

SMC Electronic Switch Series Variations

9.5 6 ZSE2 ISE2 21 21 ZSP 27 27 Mounting thread M2.5 X 24 Mounting thread M2.5 X 24 ISl Grommet style SE1-14, -15, -18, -19 Connector style SE1-14C, -15C, -18C, -19C ZSM I Z 01 T1 01 T1 I Z PFl Pressure setting trimmer Pressure setting trimmer Pressure setting trimmer Pressure setting trimmer IFl HYS HYS SET SET 15 15 Indicator light Indicator light 23 23 I Z I Z SE1-01 -16, -17 SE1-01 -16C

5 Port Solenoid Valve

Perform an inspection to check that it is working properly because it can cause possible injuries. +24 V +24 V Power supply for output Power supply for output 0 V 0 V Power supply for input and for the control unit of the Gateway Power supply for input and for the control unit of the Gateway 24 V 24 V 97 Series S0700 Specific Product Precautions 7 Be sure to read before handling.

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

Table of Contents

T0425 (0.5 m) H04-01 (1 pc.) DL04-01 (1 pc.)

Modular/F.R.L. Units Series AC

No.6.

Metal Seal/Rubber Seal Series VQ Body Ported

port size OUT side port size Rc 1/8 Rc 1/4 One-touch fitting for 6 One-touch fitting for 6 Rc 1/8 Rc 1/4 01 02 C6 C8 One-touch fitting for 6 One-touch fitting for 6 01 02 C6 C8 Name plate N Note) When two or more symbols are specified, indicate them alphabetically.

Basic type / Direct mount type Series CY3B/CY3R

A80C 200 V 100 V 100 V or less 12 V Relay, PLC 2-wire IC circuit 5 V, 12 V 12 V 24 V Connector 5 V, 12 V IC circuit Solid state auto switches marked with are produced upon receipt of order.

ZP

01 01 01 01 01 01 01 01 01 01 01 01 01 01 153.5 156.5 189.5 192.5 118.5 123.5 01 153.5 158.5 01 01 01 189.5 194.5 01 55 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPT HB -A18 01 ZPT HB -A18 63 80 01 ZPT HB -A22 100 125 1/8 (Rc, NPT, NPTF) Width across flat 17 (Hexagon) M22 x 1.5 50 24 1/8 (Rc, NPT, NPTF) Width across flat 14 (Hexagon) 1/8 (Rc, NPT, NPTF) Width across flat

Vacuum Pad

01 01 01 01 01 01 01 01 01 01 01 01 01 01 153.5 156.5 189.5 192.5 118.5 123.5 01 153.5 158.5 01 01 01 189.5 194.5 01 55 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPT HB -A18 01 ZPT HB -A18 63 80 01 ZPT HB -A22 100 125 1/8 (Rc, NPT, NPTF) Width across flat 17 (Hexagon) M22 x 1.5 50 24 1/8 (Rc, NPT, NPTF) Width across flat 14 (Hexagon) 1/8 (Rc, NPT, NPTF) Width across flat

Vacuum Pad

01 01 01 01 01 01 01 01 01 01 01 01 01 01 153.5 156.5 189.5 192.5 118.5 123.5 01 153.5 158.5 01 01 01 189.5 194.5 01 55 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPT HB -A18 01 ZPT HB -A18 63 80 01 ZPT HB -A22 100 125 1/8 (Rc, NPT, NPTF) Width across flat 17 (Hexagon) M22 x 1.5 50 24 1/8 (Rc, NPT, NPTF) Width across flat 14 (Hexagon) 1/8 (Rc, NPT, NPTF) Width across flat

Vacuum Pad

01 01 01 01 01 01 01 01 01 01 01 01 01 01 153.5 156.5 189.5 192.5 118.5 123.5 01 153.5 158.5 01 01 01 189.5 194.5 01 55 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPT HB -A18 01 ZPT HB -A18 63 80 01 ZPT HB -A22 100 125 1/8 (Rc, NPT, NPTF) Width across flat 17 (Hexagon) M22 x 1.5 50 24 1/8 (Rc, NPT, NPTF) Width across flat 14 (Hexagon) 1/8 (Rc, NPT, NPTF) Width across flat

Vacuum Pad

01 01 01 01 01 01 01 01 01 01 01 01 01 01 153.5 156.5 189.5 192.5 118.5 123.5 01 153.5 158.5 01 01 01 189.5 194.5 01 55 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPT HB -A18 01 ZPT HB -A18 63 80 01 ZPT HB -A22 100 125 1/8 (Rc, NPT, NPTF) Width across flat 17 (Hexagon) M22 x 1.5 50 24 1/8 (Rc, NPT, NPTF) Width across flat 14 (Hexagon) 1/8 (Rc, NPT, NPTF) Width across flat

Base Mounted Metal Seal/Rubber Seal Series VQ

1 M5V Power source connector Input connector 12 9 1 Signal-N 2 A Signal-P 4 B 2 VQC Terminal +5 V 6 +5V 6 4 Shield ground 9 SIELD SQ Optical fiber (Reserve) 12 RTS Pin no. 3, 5, 7, 8, 10 and 11 marked with are open.

•

he Weat 01 s prvduCI duB lO !he use 01 !

LEC-OM02704CN

AC200230V AC100120V 40 AC100120V 6 AC200230V L 1 L 1 PE L 2 2-M5 2-M5 L 2 L 3 CNP1 CNP1 N N P 1 P 1 P 2 P 2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L 11 L 11 L 21 L 21 U U CNP3 V CNP3 V M5 3.24[Nm] W W 11 2 11 (2) LECSC-S8 [mm] 40 6 5 6 6 (80) 170 CNP1 () CN1 CNP2 CNP3 6 (68) (25.5) MR-J3BA MR-J3BAT 1.0[kg] .

Magnetically Coupled Rodless Cylinder

Auto Switch Proper Mounting Position (mm) A B C D Auto switch model D-M9; D-M9;V D-M9;W D-M9;WV D-M9;A D-M9;AV D-A9; D-A9;V D-M9; D-M9;V D-M9;W D-M9;WV D-M9;A D-M9;AV D-A9; D-A9;V D-M9; D-M9;V D-M9;W D-M9;WV D-M9;A D-M9;AV D-A9; D-A9;V D-M9; D-M9;V D-M9;W D-M9;WV D-M9;A D-M9;AV D-A9; D-A9;V K dimension (Switch rail height) Bore size 6 3 6 11 16 20 26 28 5.5 5.5 5.5 6 6 7.5 6.5 1.5 1.5 1.5

AC Servo Motor Driver (Pulse input type/Positioning type ）

U V W Approx. 6 PE Screw size: M4 Tightening torque: 1.2 [N m] Mounting hole process drawing 9 2 9.