LEC-OM02704CN

AC200230V AC100120V 40 AC100120V 6 AC200230V L 1 L 1 PE L 2 2-M5 2-M5 L 2 L 3 CNP1 CNP1 N N P 1 P 1 P 2 P 2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L 11 L 11 L 21 L 21 U U CNP3 V CNP3 V M5 3.24[Nm] W W 11 2 11 (2) LECSC-S8 [mm] 40 6 5 6 6 (80) 170 CNP1 () CN1 CNP2 CNP3 6 (68) (25.5) MR-J3BA MR-J3BAT 1.0[kg] .

Table of Contents

(Because barrel nipples are used for equipment connections.) 100 Standard dew point temperature and air flow rate Outlet air flow rate Purge air flow rate (l/min(ANR)) Flow rate by size Symbol Standard dew point (C) 5 50/12 50/6 3 25/6 25/3 10 100/2 20 200/5 30 300/7 50 60 75 100 Nil H 20 15 500/12 600/12 750/15 1000/19 Drain discharge method 500/6 600/6 750/8 100/1 200/2 300/3 1000/11

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

range 1 2 5 10 25 50 100 200 01 Rc1/8 V V V V V V N1 NPT1/8 V V V V V V F1 G1/8 V V V V V V 02 Rc1/4 V V N2 NPT1/4 V V F2 G1/4 V V C4*1 4 V V V V C6 6 V V V V V V C8 8 V V N7 1/4" V V V V Straight valve Piping entry direction Rated flow range 1 2 5 10 25 50 100 200 Nil None Straight V V V V V V V V S Yes Straight V V V V V V L None Rear ported V V V V V V V V W Yes Rear ported

LEC-OM07605CN

4B SDI2BTOFB1 6 2A SRESB+ FG 2B SRESBTOFB2 7 5A SDO2B+ TOFCOM 8 5B SDO2B8B TOFB CN3 EM2 (B ) +24 V 7A M 0 V 7B 0 V .

A

K E O F F TA K EO F F T Y P E 1 "T" Type 4 "X" Type T H R E A D T Y P E Nil Rc(PT) N NPT P O R T S I Z E M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 mm mm Model Port Size A B C Model Port Size A B C D Y11-M5 M5X0.8 8 12 8 Y14-M5 M5 23 16 14 25 Y21-01 1/8 10 29 19 Y24-01 1/8 40 40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44

E-P HYREG

10 k 67 k 1 0 to 10V Note 2) Not conforming to ISO1179-1. 24 V 2 4 to 20 mA 120 3 0 to 20 mA 5 1 to 5 V 67 k 10 k 6 0 to 10 V 12 V 7 4 to 20 mA 120 8 0 to 20 mA Symbol Symbol B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) Body size Port size Rc Option Applicable pilot valve (4) Mounting Port 1(P), 2(A) Port 3(R) 00 M5 00 M5 01 00 01 02 00 02 03 04 M5 01 02 02 03 04 04 06 10 10 12

Ionizer Nozzle type IZN10 Series IZS

Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006

Smooth Cylinder/Low Speed Cylinder

Operating Range (mm) Auto switch model Bore size 9.5 9.5 11.5 9 11.5 32 40 50 63 80 100 D-A9(V) D-M9(V) D-M9W(V) D-M9A(V) 9.5 6 5.5 6.5 7.5 7.5 8.5 D-A7(H)(C) D-A80(H)(C) 12 11 10 12 12 13 D-A79W 13 14 14 16 15 17 D-F7(V) D-J79(C) D-F7W(V) D-F7NT D-F79F 6 6 6 6.5 6.5 7 D-P3DW 6.5 6.5 5.5 7.5 7 8.5 D-P4DW 5 5 5 5 5.5 Since this is a guideline including hysteresis, not meant to be guaranteed

125

Pilot Solenoid Valve Specifications Internal pilot solenoid / External pilot solenoid Model VEX3121, VEX3221, VEX3321, VEX3421 VEX3122, VEX3222, VEX3322, VEX3422 Pilot valve V114, V115 Symbol Electrical entry Grommet (G), L plug connector (L), M plug connector (M), DIN terminal (D) Rated coil voltage [V] AC (50/60 Hz) 100 V, 110 V, 200 V, 220 V DC 3 V, 5 V, 6 V, 12 V, 24 V Allowable voltage

VQ4000

sensor ground For input block 0 V, For input unit and SI unit 0 V No. 2 pin of the input no. 0, 2, 4, 6 connector (connectors aligned in the right side on the input block) is connected internally with no. 4 pin (sensor input no.) of the input no. 1, 3, 5, 7 respectively.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

6 !7 !

E-P HYREG ® Series VY1 1

Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VY1D00-5 VY1B0-5 VY120-5 1 V V V 0 1 2 3 4 5 0 1 2 3 4 5 0 1 2 3 4 5 A VY1D00-6 VY1B0-6 VY120-6 A 1 1 1 1 V V V 0 2.5 5 7.5 10 0 2.5 5 7.5 10 0 2.5 5 7.5 10 VY1D00-7 VY1B0-7 VY120-7 1 A 2 2 2 mA mA mA 4 0 8 12 16 20 4 0 8 12 16 20 4 0 8 12 16 20 VY1D00-8 0 5 10 15 20 VY1B0-8 0 5 10 15 20 VY120-8 0 5 10 15

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

X Port size) Speed controller System figure System Solenoid valve SYJ7l40-01 Rc(PT)1/8 (S = 12.6mm2) AN110-01 (S = 35mm2) 4 X 1/8 AS2301F-01-04 A 02 03 AS3301F-06 6 X 1/4 B q 02 03 AS3301F-08 SYJ7l40-02 Rc(PT)1/4 (S = 12.6mm2) 8 X 1/4 C AN200-02 (S = 35mm2) 02 03 AS3301F-10 10 X 1/4 D 12 X 1/4 12 X 1/2 AS4001F-12 w E 1.2-53 Series SYJ7000 How to Order Light and surge voltage suppressor

I

M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

Series AK1000

Code psig/bar unit MPa unit No code 0 V3 1 2 10 40 No gauge port e e 4PL 5PC No pressure gauge (Connections: 1/4 inch NPT) Sample Order Number Port -30 in.Hg to 30 psig -30 in.Hg to 100 psig 0 to 200 psig 0 to 1000 psig 0 to 4000 psig -0.1 to 0.2 MPa -0.1 to 0.7 MPa 0 to 1.5 MPa 0 to 7 MPa 0 to 28 MPa AK1410TS e q 6 6 6 6 w 6 6 6 6 r t qIN wOUT eExtra bottom port (Outlet) rGauge port (Inlet

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet 8 N S U F GN GS HS 04 06 08 UM 02 10.8 7 2 1.4 KQ2H02-M5N 3 6 10 15 20 J JB K 04 14.7 8 4 2.5 KQ2H04-M5N ZP3 Y 8 02 10.8 7 2 1.4 KQ2H02-M5N 04 14.7 8 4 2.5 KQ2H04-M5N 06 10 6 KQ2H06-M5N 10 13 16 Vacuum inlet: One-touch fitting Applicable tubing O.D.

Nozzle Type Ionizer

Make sure to ground. +24 V +24 V Brown + 24 VDC Brown + 24 VDC +24 V Power supply 24 VDC +24 V Power supply 24 VDC Blue 0 V Blue 0 V 0 V 0 V F.G. F.G. Make sure to ground. Make sure to ground.

F

KM12-06-02-6 6 99 47 84 6 14 17 10 19.5 31.5 21.5 31 13 13.5 17 7.5 KM12-06-02-10 10 125 73 96 KM12-08-03-6 6 108 55 100 8 38 19 11.5 22.5 35.5 24 34.5 15.5 14.7 18.5 9 KM12-08-03-10 10 139 86 117 L5 T N H L3 L4 L6 P Q1 Q2 M L1 F L2 B Port Min Weight Model NPT Hex Inside Dia (g) (Inch Size) 19.5 6 16 16 18 29.5 29 40 12 1/4 87 5/32 10 6 67 KM12-03-35-6 19.5 10 16 16 18 29.5 29 61.5 12 1/

5 Port Solenoid Valve SY Series

1) Electrical entry Actuation Voltage Light/surge voltage suppressor 2 position 3 position DC AC 100 V 50/60 Hz 110 V 50/60 Hz 200 V 50/60 Hz 220 V 50/60 Hz M plug connector Sonic conductance C [dm3/(sbar)] L plug connector 24 V Series M8 Connector Pressure center 12 V DIN terminal Closed center Exhaust center 6 V Grommet { } 4/25/3 (A/BEA/EB) Double 5 V Single 3 V P.1 SY3 20 0.65 Body ported

Direct Solenoid

NPTF Side 2 1 2 MBA40r r -02 %" NPTF Sid; 7." Bottom 1 4 MBA4210-02 %" NPTF Side (2); 7." Bottom(s] 7 1 6 DIRECTIONAL AIR VALVE DIMENSIONS/PARTS LIST SERIES NVS 4$14 NVS 4l14.{!0 "XX" D Erd phrs sl lincrd dot 5 & (2)del6) ECO101 xTo11.t5 3 sl46asst ddste olsp@l a de@ (rEi.+Ed seQ 5 1 0 solonokl *!. -e.ca!6uretd-a.c. 11t120 v.60 Hr 2301210V.@H.