KA

(mm) Polyurethane Soft nylon D L M Part No. 4 3.2 KAH23-00 31.5 32.5 34.5 18.5 21 22 15.5 16 17 15.2 18.5 20.9 9.6 10.4 12.8 46.1 46.1 29.5 29.5 18.0 18.0 4 3 3 KAH04-00 KAH06-00 13.1 13.1 5.6 5.6 3.4 2.9 8 6 38.5 42.5 44.5 KAH08-00 6 11 12 10 KAH10-00 KAH12-00 14 Different diameter straight: KAH Tube O.D.

VVXA21/22

5"5 VVXA211-stations VVXA212-stations VVXA221-stations VVXA222-stations 7 %1 % = > = > 3 1 VXA21 -00 . ; < Construction/ Principal Parts Material 3 1 VXA22 -00 ; Common SUP type Solenoid Valve for Manifold " 5 '* #5 5 # I ,+!J ! #5 " 0"8 1 E F 4 " 4 % " 4 4 4 4 7 %1 % 3 VXA212-00 VXA213-00 VXA223-00 VXA224-00 = < .G < < * 4.5 . >< * < * 6 < * $ /H"3 % .

LEC-OM02704CN

(RX(n+2)2~RX(n+2)9) 1 5 23 5 (1) DWELL [10STMm] [ms] [ms] [r/min] [ms] 1 5.00 3000 100 150 0 1 2 6.00 2000 0 1 3 3.00 1000 0 0(2) 1. 0 2. ,0 No.1 (100) No.1 (150) ( 3000 ) ( 2 000 ) ( 1 000 ) 0r/min 5.00 6 .00 3 .00 0 5.00 1 1 .00 1 4 .00 1 ON (RYn1) OFF 1 No. (RX(n+2)2~RX(n+2)9) .

Table of Contents

M M AKH03-00 AKH07-00 AKH09-00 AKH11-00 AKH13-00 5/32 1/4 5/16 3/8 1/2 3 6 10 17 24 2.8 6.5 14 24 34 9.3 12 15.2 18.5 21.7 33.5 39 53.3 63.6 70.2 12.7 13.6 18.5 21 22 L Metric Size Male connector type: AKH H (Hexagon width across flats) Connection thread R Applicable tubing O.D.

Proposals for Energy Saving

2 1 2 1 Note) Flow conditions IN/OUT: 1.0MPa for VBA1110, IN/OUT: 0.5MPa for VBA1, VBA2 00, 4 00 Refer to flow characteristics graphs on page 1.13-2 of "Best Pneumatics No. 4" when selecting a model.

VVX31/32/33

VX3235-00 VX3335-00 3 1.1 0.25 0.27 AC DC 60 40 1 99 60 120 183 Maximun VX3245-00 40 1.6 0.20 0.38 4 20 VX3345-00 Minimum AC, DC Ambient temperature (C ) 40 10 Operating fluid temp.

CV/MVGQ

For single solenoid valve 1-1. Pilot valve only VO302A-00 1 pc. 1-2. With gasket VO302S-00 1 pc. 2. For double solenoid valve 2-1. Pilot valve only VO302A-00 2 pcs. 2-2. With gasket VO302D-00 2 pcs.

CV/MVGQ

For single solenoid valve 1-1. Pilot valve only VO302A-00 1 pc. 1-2. With gasket VO302S-00 1 pc. 2. For double solenoid valve 2-1. Pilot valve only VO302A-00 2 pcs. 2-2. With gasket VO302D-00 2 pcs.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

EX) Base: 6 stations, common EXH, A & B port Rc 1/2 VVPA450-061-04 1 pc. VPA4154-00 3 pcs. VPA4254-00 2 pcs. XT038N-4A 1 pc.

Modular Type Regulator Series AR

MPa 0.2 0.2 0.15 0.15 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure MPa Inlet pressure MPa AR30 AR60 0.25 0.25 Outlet pressure MPa Outlet pressure MPa Set point Set point 0.2 0.2 0.15 0.15 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure MPa Inlet pressure MPa 38 AR10 to 60 Construction AR10 AR20, 25 t t

VXA21/22

8 1/4 1/8 1/4 VXA31m5-00 n X 100+50 VXA32m5-00 n X 160+70 Model/Valve Specifications Flow rate Orifice size (mm) Max. operating pressure differential (MPa) (1) Proof pressure (MPa) Weight (g) Max. system pressure (MPa) Cv Effective area (mm2) Model VXA3115-00 VXA3125-00 VXA3225-00 VXA3135-00 1.0 1.5 1.5 0.08 1.4 1.0 0.5 1.0 0.3 150 0.16 2.8 0.19 3.4 2.2 230 0.24 0.6 0.33 6 VXA3235-00 150

Self-seal Fittings Series KC

Nylon Urethane Effective orifice(mm 2) Weight (g) T (M) L Mounting hole M1 M2 KCE04-00 KCE06-00 KCE08-00 KCE10-00 KCE12-00 4 6 8 10 12 M12 1 M14 1 M16 1 M20 1 M22 1 14 42 13 15 17 21 23 18 19 21.5 24 25.5 16 17 18.5 21 22 21 30 39 84 115 2.6 6.8 13.1 20.4 30.4 2.6 6.8 16.2 25.6 35.4 17 19 24 27 45.5 52.5 59.5 63.2 Bulkhead female union: KCE Thread Rc (PT) 4 6 8 10 12 Effective orifice(mm

SY

SS5Y34, #1 (#1 + #5 + #6 + #7 + #17) SS5Y3-45FU-B .

E-P HYREG

/Component Parts/Working Principle VY1100 1, VY1200 1, VY1300 1, VY1400 1 (Pilot valve: VY1D00-00) VY1500 1, VY1700 1, VY1900 1 (Pilot valve: VY1B00-00) Working principle The pair of poppet valves u close due to the balance between actuating forces F1 and F2.

Process Pump <Fluororesin Type> Series PA3000

1/4 thread G 1/4 thread NPT 1/4 thread NPTF 1/4 thread Rc 1/4 thread G 1/4 thread NPT 1/4 thread NPTF 1/4 thread 0 3 PA331n (Standard assembly) PAP331n (Clean-room assembly) Automatically operated type Air pilot actuation type P11N* P11T* PAP331n (Clean-room assembly) P13 P13F* P13N* P13T* Port sizes marked "*" are optional.

V100

Sub-plate gasket VP300-2-1P (Rc 1/8) VP300-2-2P (Rc 1/4) VP500-2-1P (Rc 1/4) VP500-2-2P (Rc 3/8) VP700-2-1P (Rc 3/8) VP700-2-2P (Rc 1/2) Mounting Screw Tightening Torques M3: 0.6 Nm M4: 1.4 Nm M5: 2.9 Nm VP300-17-1 VP344 SF4--50 VP500-17-1 VP544 VP700-17-1 VP744 How to Order Sub-plate VP 00 2 1 Series Port size Thread type VP744 3/8 1/2 VP544 1/4 3/8 VP344 1/8 1/4 3 5 7 P F N T VP344 VP544

Modular F.R.L. Units

[MPa] 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure [MPa] 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure [MPa] AR50(K)-B AR60(K)-B 0.25 0.25 Outlet pressure [MPa] Outlet pressure [MPa] Set point Set point 0.2 0.2 0.15 0.15 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure [MPa] 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure [MPa] 71 Regulator AR10-A Series Regulator AR20

VQ4000

Note 5) Dust tight/Low jetproof enclosure (IP65) is not available with interface regulator. 0.4 0.3 0.2 0.1 0 0 200 400 600 800 1000 1200 1400 1600 Flow rate (l/min(ANR)) ARBQ4000-00-P (P A) How to Order 0.7 Outlet pressure (MPa) 0.6 0.5 Regulating port Solenoid Valve Interface regulator 0.4 A ARBQ4000-00-A-1 0.3 VQ40 (Plug-in type) B ARBQ4000-00-B-1 0.2 P ARBQ4000-00-P-1 0.1 A ARBQ4000-

CLA

~~ , A 00) 0(0) 0 (2.5) 2(6) 4(7. 5) ~ , 40 D-AG 43.5 49 55.5 3 D-AS 1(0 1(0) 5(1.5 I O{S.5) 8(4 3t 35 42 so 57 .5 ~ Ht A 00) 00) 0(2.5 26 417 .5) D-A3 B !

Series SV

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.