A_HEC-OM-K001

/8 3/4x5/8 1/2x3/8 3/4x5/8 Recirculating fluid (Note 6,7,8) Pure water, Hydrofluoric acid, Ammonia hydrogen peroxide solution etc.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Metric size Inch size ASD 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 23 04 06 08 10 12 3.2 4 6 8 10 12 With One-touch fittings AS Stainless steel specifications (Stainless steel 303) AS-FE KE AS-FG AS-FG Use 1/8" tube. Made to Order AS-FP AS-FM Grease-free (Seal: Fluorine Coated) + Throttle Valve (Without Check Valve) X21 Lubricant: Vaseline X12 AS-D AS-T Ex.)

Table of Contents

/Z80 D-C73C/C80C RS H A 8 10 9 10 10 11 D-C7 D-C80 10 15 50 50 + 45 (n2) D-B5/B64 8 10 13 4 8.5 9 14 4.5 9 10 14 5 10 10 14 6 9.5 11 17 6.5 10.5 11 16 6.5 10.5 11 18 7 11 9 10 9 10 10 11 11 11 9 10 10 11 RZQ 15 + 45 ( ) n2 2 D-H7 D-H7W D-H7BAL D-H7NF D-B59W 13 (n = 2, 4, 6, ) D-H7/H7NF/H7W/H7BAL 4 10 15 60 60 + 45 (n2) MI W S D-H7C 7 D-A3/A44 D-G39/K39 8 CEP1 D-C73C D-C80C D-H7C 10 15 65

SY

D side D B M C8 8 One-touch fitting 2 to 16 stations FU1 Fuji Electric Co., Ltd.

Metal Seal/Rubber Seal Series VQ Body Ported

1 2 3 Stations D side U side Blocking indication label 3 m D side U side D-sub connector cable AXT100 DS25030 C8: One-touch fitting for 8 VVQ2000-R-4-C8 Built-in silencer, direct exhaust [-S] Port plug VVQ1000-58A Individual EXH spacer Individual EXH spacer port size CB (SUP) port One-touch fitting for 8 F kit (D-sub connector) Manifold base (8 stations) VV5Q2408FU2D D side U side EXH outlet

SX

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

Valve Single Unit

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

Valve Single Unit

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

Speed Controller with One-touch Fitting

TMH Electroless nickel plated ASD Easy to use AS Larger knob Push-lock type AS-FE Easy to lock KE Body size D [mm] 1 9.4 Unlock Lock AS-FG D 2 12 (Port size 1/8) AS-FP 13 (Port size 1/4) 3 16.6 AS-FM 4 18.8 AS-D AS-T ASP ASN AQ ASV Improved tube insertion/removal AK Max.

45

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

45

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Metric size Inch size ASD 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 23 04 06 08 10 12 3.2 4 6 8 10 12 With One-touch fittings AS Stainless steel specifications (Stainless steel 303) AS-FE KE AS-FG AS-FG Use 1/8" tube. Made to Order AS-FP AS-FM Grease-free (Seal: Fluorine Coated) + Throttle Valve (Without Check Valve) X21 Lubricant: Vaseline X12 AS-D AS-T Ex.)

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

8 !4 !6 !7 !5 r !8 !4 !6 !7 !5 !1 AS-F !1 !2 TMH !2 !3 w ASD t y q i o e u t y q i o e u AS w AS-FE !0 KE !0 AS-FG AS-FG !9 AS-FP Meter-out type Meter-out type Meter-in type Meter-in type AS-FM Seal method: Face seal For G thread AS-D AS-T r !8 !4 !6 !7 !5 !1 ASP ASN !2 AQ w t y q i o e ASV AK !0 VCHC ASR ASQ u @0 Meter-out type Meter-in type Component Parts No.

EX510

8 !

JXCx-OMT0005CN

5 2bit 6-7 2byte 8-11 4byte 0 IN5 IN4 IN3 IN2 IN1 IN0 1 FLGTH JOG(+) JOG(-) SETUP RESET DRIVE SVON HOLD 2 3 2 1 4 FG 5 2bit 20byte 6-7 2byte 8-11 4byte 12-13 2byte 14-17 4byte 18-19 2byte 0 IN5 IN4 IN3 IN2 IN1 IN0 1 FLGTH JOG(+) JOG(-) SETUP RESET DRIVE SVON HOLD 2 3 2 1 4 FG 5 2bit 6-7 2byte 8-11 4byte 36byte 12-13 2byte 14-15 2byte 16-17 2byte 18-19 2byte 20-21 (2byte) 22-23 2byte

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

AS131FG(3.2, 4, 6, 1/8", 5/32", 1/4"), AS231FG-01(3.2, 4, 6, 1/8", 5/32") are made of POM. 15-9-46 5 Speed Controller with One-touch Fitting Stainless Series, Elbow Type/Universal Type Series AS-FG Dimensions: Elbow Type Applicable tubing O.D. d (Hexagon width across flats) M5 type U10/32 type Applicable tubing O.D. d AS (Hexagon width across flats) ASP ASN AQ ASV AK ASS ASR Metric Size Inch

Symbol: FG (2-Position), Solenoid: S (Single), Voltage: 3 (24V DC), Option: Z (Indicator Light w/Surge Voltage Suppressor), Seal: Metal Seal, Subplate: A04 (Side Ported 1/2)

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Lubrication Free, Valve Type: 5-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Exhaust, Applicable Cylinder Diameter(Ø): 250 or Less, Pipe Port Type: [Rc (R)] Rc, Port Size: 1/2, Pressure Rating(MPa

AS

Material Note 1 2 3 4 5 6 7 8 9 10 PBT Brass Electroless nickel plated Brass Electroless nickel plated Steel wire HNBR NBR NBR Tool steel 519 Series AS1F-D Dimensions L4 D3 Applicable tubing O.D. d L3 D1 L2 M1 M1 L1 D2 Metric Size Inch Size Mass (g) Mass (g) 8 8.4 D1 38 L1 4.5 L2 26 L3 M1 1/8" d D2 D3 L4 Model d 8.4 D1 D2 D3 4.5 L2 38 L1 26 L3 L4 M1 Model AS3001F-11D AS3001F-09D AS3001F

reduces flow setting time

8 !4 !6 !7 !5 r !8 !4 !6 !7 !5 !1 AS-F AS-F !1 !2 TMH !2 !3 w ASD t y q i o e u t y q i o e u AS w AS-FE !0 KE !0 AS-FG !9 AS-FP Meter-in type Meter-out type Meter-out type Meter-in type AS-FM Seal method: Face seal For G thread AS-D AS-T r !8 !4 !6 !7 !5 !1 ASP ASN !2 AQ w t y q i o e ASV AK !0 VCHC ASR ASQ u @0 Meter-in type Meter-out type Component Parts No.