SQ1000/2000

B 9 18 () 22 10 SOL. A 23 6 () 11 Station 8 SOL.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

4 (R1, R2 port) 31.5 63 M plug connector (M): 10-SYJ7143-M01 02 DIN Terminal (D): 10-SYJ7143-D01 02 M8 connector (WO): 10-SYJ7143-WO01 02 L plug connector (L): 10-SYJ7143-L01 02 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 91 104.2 MAX.10 57.5[64.5] 83.5 72.2 42.1 62 M8 x 1 57.1 44.5 (Lead wire length) 68.6[75.6] Approx. 300 20 20 20 20 Pg7 95.1[97.3] 85.3[87.5] 94.2 86.8

Plug-in Unit

One-touch fitting C12 : 12 One-touch fitting L2 (1 input block: 8 inputs) (14.5) 128.5 L1 (8) 6.5 Indicator light 54 P = 25 65.5 Manual override Min.0 to Max. 4 unit (0 to 216mm) A B A B A B A B A A A B 143 9 9 10 143 (32) (98.8) 10 163 101 Mounting hole for 2-M5, with input block only Input block SI unit n 1 2 3 4 5 6 7 Stations D-side 8 U-side Formulas: L1 = 25n + 106, L2 = 25n + 241 (

5 Port Solenoid Valve Series SV

30% 50% 600 Stroke mm 70% 30% AS3201F -02-12 400 200 70% 50% 10% 0 800 MB 80 600 Stroke mm AS5000-02 AS420-02 400 200 0 AN300 -KM12 T1209 800 MB 100 600 Stroke mm AS5000-02 AS420-02 400 200 0 800 CS1 125 600 Stroke mm AS5000-02 AS420-02 400 200 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components

Electric Actuators

8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting

PSE540/560

ZSE ISE PSE Z I SE3 Sensor 100 kPa 0 100 kPa 500 kPa 1 MPa Pressure range PS 101 kPa 0 kPa PSE541 PSE561 Z I SE1 2 For vacuum Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 101 kPa 10 kPa ZSP 100 kPa 100 kPa For compound pressure PSE543 PSE563 ISA2 101 kPa 101 kPa

SYJ300/500/700

Nil Applicable blanking plate assembly SYJ300-10-2A 02 2 stations Pilot valve is on the A port side.

I

from the VY Valve. 02 14 2.0 3 03 38 3.3 body Ported Type 04 12 3.9 Terminal Designations are as follows: 04 12 7.2 5 06 34 8.9 1 = 24v Power Supply 2 = Control Signal 3 = Common Negative for both power and signal. 10 1 10 5% 2% + -2% 7 10 1 114 17 12 114 18 9 14 112 2 33 20 2 37 Courtesy of Steven Engineering, Inc. !

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

VK Valve mounting direction Stations 2 stations 02 Coil is located on the opposite side of the A port. VZ Applicable blank plate ass'y SYJ300-10-2A R port ... ... Coil is located on same side as the A port.

3 Port Air Operated Valve Series SYJA300

Nil Applicable blanking plate assembly SYJ300-10-2A 02 2 stations Pilot valve is on the A port side.

Series VCL

OUT port size Material D side U side 1 2 3 4 5 n Symbol 01 02 Port size 1/8 (6A) 1/4 (8A) Stations Body material C37 Symbol Nil H Seal material FKM FKM 02 : 10 2 stations : 10 stations Stainless steel All IN ports are 3/8. Refer to the "L" dimensions on page 6 regarding the maximum number of stations.

IR1000/2000/3000

Set pressure range (kPa) 101 to 101 AU 0.2 Desolution of set and display (kPa) Pressure gauge 12 to 24 VDC 10%, Ripple (p-p) 10% or less AF Power supply voltage (With reverse connection protection) 45 mA or less (but 70 mA or less at current output) Current consumption AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

OUT port size Material D side U side 1 2 3 4 5 n Symbol 01 02 Port size 1/8 (6A) 1/4 (8A) Stations Body material C37 Symbol Nil H Seal material FKM FKM 02 : 10 2 stations : 10 stations Stainless steel All IN ports are 3/8. Refer to the "L" dimensions on page 6 regarding the maximum number of stations.

ZP

Material ZQ Series ZPY Without buffer ZPY U N 02 N4 A5 ZF ZP Mounting thread (Refer to Table (2) for applications.) Pad diameter (mm) 02 04 2 4 ZCU Vacuum entry port (Refer to Table (2) for applications.) 06 6 AMJ 08 8 10 10 Misc. 13 13 Table (2) Vacuum Entry/Mounting Thread Diameter 16 16 Thread dia.

LEC-OM02704CN

0][2] [0][0] 4 14 12 14 [3][5] 00 16 01 02 03 04 05 06 07 08 09 0A 0B 0C 0D 0E 1 0F ABS 10 11 80 12 81 82 83 84 85 86 87 88 89 8A 8B 8C 8D 8E 1 8F ABS 90 91 14 13 14 (6) ([4][0]) [4][0] [0][1][F][F] (16)10 8 (7) ([5][0]) [5][0] [0][1][F][F] (16)10 8 (8) ([5][4]) [5][4] [0][1][F][F] (16)10 8 (9) ([5][8]) [5][8] [0][1][F][F] (16)10 8 (10)(DWELL)([6][0]) [6][0] [

Vacuum Unit

ZK2 CH A 2 04 L A KQ2P 06 Applicable stations 02 For 2 stations manifold 04 For 4 stations manifold 06 For 6 stations manifold 08 For 8 stations manifold 10 For 10 stations manifold d Models and Dimensions D Symbol Applicable size d A L D Weight [g] Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4" 18 35 8.5 1 Orange 09 5/16" 20.5 39 10 2 Orange Connector type 1 D sub-connector (25

VCW

) 10 is available only for N.C.

Series VCS

OUT port size Material Symbol 01 02 Port size 1/8 (6A) 1/4 (8A) Stations D side U side 1 2 3 4 5 n Body material Brass Symbol D H Seal material FKM FKM 02 : 10 2 stations : 10 stations All IN ports are 3/8. Stainless steel Refer to the L dimensions on page 6 regarding the maximum number of stations.

Series VQ Base Mounted Metal Seal/Rubber Seal

AXT661-14AN-10 3 pcs.

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

OUT port size Material Symbol 01 02 Port size 1/8 (6A) 1/4 (8A) Stations D side U side 1 2 3 4 5 n Body material Brass Symbol D H Seal material FKM FKM 02 : 10 2 stations : 10 stations All IN ports are 3/8. Stainless steel Refer to the L dimensions on page 6 regarding the maximum number of stations.