. · Manifold types: VV5FR2, VV5FR3, VV5FR4, VV5FR5.

. · Manifold types: VV5FR2, VV5FR3, VV5FR4, VV5FR5.

. · Manifold types: VV5FR2, VV5FR3, VV5FR4, VV5FR5.

Base Mounted Wiring: Plug-in w/Terminal Block, Stations: 5 Stations, Passage: P and EA,EB: Common, Port A,B: Bottom, Port Size: NPTF1/8, Control Unit: -

Base Mounted Wiring: Plug-in w/Terminal Block, Individual Junction Cover, Stations: 5 Stations, Passage: 2 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Bottom], Port Size: 1/8, Thread: NPTF, Control Unit: -, Voltage Air Release Valve: -

Base Mounted Wiring: Plug-in w/Terminal Block, Individual Junction Cover, Stations: 5 Stations, Passage: 2 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Bottom], Port Size: NPT1/8

Base Mounted Wiring: 01T (Plug-in w/Terminal Block, Individual Junction Cover), Stations: 5 Stations, Passage: 2 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Bottom], Port Size: 01 (1/8), Thread: T (NPTF)

EX600-WEN_WSV.eng

SWITZERLAND (41) 052 396 31 31 Dorfstrasse 7, CH-8484, Weisslingen, Switzerland Diagnostic Step 3 Connection to PLC UNITED KINGDOM (44) 0845 121 5122 Note) Refer to the operation manual of the PLC manufacturer for connection to PLC and Configurator.

EXxx-OMV0028.eng

Step 3 Connection to PLC SWITZERLAND (41) 052 396 31 31 Dorfstrasse 7, CH-8484, Weisslingen, Switzerland Note) Refer to the operation manual of the PLC manufacturer for connection to PLC and Configurator. Diagnostic UNITED KINGDOM (44) 0845 121 5122 With the above settings, it is possible to control the upper level controller.

PFxx-OMJ0005CN

PFM725 PFM750 PFM711 N2ArCO2 (JIS B8392-1 1.1.21.6.2ISO8573-1 1.1.21.6.2) N2Ar 0.210 L/min 0.525 L/min 150 L/min 2100 L/min () CO2 0.25 L/min 0.512.5 L/min 125 L/min 250 L/min N2Ar 0.210.5 L/min 1 0.526.3 L/min 152.5 L/min 2105 L/min 2 CO2 0.25.2 L/min 0.513.1 L/min 126.2 L/min 252 L/min N2Ar 010.5 L/min 1 026.3 L/min 052.5 L/min 0105 L/min 2 CO2 05.2 L/min 013.1 L/min 026.2 L/min 052

JXCx-OMT0005CN

B RESET >+JOG (01-052) >+B RESET 65 - 112 12 0 2 3 4 5 6 7 Alarm _Comment _058 (01-058) 3A B RESET No.base PLC <> 1 1ABS 2INC 2PLC 2 14.2[2] (P.54) Alarm _Comment _061 (01-061) 3D B RESET <>+ <>+Alarm _Comment _062 (01-062) 3E B RESET <> (01-096) C RESET <> (01-097) <> C RESET <> <>OFF JOG OFF (01-098) OFF DRV C RESET <>ON SVRE ON DRIVE ON (01-099) <> SET OFF

SFOD-OMT0005CN

B RESET <>(+) (-) (JOG ) <>(+) (-) (01-052) B RESET -63- () 12 (12 0 ) (2) (3) (4) (5) (6) (7) Alarm _Comment _058 (01-058) 3A B RESET <>No.

SFOD-OMT0009CN

(0-149) D RESET SVON <> <> (0-901) E <> (0-902) E <> <> <> (0-910) E <> SDRAM SDRAM (0-911) E <> 87 No.SFOD-OMT0009CN-B code <> FROM FROM (0-912) E <> <> Modbus (CI 1 2 CI 3 4)OFF <> Modbus (0-913) E <> (0-914) E <> 88 No.SFOD-OMT0009CN-B (2) code <> , [] (1) (2) =0 (3) (4) (5) (6) (7) (1-048) B RESET <> <> [] (1) -+ (2) (1-049) B <> RESET <> + JOG <> + (1-052

JXCx-OMT0001CN

code <> FROM FROM Error (0-912) E <> <> Modbus (CI 1 Modbus Error (0-913) E 2 CI 3 4)OFF <> <> Module Error (0-914) E <> -87No.JXC-OMT0001CN-C (2) code <> [] (1) (2) >0 (3) (4) (5) (6) (7) Step data value is wrong (1-048) B RESET ON <> <> [] (1) (-)<(+) (2) < Parameter value is wrong (1-049) B RESET ON <> <> + JOG Set stroke is outside stroke <> + B RESET ON limit. (1-052

LECA6_C

B RESET PLC 15ms30ms 2(P.40) 49 - +JOG 1-052 B RESET +1-096 C RESET (1-097) C RESET OFF JOG OFF 1-098 OFF DRV C RESET ON SVRE ON DRIVE ON 1-099 SETOFF DRV C RESET 12 (1-103) 1 [] A [a ] C RESET 2 [SW] [] A [a ] () (1-106) C RESET SVON 1 1-144 RESETS VON (1) D 50 - ON (M24V) 1-145 RESETS VON (1) D 1-146 RESETS VON (1) D (C24V) RESETS VON (1) 1-147

LECP6_C

B RESET 49 - +JOG +1-052 B RESET 1-096 C RESET (1-097) C RESET OFF JOG OFF 1-098 OFF DRV C RESET ON SVRE ON DRIVE ON 1-099 SETOFF DRV C RESET 12 (1-103) C RESET 1 [] A [a ] 2 [SW] [] A [a ] () (1-106) C RESET SVON 1 1-144 RESET SVON (1) D 50 - ON (M24V) 1-145 RESET SVON (1) D 1-146 RESET SVON (1) D (C24V) RESET SVON (1) 1-147 D (1-148) RESET SVON

JXCx-OMT0028CN

B () PLC 15ms(30ms) 61 - (+) (-) (JOG ) () (1-052) RESET (+) (-) B (1-096) RESET C 0 (1-097) RESET C 2,3: OFF (EMG ) OFF (1-098) RESET JOG ON (SVRE ON) EMG OFF DRV C DC24v DRIVE (1-099) RESET SETOFF DRV C 0: () 1: OFF 0: a 2: OFF B (1-103) 0: C RESET OFF ON 1: a 2,3: 2: OFF ON B 0 "0" 2 3 62 - () (1-106) RESET SVON C 1 (1-144) RESET SVON D ON (M24V

MHL2

16D MHL2-16D1 MHL2-16D2 SMHL, #2 SMHL2A, #3 SMHL2A, #4 (#4+#5) 2.2-8 Series MHL2 Dimensions MHL2-20Dl 10 10 11 2-M6 X 1 Thread depth 7 (Mounting thread) D Closed J A cross view (Fingers closed) C B A 4H9 +0 030 0 Depth 4 2-6.6 (Body mounting hole) 52 6.45 5 5 4-M6 X 1 Thread depth 12 (Mounting thread) 5 4H9 +0 030 0 Depth 4 Dimensions of auto switch mounting groove (Enlarged view) 27H9 +0 052

5 Port Air Operated Valve Series VFA3000 1

VV5FA3-40-052-021 pc. VFA31402 pcs. VFA32402 pcs. DXT031-38-1A1 pcs.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(Example) VV5F3-40-052-021 pc. (Manifold base) VF3140-1G2 pcs. (Valve) VF3240-1G2 pcs. (Valve) DXT031-38-1A1 pc. (Blanking plate assembly) VV5F3-60 The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.