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30 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 20 20 0.2 MPa 0.2 MPa 10 10 0 10 20 30 40 50 0 10 20 30 40 50 60 70 60 70 Gripping point L (mm) Gripping point L (mm) MHR2-30/MDHR2-30 MHR2-30/MDHR2-30 80 80 Pressure 0.6 MPa 0.6 MPa Pressure 70 70 F F 0.5 MPa 0.5 MPa Gripping force (N) Gripping force (N) 60 60 50 50 0.4 MPa 0.4 MPa 40 40 0.3 MPa 0.3 MPa 30 30 0.2 MPa 0.2 MPa 20 20 10 10 0 10 30 50 0 10

High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

Made to Order

MGC series 20 to 50 MGC Series (mm) C port SZ + Stroke B Cushion valve (Width across flats WH) Front mounting flange Bore size (mm) GC GD SA SB W 1 W 2 A, B port A port W 2 W 1 A 20 25 32 40 50 30 30 21 9 50 87 30 30 C port D port 21 9 50 87 B port W 2 W 1 10 A' 25 30 23 9 52 91 20 20 24 8 59 99 Cushion valve (Width across flats WH) D port ZZ + Stroke A + Stroke B SB + Stroke B SA + Stroke

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Max. 80 [mA] Max. 30 [V] Load No current flow. Load is not powered.

ZP

26 25 27 29 30 25 27 30 31 26 10 ZPT 20 25 31 33 29 27 30 32 33 28 31 34 35 30 ZPT 32 40 50 ZPT ZPT 10 33 34 57 129 135 132 138 133 139 30 129 131 134 134 143 129 133 36 38 141 148 39 145 152 34 140 147 153 160 144 151 141 147 Weight by Stroke (g) 15 20 25 30 40 50 Stroke (mm) Model 10 ZPT2004 3507 4010 ZPT02 to 08 thin section series 10 to 16 +6 +7 +8 ZPT10 to 25 ZPT40 to 50 +11 +38 +13

MGG

80 100 63 80 100 300mm or more 350 to 1100 308 107 54 86 108 192 30 72 14 29 Rc 1/4 119 M12 x 1.75 depth 23 16 400mm or more 350 to 1200 355 131 66 104 128 224 35 89 19 40 Rc 3/8 145 M12 x 1.75 depth 28 23 500mm or more 350 to 1300 410 131 66 128 143 262 40 110 19 40 Rc 1/2 145 23 M14 x 2 depth 30 18 Series MGG Dimensions Front mounting flange type/MGGF 20 to 50 M N Bracket (See table below

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

) Bore size (mm) Bracket mounting stroke Z Y X P W V Y U R T S R Q O 300 st or more 63 63 63 350 to 1100 308 107 54 86 Rc 1/4 Rc 3/8 Rc 1/2 108 119 192 16 30 72 M12 x 1.75 depth 23 14 29 400 st or more 80 80 80 350 to 1200 355 131 66 104 128 145 224 23 35 89 M12 x 1.75 depth 28 19 40 500 st or more 100 100 100 350 to 1300 410 131 66 128 143 145 262 23 40 110 M14 x 2 depth 30 19 40 8-21-23

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Extension end 8 10, 20, 30, 40, 50, 75 Rubber stopper Retraction end Both ends 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Nil Standard P Note 1) Axial piping Note 1) The combination of axial piping and both ends adjusters or retraction end adjusters is not available.

SMC

Extension end 8 10, 20, 30, 40, 50, 75 Rubber stopper Retraction end Both ends 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Standard type Nil PNote 1) Axial piping type Note 1) The combination of axial piping type and both ends adjusters or retraction end adjusteris not

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Lead wire color 30 4A SY100 For DC: Red, Black 3. Loosen the terminal screws (slotted screws) on the terminal block, insert the cores of the lead wires into the terminals according to the connection method, and fasten them securely with the terminal screws. 30 1A SY100 For 100 VAC: Blue 30 2A SY100 For 200 VAC: Red 30 3A SY100 4. Secure the cord by fastening the ground nut.

VQZ1000/2000/3000

One side solenoid latching type Manual override 2-7-29 30 30 Cylinder Speed Chart Use as a guide for selection. Please confirm the actual conditions with SMC Sizing Program.

Guide Cylinder Series MGG

80 100 63 80 100 300mm or more 350 to 1100 308 107 54 86 108 192 30 72 14 29 Rc 1/4 119 M12 x 1.75 depth 23 16 400mm or more 350 to 1200 355 131 66 104 128 224 35 89 19 40 Rc 3/8 145 M12 x 1.75 depth 28 23 500mm or more 350 to 1300 410 131 66 128 143 262 40 110 19 40 Rc 1/2 145 23 M14 x 2 depth 30 18 Series MGG Dimensions Front mounting flange type/MGGF 20 to 50 M N Bracket (See table below

CEx-OMI0064

No. 1 2 3 4 5 1 17 2 18 3 19 4 20 5 21 6 22 7 23 8 24 9 25 10 26 11 27 12 28 13 29 14 30 15 31 16 OUT 15 5 ()131, OFF(0) PLC ON , 31No.2131, 7-3-5 (1)No.131 (,No. 2131 , ) (2)OUT 15 LCD _ (3)/,(A )(B )-9 +9 ,A B -9+9 (4),23 0 ,, 21 - 7-3-6 LCD COMPARE,ON +,ON ,OFF ,OFF () () () () (+) (+) () () (-) () () (-) LCD 1SHOT,100ms +, ON 100ms ON () () () () () (+) () (+) () (-) () (

VFR

Note 2) Min. operating frequency is once in 30 days.

LEKF-OMZ0035

Slider type LEKFS series 2.1 Specification AC servo motorMotor typeS*/T*) Model LEKFS25 LEKFS32 LEKFS40 Stroke [mm] 100 to 500 100 to 500 200 to 600 Horizontal 10 20 20 30 40 45 30 50 60 Work load [kg] Note1) Vertical 4 8 15 5 10 20 7 15 30 Up to 400 1500 900 450 1500 1000 500 1500 1000 500 401 to 500 1200 720 360 1500 1000 500 1500 1000 500 501 to 600 900 540 270 1200 1000 500 1500 1000

Electro-Pneumatic Valve NVEP/NVEF Series

Prassuro 1s0 PSIG (9.9 Kgflcm ) Prool Pr333ure 225 PSIG (15 Kgr cm ) Amblnl Temp. 40 120"F (5 50"C) Responsg Tlme 30 ms Max. 50 ms Max. 30 ms Max. 50 ms Max, Hysteresls 3% F.S. Repeatablllty 3/. Sensitivity o.5/.

NVEPA|VEFseies

Prassuro 1s0 PSIG (9.9 Kgflcm ) Prool Pr333ure 225 PSIG (15 Kgr cm ) Amblnl Temp. 40 120"F (5 50"C) Responsg Tlme 30 ms Max. 50 ms Max. 30 ms Max. 50 ms Max, Hysteresls 3% F.S. Repeatablllty 3/. Sensitivity o.5/.

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Limit switch 10 20 30 None B contact specification 2 pcs.

Battery-less

500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work

ZP

5 x 30 6 x 30 8 x 30 Pad type Applicable tube O.D.