Aluminum High Vacuum Angle Valve

CYV Chemraz Example) XLCV-16-M9NA-1G-XAN1A VMQ FKM for Plasma ULTIC ARMOR Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.

High Vacuum Angle Valve, XL Series

Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.

XL

Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.

High Vacuum Angle Valve

Example) XLAV-16L-2M9NA-1G-XAN1A *1 Produced by Mitsubishi Cable Industries, Ltd. * With solenoid valve: Option specifications/Combinations This model has indicator, auto switch, and K (DN) flange options, but hightemperature/heater options are not available. * Solenoid valves XLAV-16, 25, 40, 50: SYJ319, XLAV-63, 80: SYJ519 Example) SYJ319-1GS, etc.

XM, XY

), CF KF (NW), K (DN) Flange type Body: SCS13 (Conforms to Stainless steel 304) Bellows: Stainless steel 316L Bellows holder: Stainless steel 304.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMD Symbol Nil D C Type KF (NW) K (DN) CF Applicable flange size 25, 40, 50, 63, 80 63, 80 40 (070), 63 (114) XYD V V V V V XMD V V V V V Size 25 40 50 63 80 XYD Nil D KF (NW) K (DN) 25, 40, 50, 63, 80 63, 80 3.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

(Cable length) PCA-1557633 PCA-1557646 EX500-AC010-DN (1 m) EX500-AC050-DN (5 m) PCA-1557659 PCA-1557662 PCA-1557675 i o !0 !1 !2 !

Series: VQZ200, Stations: 5 Stations, Port Size: 5/32" One-touch Fitting, Option: -, CE Compliant: -

Series: 2 (VQZ200), Stations: 5 Stations, Port Size: N3T (5/32" One-touch Fitting)

Stations: 5 Stations, Port Size: N3T (5/32" One-touch Fitting), Option: None, CE Compliant: No

Stations: 5 Stations, Port Size: 5/32" One-touch Fitting, Option: None, CE Compliant: No

Series: 1 (VQZ1000), Stations: 5 Stations, Port Size: N3T (5/32" One-touch Fitting)

Series: VQZ1000, Stations: 5 Stations, Port Size: 5/32" One-touch Fitting, Option: -, Q: -

1

Note) Since the nuts are embedded in the SUP/EXH block. eEX600 SI unit EX600 wValve plate S 1 PR ZMV2 EX600 With mounting screws (2 pcs. of M4 x 6 and 2 pcs. of M3 x 8) Protocol Version Description When MJ, EN, EC or PN is selected When PR or DN is selected Symbol Description Symbol Nil A PR DN MJ EN EC PN PROFIBUS DP DeviceNet CC-Link EtherNet/IP Note) EtherCAT Note) PROFINET Note) rClamp

SV

How to Order EX500 G DN 1 Communication protocol Applicable GW unit DN PR AB DeviceNet PROFIBUS-DP Remote I/O (RIO) DeviceNet PROFIBUS-DP Remote I/O (RIO) Nil -X1 Dimensions 148 EX500-GAB1-X1 VOLTAGE 24 VDC/200 mA INPUT/OUTPUT 64/64 IP CODE IP65 SERIAL NO.

Series SV

How to Order EX500 G DN 1 Applicable GW unit Communication protocol DeviceNet PROFIBUS-DP Remote I/O (RIO) DN PR AB DeviceNet PROFIBUS-DP Nil Remote I/O (RIO) -X1 Dimensions 148 E x 500-GAB1-X1 VOLTAGE 24VDC/200mA INPUT/OUTPUT 64/64 IP CODE IP65 SERIAL NO.

Series VQ Metal Seal/Rubber Seal Body Ported

How to order manifold VV5Q14 P, R port size 08FS0 DN 00T SY 1. How to Order VQ0 VQ1000 VQ2000 1/4 1/4 5/16 Indicate an option symbol, K, for the manifold No. and be sure to specify the mounting position and number of stations of the single and double wiring by means of a manifold specification form.

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Series: VQZ200, Stations: 5 Stations, Port Size: 5/32" One-touch Fitting, Option: DIN Rail Mounting, CE Compliant: -

Series: 2 (VQZ200), Stations: 5 Stations, Port Size: N3T (5/32" One-touch Fitting), Option: D (DIN Rail Mounting)