5 Port Air Operated Valve Series SYA3000/5000/7000 1

EX) Base: 6 stations, common EXH, A & B port Rc 1/2 VVPA450-061-04 1 pc. VPA4154-00 3 pcs. VPA4254-00 2 pcs. XT038N-4A 1 pc.

Modular Type Regulator Series AR

MPa 0.2 0.2 0.15 0.15 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure MPa Inlet pressure MPa AR30 AR60 0.25 0.25 Outlet pressure MPa Outlet pressure MPa Set point Set point 0.2 0.2 0.15 0.15 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure MPa Inlet pressure MPa 38 AR10 to 60 Construction AR10 AR20, 25 t t

VXA21/22

8 1/4 1/8 1/4 VXA31m5-00 n X 100+50 VXA32m5-00 n X 160+70 Model/Valve Specifications Flow rate Orifice size (mm) Max. operating pressure differential (MPa) (1) Proof pressure (MPa) Weight (g) Max. system pressure (MPa) Cv Effective area (mm2) Model VXA3115-00 VXA3125-00 VXA3225-00 VXA3135-00 1.0 1.5 1.5 0.08 1.4 1.0 0.5 1.0 0.3 150 0.16 2.8 0.19 3.4 2.2 230 0.24 0.6 0.33 6 VXA3235-00 150

Self-seal Fittings Series KC

Nylon Urethane Effective orifice(mm 2) Weight (g) T (M) L Mounting hole M1 M2 KCE04-00 KCE06-00 KCE08-00 KCE10-00 KCE12-00 4 6 8 10 12 M12 1 M14 1 M16 1 M20 1 M22 1 14 42 13 15 17 21 23 18 19 21.5 24 25.5 16 17 18.5 21 22 21 30 39 84 115 2.6 6.8 13.1 20.4 30.4 2.6 6.8 16.2 25.6 35.4 17 19 24 27 45.5 52.5 59.5 63.2 Bulkhead female union: KCE Thread Rc (PT) 4 6 8 10 12 Effective orifice(mm

SY

SS5Y34, #1 (#1 + #5 + #6 + #7 + #17) SS5Y3-45FU-B .

E-P HYREG

/Component Parts/Working Principle VY1100 1, VY1200 1, VY1300 1, VY1400 1 (Pilot valve: VY1D00-00) VY1500 1, VY1700 1, VY1900 1 (Pilot valve: VY1B00-00) Working principle The pair of poppet valves u close due to the balance between actuating forces F1 and F2.

Process Pump <Fluororesin Type> Series PA3000

1/4 thread G 1/4 thread NPT 1/4 thread NPTF 1/4 thread Rc 1/4 thread G 1/4 thread NPT 1/4 thread NPTF 1/4 thread 0 3 PA331n (Standard assembly) PAP331n (Clean-room assembly) Automatically operated type Air pilot actuation type P11N* P11T* PAP331n (Clean-room assembly) P13 P13F* P13N* P13T* Port sizes marked "*" are optional.

V100

Sub-plate gasket VP300-2-1P (Rc 1/8) VP300-2-2P (Rc 1/4) VP500-2-1P (Rc 1/4) VP500-2-2P (Rc 3/8) VP700-2-1P (Rc 3/8) VP700-2-2P (Rc 1/2) Mounting Screw Tightening Torques M3: 0.6 Nm M4: 1.4 Nm M5: 2.9 Nm VP300-17-1 VP344 SF4--50 VP500-17-1 VP544 VP700-17-1 VP744 How to Order Sub-plate VP 00 2 1 Series Port size Thread type VP744 3/8 1/2 VP544 1/4 3/8 VP344 1/8 1/4 3 5 7 P F N T VP344 VP544

Modular F.R.L. Units

[MPa] 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure [MPa] 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure [MPa] AR50(K)-B AR60(K)-B 0.25 0.25 Outlet pressure [MPa] Outlet pressure [MPa] Set point Set point 0.2 0.2 0.15 0.15 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure [MPa] 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure [MPa] 71 Regulator AR10-A Series Regulator AR20

VQ4000

Note 5) Dust tight/Low jetproof enclosure (IP65) is not available with interface regulator. 0.4 0.3 0.2 0.1 0 0 200 400 600 800 1000 1200 1400 1600 Flow rate (l/min(ANR)) ARBQ4000-00-P (P A) How to Order 0.7 Outlet pressure (MPa) 0.6 0.5 Regulating port Solenoid Valve Interface regulator 0.4 A ARBQ4000-00-A-1 0.3 VQ40 (Plug-in type) B ARBQ4000-00-B-1 0.2 P ARBQ4000-00-P-1 0.1 A ARBQ4000-

CLA

~~ , A 00) 0(0) 0 (2.5) 2(6) 4(7. 5) ~ , 40 D-AG 43.5 49 55.5 3 D-AS 1(0 1(0) 5(1.5 I O{S.5) 8(4 3t 35 42 so 57 .5 ~ Ht A 00) 00) 0(2.5 26 417 .5) D-A3 B !

Series SV

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

LEC-OM02904

PB01 FILT (II) 0h 1() 1(No.PB13)1(No.PB14) 0 0 0 0 OFF () 1 No.PB13 No.PB14 2 . No.PB13PB14 12 00 11OFF 5 13 5 No. PB02 VRFT () 0h No.PA08()23PA08 1 1() (No.PB19) ( No.PB20) 0 0 0 0 OFF () 1 No.PB19 No.PB20 2 .

Compact 5-Port Solenoid Valve

(A)4 2(B) (A)4 2(B) 4(A) 2(B) (EA)5 1 3(EB) (EA)5 1 3(EB) (P) (P) 3-position pressure center 5(EA) 3(EB) 1(P) (A)4 2(B) N.O. valve x 2 pcs. 2(B) 4(A) (EA)5 1 3(EB) (P) 3(EB) 5(EA) 1(P) N.C. valve, N.O. valve x 1 pc. of each 2(B) 4(A) 3(EB) 5(EA) 1(P) Component Parts No.

SYJ3000/5000/7000

SUP spacer assembly ARBYJ5000-00-P Thread type A, B port size A, B port 1/8, C6 Nil F N T Rc G NPT NPTF P port 1/4 01 1/8 One-touch fitting for 6 C6 N7 One-touch fitting for 1/4" Type 43 (5 Port/Base mounted) How to Order SS5YJ5 43 05 C4 Stations -+ -+ A B 02 2 stations P, R port thread type R port 1/8 : : R P 20 A, B port C4 20 stations Nil F N T Rc G NPT NPTF P port 1/8 A, B port size

VQ5000

-A-1 A VQ50 (plug-in type) ARBQ5000-00-B-1 B ARBQ5000-00-P-1 P ARBQ5000-00-A-5 A VQ55 (plug lead type) ARBQ5000-00-B-5 B ARBQ5000-00-P-5 P Circuit Diagrams Reduced pressure port: A Reduced pressure port: B Reduced pressure port: P 39 Series VQ5000 Base Mounted Type Specifications ARBQ5000 Interface regulator model Reduced pressure port P A B Plug-in Plug lead Plug-in Plug lead Plug-in Plug

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

-A-1 A VQ50 (plug-in type) ARBQ5000-00-B-1 B ARBQ5000-00-P-1 P ARBQ5000-00-A-5 A VQ55 (plug lead type) ARBQ5000-00-B-5 B ARBQ5000-00-P-5 P Circuit Diagrams Reduced pressure port: A Reduced pressure port: B Reduced pressure port: P 39 Series VQ5000 Base Mounted Type Specifications ARBQ5000 Interface regulator model Reduced pressure port P A B Plug-in Plug lead Plug-in Plug lead Plug-in Plug

E-P HYREG ® Series VY1 1

-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 12 V Body size Port size Rc Option Symbol P/A port R port B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) 00 M5 00 M5 01 00 01 02 00 02 03 04 Symbol Mounting Without sub-plate M5 Without sub-plate M5 D B 1 8 Without sub-plate Base mounted 1 8 1 4 2 Without sub-plate 1 4 3 8 1 2 4 JIS Symbol

IP80-OM00019

A CE 000 Q CE 100 IP8*00-0*0 Rc1/4 G1/2 IP8*00-0*1 M Rc1/4 M201.5 IP8*00-0* 0 N Rc1/4 1/2NPT IP8*00-0* 1 02MPa IP8*00-0*0 1 1/4NPT G1/2 IP8*00-0*1 2 03MPa 2 1/4NPT M201.5 IP8*00-0* 3 1.0MPa 3 1/4NPT 1/2NPT IP8*00-0* IP8*00-0*0 4 G14 G1/2 1 IP8*00-0*1 0 5 G14 M201.5 IP8*00-0* 6 G14 1/2NPT IP8*00-0* 1 (ExdBT5) 2 IP8000(1085mm) A 0.7mm IP8000IP8100 B 1.0mm 3 C M IP8100 D S E 35100mm

VXA31/32

Valve/Body 5 Common/For manifold VX VX3 VXA VN LVC LVA How to Order Manifold Base LVH Table (1) Orifice Size Model Orifice size (No) 1 (1.5 mm) 2 (2.2 mm) 3 (3 mm) 4 (4 mm) VXA31 VXA32 LVD VVXA32 VVXA31 LVQ Number of stations 02 LQ 2 stations LVN Manifold base 10 10 stations Symbol VVXA31 VVXA32 VXA31 5-00 Applicable valve TI/ TIL Port size (Individual port) 1 2 Rc Rc VXA32 5-00 1 8 1 4