Table of Contents

AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11 1.5 HAA15-10 HAW22-14 AT11C-06 AFF8B-06 IDF11CAM350-06 AMD450-06 15 2.0 HAA22-14 HAW22-14 AT22C-14 AFF11B-06 IDF15CAM450-06 AMD450-06 22 3.0 HAA37-14 HAW37-14 AT22C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 27 3.5 HAA37-14 HAW37-14 AT37C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 37 5.0 HAW55-20 AT37C-14 AFF37B-14 IDF37C1-3 AM650-14 AMD650-14

Table of Contents

0.28 3.4 15 0.30 3.8 14 0.30 3.8 14 0.31 3.4 14 0.26 3.4 15 0.30 4.0 14 0.30 3.7 13 0.32 3.2 13 0.25 3.0 14 0.28 3.5 13 0.29 3.4 13 0.31 3.2 14 [13] 14 [13] 0.32 [0.30] 3.6 [3.2] 14 0.30 3.7 0.32 [0.30] 3.6 [3.2] 13 [5.0] 0.27 [0.42] 3.2 [1.3] 13 0.28 3.1 15 [5.3] 0.22 [0.42] 3.7 [1.5] 13 0.28 3.3 0.30 2 position 3 position Single 5 50 or less VFR420 VFR421 VFR424 Double 5 50 or less VFR430

Proposals for Energy Saving

L1 Low noise nozzle with male thread/KNS (mm) Model Nozzle size D Connection size L1 A Width across flats H1 0.75 x 4 1 x 4 0.9 x 8 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 R 1/8 R 1/8 R 1/8 R 1/4 R 1/4 R 1/4 R 1/4 12 12 12 14 14 14 14 18 18 18 20 20 20 20 14 14 14 14 14 14 14 KNS-R01-075-4 KNS-R01-100-4 KNS-R01-090-8 KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-110-8 D 2 H1 A L1 Connection

Modular Design with Uniform Body Style

(The SI unit type is provided for use in Japan.) *12 Excludes port size 06 *13 v: For the pipe thread type: NPT only *14 A special body type is required to mount the element service indicator.

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11 1.5 HAA15-10 HAW22-14 AT11C-06 AFF8B-06 IDF11CAM350-06 AMD450-06 15 2.0 HAA22-14 HAW22-14 AT22C-14 AFF11B-06 IDF15CAM450-06 AMD450-06 22 3.0 HAA37-14 HAW37-14 AT22C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 27 3.5 HAA37-14 HAW37-14 AT37C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 37 5.0 HAW55-20 AT37C-14 AFF37B-14 IDF37C1-3 AM650-14 AMD650-14

smcmaintenancepartslist

Plate mount bolt tightening torque (kgfcm) Width across flat (mm) 5 Bore size (mm) Retaining ring size 12 RTW-13 14 16 RTW-18 6 34 20 RTW-22 8 52 25 RTW-26 10 88 q w 32 RTW-34 14 220 40 RTW-42 14 220 Not to hurt 50 RTW-52 17 440 63 RTW-65 17 440 80 RTW-82 22 1,240 100 RTW-102 27 2,000 Removal of End Lock (With End Lock) 1.

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

At a time of shipment from the factory, it is set such that the security code is not required. 14 These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

PSE530/200

SET To measuring mode 16-3-14 14 Series PSE530/200 Multi-channel Controller/Pressure Sensor Operation 3: Special Setting 1 Precision indicator setting Refer to A Display calibration function on page 16-3-17 for details. Calibration mode + SET MPa Measuring mode kPa Press and hold for 2 seconds or longer.

Modular F.R.L. Units

N.C.: Gray N.O.: Black B B B B B B B Dimensions Width across flats 14 1/8 Thread type/Rc, G: 10 One-touch fitting Thread type/NPT: 3/8" One-touch fitting Width across flats 14 1/8 M5 x 0.8 Applicable model AC25-B to AC60-B Optional/Semi-standard specifications Metal bowl Metal bowl with drain guide Metal bowl with level gauge Metal bowl with level gauge, with drain guide With drain guide

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." ~ ' G 1J 2O 8 3 19 19 25 ' 45 14 3 3.5 24 15 1.7 I ZPT20~ 20 23 8 12 4 40 ZPT02U 2 2.6 1.2 ZPT04U ' 4 . .. a:.e 1.6 ZPT06U 6 7 08 '9 ' 12 ZPT2Sg . 25 28 I 14 3 .8 4 25 , 45 , ''24 '' . '5 : .

LEC-OM02904

LE--LE-CSM-AWG14 14 .

7ND9071en

L 13 NOTE 8 L+ L 14 16 L+ 14 Uo (Voc) Ui (Vmax) Io (Isc) Ii (Imax) Po Pi (Pmax) 15 L 15 16 L+ L+ 16 17 L L+ 18 Notes 1.

Thermo-chiller/Rack Mount Type

L/min) For Option MT: 0.32 (at 10 L/min)/0.32 (at 14 L/min) Circulating fluid system Rated flow (50/60 Hz)7 [L/min] 7/7 For Options T, MT: 10/14 Flow display range20 [L/min] 2 to 16 Electric conductivity display range [S/cm] 0.1 to 48 (Only for Option DM) Electric conductivity setting range [S/cm] 0.5 to 45 (Only for Option DM) Particle filter nominal filtration rating19 [m] 5 Bypass valve19

OMU0023

Step Request data Response data Operation details 01 10 0600 000A Alarm history command to clear alarm 14 0 0 0 0 1 01 10 0600 000A history sent. (0 to 10 entries) 0 0 0 0 0 0 01 10 060A 000A Alarm history command to clear alarm 14 0 0 0 2 01 10 060A 000A history sent. (11 to 20 entries) 0 0 0 0 0 0 0 67 - Caution Ensure the alarm history is cleared only after taking corrective action in

Compact Manifold Regulator

L2 L2-10.5 L1=(28 x n)+56 18 20 52.5 39 28 28 14 5.3 3 5 5.5 SMC SMC SMC SMC 84 56 8 28 11.5 L2 dimension DIN rail part no.

HRL

The cooling capacity required for the oscillator is, 20 [kW] 6 [kW] = 14 [kW] Considering a safety factor of 20%, 14 [kW] x 1.2 = 16.8 [kW] r Calculate based on the laser output. Laser output power 6 [kW], conversion efficiency 30% The oscillators power consumption is, 6 [kW] 0.3 = 20 [kW] Example 2: When the heat generation amount in the users equipment is not known.

Direct Solenoid

Solmldc.pc y indud6 cap, (1)rutbre3 pluo dor 15, (r ) dr 19, (2) (h 13, (2) dn 14, dnd (1) d.r 7 sc@01 t2B sordrdrdcp*3y. t'dud6p, (r) rss$d i@roddng cp...ro.dor t6. 0 ) &l 1q (2) del 13, (2) d.l 14, -d 11 | d.r 7lv5tv rvd'l{1 s6602 Solmidc4 s y. hdude, (1) .ubod a@ds plus rb| r 5, (1) irdi@ro.lign a$nbry dor 1 7& 13, (1 )drr 19, (2) dr 13, 12) d6r 14. and lrl dat 7 (b,vo lve 1"1 1 6 sdendd

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

-NVJAs14 1pc.NVJ4324 1pc.VJ300-10-14 Dimensions inch (mm) Body Ported Type: NVJA3O2-M3 (-F) 1.12\24.4) 0.14(3.5)Dia 2 l\,,lounting holes , 0.87 M3x0.5 0.04(1)Dia T 6 * : .

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-NVJAs14 1pc.NVJ4324 1pc.VJ300-10-14 Dimensions inch (mm) Body Ported Type: NVJA3O2-M3 (-F) 1.12\24.4) 0.14(3.5)Dia 2 l\,,lounting holes , 0.87 M3x0.5 0.04(1)Dia T 6 * : .

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-NVJAs14 1pc.NVJ4324 1pc.VJ300-10-14 Dimensions inch (mm) Body Ported Type: NVJA3O2-M3 (-F) 1.12\24.4) 0.14(3.5)Dia 2 l\,,lounting holes , 0.87 M3x0.5 0.04(1)Dia T 6 * : .