VFS

Non plug-in type VV5FS3-10 VFS310-D VFS310-E Plug-in type with terminal block: 6 stations (Manifold base) VV5FS3-01T-061-02 1 (2 position single) VFS3100-5FZ 3 (2 position double) VFS3200-5FZ 2 (Blanking plate) VVFS3000-10A 1 Non plug-in type: 6 stations (Manifold base) VV5FS3-10-061-03 1 (2 position single) VFS3110-5D 5 (3 position exhaust center) VFS3410-5D

VFR

VFR2110-5D 5 sets (2 position single part no.) VFR2410-5D 1 set (3 position exhaust part no.) VVFS2000-R-01-2 1 set (Individual EXH spacer part no.) VV5FR2-01T1-061-02 1 set (Manifold base part no.) VFR2100-5FZ 3 sets (2 position single part no.) VFR2200-5FZ 2 sets (2 position double part no.) VVFS2000-10A 1 set (Blanking plate assembly part no.)

1

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

Smooth Cylinder/Low Speed Cylinder

CDQSXB20-30D CDQSXB12-5D 60 CQ-M5 x 60 L 30 CQ-M3 x 30 L 35D 10D 65 x 65 L 35 x 35 L 40D 15D 70 x 70 L 40 x 40 L 6.5 Example) CQ-M3x30 L 4 pcs. 6.5 45D 20D 75 x 75 L 45 x 45 L REA 50D 25D 80 x 80 L 50 x 50 L CDQSXB25-5D 30D Mounting bolt 40 55 x 55 L CQ-M5 x 40 L REB 10D CDQSXB16-5D 45 30 x 45 L CQ-M3 x 30 L 15D 10D 50 35 x 50 L x 35 L REC 20D 15D 55 40 x 55 L x 40 L 6.5 CY 25D 20D 60 45

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Free Mount Cylinder

Note 1) In the case of ZCUKR16-5D: 14.5 mm.

Hydraulic

Mounting bolt Mounting bolt diagram C D D Model C Mounting bolt Model C D Mounting bolt M5 x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l M8 x 95l x 100l x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 160l x 185l 5D (M) CHQB63 10D (M) CH QB20 55 60 65 70 75 80 85 90 95 100 70 75 80 85 90 95 100 105 110 115 140 165 75 80 85 90 95 100 105 110 115 120 145 170 90 95 100 105

Compact Hydraulic Cylinder

CHQ CHQ C D CHK Mounting Bolts CHQWB20-5D (M) C D C D Model Mounting bolt part no. Model Mounting bolt part no.

42

P U S H 4(A) 26.4 FREE LOCK 1(P) 2(B) VQZ SQ VFS 3(R2) 5(R1) Circuit diagram VFR Plug-in type Plug lead type VQ7 Release valve spacer: For D side mounting VVQ4000-24A-1D (Plug-in type) VVQ4000-24A-5D (Plug lead type) 149 (Plug-in type) 101.5 (Plug lead type) 59 Combination of VQ41ll (Single) and release valve spacer can be used as air release valve.

A

T I P L O A D F O R 3 0 0 M M S T R O K E Local Production Available Bore MGGM MGGL Slide Bearing 20 20N 23N 25 26N 28N 32 42N 45N 40 65N 45N 50 110N 45N D I M E N S I O N S S E E N E X T P A G E Courtesy of Steven Engineering, Inc. ! 230 Ryan Way, South San Francisco, CA 94080-6370 ! Main Office: (650) 588-9200 ! Outside Local Area: (800) 258-9200 !

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

R P 3.5 to 7 3 1 < >: AC 93.5 86 M plug connector (M) R P (Lead wire length) 3 1 87 300 83.5 98.5 Indicator light Cross section 0.23 mm2 Cover diameter 1.5 69.5 <74.5> R P 3 1 < >: AC Formula L1 = 20n + 8 L2 = 20n + 26 n: Stations (Maximum 20 stations) Dimensions L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 48 66 87.5 98 68 86 112.5 123 88 106 137.5 148 108 126 150 160.5 128 146 175

3 Port Solenoid Valve Metal Seal Series VZ200 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Stations n: Stations Formula L1 = 20n + 11 L2 = 20n + 36 2 51 76 3 71 96 4 91 116 5 111 136 6 131 156 7 151 176 8 171 196 9 191 216 10 211 236 ( ): A port Rc 1/8 Symbol L1 L2 VT VP Common exhaust: VV3Z4-50 (Built-in One-touch fittings manifold) (G) (L

VQZ1000/2000/3000

+ 10, L2 = 20n + 32 n: Stations (Maximum 20 stations) L n 2 50 72 100 110.5 3 70 92 112.5 123 4 90 112 137.5 148 5 110 132 162.5 173 6 130 152 175 185.5 7 150 172 200 210.5 8 170 192 212.5 223 9 190 212 237.5 248 10 210 232 262.5 273 11 230 252 275 285.5 12 250 272 300 310.5 13 270 292 312.5 323 14 290 312 337.5 348 15 310 332 362.5 373 16 330 352 375 385.5 17 350 372 400 410.5 18 370 392

Profile Design ISO/VDMA Air Cylinder Series CP95

ring Antifriction material Piston seal NBR Rod seal NBR Cylinder tube gasket NBR Cushioning valve seal NBR Piston/rod gasket NBR Magnet ring Stroke L2 L1 FB1 = WS (1+ ) FB allowable L1 L2 FB1 allowable 32 62.5 34.5 + st 80 N 40 74.0 39.0 + st 125 N 50 76.0 44.5 + st 195 N 63 91.0 44.5 + st 310 N 80 93.0 53.0 + st 500 N 100 104.0 57.5 + st 785 N e.g. 63mm bore, 100mm stroke, Ws = 20N

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

+8 L2=20n+26 L n 2 48 66 87.5 98 19 388 406 437.5 448 20 408 426 450 460.5 10 208 226 250 260.5 11 228 246 275 285.5 12 248 266 287.5 298 13 268 286 312.5 323 14 288 306 337.5 348 15 308 326 350 360.5 16 328 346 375 385.5 17 348 366 387.5 398 18 368 386 412.5 423 3 68 86 112.5 123 4 88 106 137.5 148 5 108 126 150 160.5 6 128 146 175 185.5 7 148 166 187.5 198 8 168 186 212.5 223 9 188 206

CATALOG

T I P L O A D F O R 3 0 0 M M S T R O K E Local Production Available Bore MGGM MGGL Slide Bearing 20 20N 23N 25 26N 28N FOR INFORMATION ON BORE SIZES 63, 80 AND 100MM, 32 42N 45N 40 65N 45N P L E A S E C O N S U L T S M C C U S T O M E R S E R V I C E 50 110N 45N D I M E N S I O N S S E E N E X T P A G E Courtesy of Steven Engineering, Inc. !

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

74.5 Indicator light 71<74.5> R2 R1 5 1 P 3 Cover diameter 1.5 Cross section 0.23mm2 100.5 93 75 < >: AC 1 P 5 3 R2 R1 M plug connector (M) 76.5 143.5 (3 Position)<145.5> 130 (Double)<132> 101.5 (Single)<102.5> Indicator light (Lead wire length) 76.5<81.5> 300 64.5<65.5> Cover diameter 1.5 Cross section 0.23mm2 5 1 P 3 R2 R1 < >: AC Dimensions n: Station (Max. 20 stations) Equation L1=20n

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

+8 L2=20n+26 L n 2 48 66 87.5 98 18 368 386 412.5 423 19 388 406 437.5 448 20 408 426 450 460.5 15 308 326 350 360.5 16 328 346 375 385.5 17 348 366 387.5 398 10 208 226 250 260.5 11 228 246 275 285.5 12 248 266 287.5 298 13 268 286 312.5 323 14 288 306 337.5 348 7 148 166 187.5 198 8 168 186 212.5 223 9 188 206 237.5 248 3 68 86 112.5 123 4 88 106 137.5 148 5 108 126 150 160.5 6 128 146

CLQ

120l x 125l x 130l x 135l x 140l x 145l x 150l x 175l x 200l 65 70 75 80 85 90 95 100 105 110 70 75 80 85 90 95 100 105 110 115 75 80 85 90 95 100 105 110 115 140 165 85 90 95 100 105 110 115 120 125 150 175 90 95 100 105 110 115 120 125 130 155 180 100 105 110 115 120 125 130 135 140 165 190 110 115 120 125 130 135 140 145 150 175 200 125 130 135 140 145 150 155 160 165 190 215 CDLQB20-5D

VFN2000N

Model Weight Weight (g) VFN2000N/Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) VFN2120N-5D-02F 260 400 C 3.48 3.48 b 0.25 0.25 Cv 0.85 0.85 C 4.57 4.57 b 0.17 0.17 Cv 1.06 1.06 VFN2220N-5D-02F 2 position Single solenoid Double solenoid How to Order VFN2 20 1 5 D N 02 F Z Thread type Solenoid Single solenoid Double solenoid 1 2 NAMUR Interface Rc (PT) G (PF