Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

MSQ +4 0 0 9 e ov o gr y MRQ ke of e g n Dra R n ot io at at io ot 20n R ra R ot at n io g n ra e ng of e k of e y ke gr o o y v e 9 gr 0 +4 0 oo ve Note) If it is pressurized from the port indicated with the arrow, the shaft rotates in the clockwise direction.

C95

A59W n n = 2, 4, 6, 8 n = 2, 4, 6, 8 CP95 15 25 1 F5(W)/J5J 15 25 1, 2 59W NCM 15 + 55 (n 2)/2 25 + 55 (n 2)/2 n F5BAL/F59F n = 2, 4, 6, 8 n = 2, 4, 6, 8 15 25 1, 2 NCA F5NTL 15 + 55 (n 2)/2 25 + 55 (n 2)/2 n n = 2, 4, 6, 8 n = 2, 4, 6, 8 D10 10 1 100 100 2 (Same side) -X A3 2 (Different sides) 35 35 K3 n (Same side) 100 + 100 (n 2) 100 + 100 (n 2) G3 n = 2, 4, 6, 8 n = 2, 4, 6, 8 20n

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

Spring return Spring extend Rubber bumper Heat resistant Cold resistant Low speed Stainless steel rod Rod side nose mounting Head side pivot mounting Double end mounting Block mounting O O O O O O O S S O O O O O O NCA S S S S S O O O S O O N N S S S S S S N N N O O O O S 1 1 1 1 1 2 1 1 1 3, 4 1 DN S S S S S S O O O O N S S O S S S O O O O N -X N N O N N N O O O O O N N N O O O O O 20N

CE

F.G. 4. 1. 1. 2. 12 10N [102kgfcm] 1. 2032 20N [204kgfcm] () 40,50,63 30N [306kgfcm] 2. 3. 2. 1.52 1. 2. 1. 1()ISO VG32 3. 4. 5. 6. 1. 2.14.5mT CE1 3. 4. (DC1224V) [] 1. 2. 3. 4. 2.

MHZ

(For D-Y) 4 Finger Position/Narrow Type 9 MHZ2-20N 14 Auto switch mounting groove (For D-F, D-M9(V)) 2.1 +2.2 0 0 0.4 When open 17.2 When closed 7.2 Note) When using D-Y59, D-Y69 and D-Y7 type auto switches, through-hole mounting is not possible. 12-2-35 35 Series MHZ2 Dimensions MHZ2-25 Double acting/Single acting Basic type 36.5 22 2-M6 x 1 thread depth 10 (Mounting thread) 4-M6 x 1 thread

Table of Contents

(For D-Y) 4 Finger Position/Narrow Type 9 MHZ2-20N 14 Auto switch mounting groove (For D-F, D-M9(V)) 2.1 +2.2 0 0 0.4 When open 17.2 When closed 7.2 Note) When using D-Y59, D-Y69 and D-Y7 type auto switches, through-hole mounting is not possible. 12-2-35 35 Series MHZ2 Dimensions MHZ2-25 Double acting/Single acting Basic type 36.5 22 2-M6 x 1 thread depth 10 (Mounting thread) 4-M6 x 1 thread

MHZ

(For D-Y) 4 Finger Position/Narrow Type 9 MHZ2-20N 14 Auto switch mounting groove (For D-F, D-M9(V)) 2.1 +2.2 0 0 0.4 When open 17.2 When closed 7.2 Note) When using D-Y59, D-Y69 and D-Y7 type auto switches, through-hole mounting is not possible. 12-2-35 35 Series MHZ2 Dimensions MHZ2-25 Double acting/Single acting Basic type 36.5 22 2-M6 x 1 thread depth 10 (Mounting thread) 4-M6 x 1 thread

Rotary Table Series MSU

Rotation 1 9010 18010 9010 18010 9010 18010 9010 18010 Fluid Air (unlubricated) Proof pressure MPa (psi) 1.05 (152.25psi) 1.5 (217.5psi) Ambient and fluid temperature 5 to 60C (41 to140F) Operating pressure range MPa (psi) 0.15 to 1.0 (21.75 to 145) 0.15 to 0.7 (21.75 to 101.5) 0.2 to 0.7 (29 to 101.5) Rotation time adjustment range sec/90 0.07 to 0.3 (seconds per 90) Allowable radial load 20N

LX Series Compact Electric Actuators

stepping 80 08; 5mm lead a I a a a 100 O8; 6mm lead o2 stepping I M <-iD;;,;; uo200 08; 12mm lead 10.05 100 08; 6mm lead @5 stepping 200 @q 12mm lead I a-.1 Teaching Box See Page 40 Low Pmfils tlEctrh Slide lilE Specif ications Stroke(mm) 25, 50, 75, 100 Motol 5-phase stepping motor Screw(mm) 08, Lead 6 s8, Lead 12 68, Lead 2 s8, Lead 5 Max. pay load (horlzontal orientation) 30N (6.6 rb) 20N

ZL3-OM00801

3.4.2 1) 2), 3) 1 (2/V) 1 (G) 40 ) (3/E) 40 ) [Nm] G Rc1/8,G1/8,NPT1/8 35 Rc1/2,G1/2,NPT1/2 2830 (2/V) Rc3/4,G3/4,NPT3/4 2830 (3/E) Rc1,G1,NPT1 3638 10 No.ZL3-OM00801-A 3.4.3 1/P 0.20.6MPa 2/V 1 3/E G 3.4.4 1/P 1) 2) 3) 4) 1) 2) 3) 1) 0.1 2) 0.1 3) +0.15 -0.2 3.4.5 1) 2), 3) 4) 5) URL http://www.smcworld.com& 11 No.ZL3-OM00801-A 3.5 3.5.1 1) . 30N 35N 20N

VEX-OMY0001

(P2) () 3) 4) 5) 23 5 No.VEX-OMY0001 VEX3 3 / DC () 5 20N 1) 2) 1 ()ISO VG32 2 ISO VG32 ,(SDS) 6 No.VEX-OMY0001 VEX3 3 / () 30 ( ) , 1 VG32 2 ()ISO VG32 7 No.VEX-OMY0001 VEX3 VEX3 12,22,32,42 ,300mm DXT170-80-A1) 2) Lmm 2 300 6 600 1 (2 ) AC100V 10 1000 2 (2 ) AC200V 15 1500 3 (2 ) AC 20 2000 DC L 4 :+ :DC 25 2500 DXT170-71-1 30 3000 0.20.33mm ( 1.7mm) DC : M 3.23.7mm

Vacuum

Anaiog ouipLlt 0lo 20n-A 24VDC rTvo0sr . Brackets l to 5v 0 to 5VDC 12VDC o tc I OVDC 100kPa t ' .

This is a legacy product, and replaced byVEX1900-20N-G

Compact

stepping 80 08; 5mm lead a I a a a 100 O8; 6mm lead o2 stepping 200 08; 12mm lead 10.05 I M <-iD;;,;; uo100 08; 6mm lead @5 stepping 200 @q 12mm lead I a-.1 Teaching Box See Page 40 Low Pmfils tlEctrh Slide lilE Specif ications Stroke(mm) 25, 50, 75, 100 Motol 5-phase stepping motor Screw(mm) 08, Lead 6 s8, Lead 12 68, Lead 2 s8, Lead 5 Max. pay load (horlzontal orientation) 30N (6.6 rb) 20N

Vacuum

Anaiog ouipLlt 0lo 20n-A 24VDC rTvo0sr . Brackets l to 5v 0 to 5VDC 12VDC o tc I OVDC 100kPa t ' .

VXA31/32

Port R Operating Fluid and Ambient Temperature Operating fluid temperature (C) (3) Vacuum Ambient temperature (C) Temperature conditions Air (Standard) Oil (Standard) (V) Port P Port A Maximum Minimum 60 5 (1) 40 5 40 40 5 5 (2) Note 1) Dew point: 5C or less Note 2) 500 cSt or less Note 3) V in parentheses is option symbol. Option Material No.

One-touch Fittings

If the fluid temperature is 5C or less, the moisture in the circuit could freeze, causing damage to the seals and leading to equipment malfunction. Therefore, take appropriate measures to prevent freezing. Refer to SMC Air Preparation System for further details on compressed air quality.

33

Water 15% Ethylene Glycol Aqueous Solution Physical property value Physical property value Temperature Density r [kg/L] Specific heat C [J/(kgK)] Current unit system Density r [kg/L] Specific heat C [J/(kgK)] Current unit system Weight volume ratio c [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.00 4.2 x 103 1.00 1 x 103 Weight volume ratio c [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.02 3.91

HRX-OM-W060

Pump automatic running and stopping is repeated to prevent freezing by maintaining circulating fluid temperature at 3C to 5C. Pump automatically starts operating if the circulating fluid temperature drops below 3C. Circulating fluid is heated by the pump power generated by pump operation.

Clean Exhaust Filter

. 3) Exhaust from other equipment Use the air consumption specified for each piece of equipment as a standard. 839 Clean Exhaust Filter SFE Series RoHS How to Order SFE 11 Size/Port size Male thread type Plug-in type Symbol Port size Max. flow capacity L/min (ANR) 11 M5 x 0.8 3 42 R1/8 65 52 R1/8 130 53 R1/4 130 73 R1/4 200 Symbol Port size Max. flow capacity L/min (ANR) 3A 4 30 4B 6 65 5C