Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Standard, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/Multiple Connector, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Standard, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Standard, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: -, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Standard, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/Multiple Connector, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Standard, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Standard, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: -, End Lock: -

Part Number Description: HIGH VACUUM GATE VALVE   Product Line: Z   Product Line Description: VACUUM SERIES   Click here to report information errorImage shown may not match exact part number

Part Number Description: HIGH VACUUM GATE VALVE   Product Line: Z   Product Line Description: VACUUM SERIES   Click here to report information errorImage shown may not match exact part number

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

SY

Notes: Blanking plate assembly: SX3000-75-1A SUP block disc: SX3000-77-1A EXH block disc: SX3000-77-1A (2 pcs.

1

SY30M-15-1A SY50M-15-1A Part number is for one assembly.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY3000 SY3000-26-19A-Q SY5000 SY5000-26-1A-Q SY7000 SY7000-26-1A-Q SY9000 SY9000-26-1A-Q Series Assembly part no.

Compact 5-Port Solenoid Valve

JSY1000 JSY11M-15P-1A JSY3000 SY30M-15-1A JSY5000 SY50M-15-1A Number of cores (Lead wire) Lead wire length [m] * The part number is for 1 piece.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

VZ1000-1A-2 Note No.

V100

PVT317-53-1A 1 pc.

Table of Contents

(N) VVZS2000-1A-3-Bore size-1 (-X12) Conventional block assembly part no. (N) VVZS2000-1A-3-Bore size (-X12) For VZS3000 New block assembly part no. (N) VVZS3000-1A-3-Bore size-1 (-X12) Conventional block assembly part no. (N) VVZS3000-1A-3-Bore size (-X12) Note) -X12 shows the part no. for all common style.

2

Switch Characteristics Contact point configuration 1a Maximum contact point capacity 2 VA (AC), 2 W (DC) Operating voltage: AC, DC 100 V or less Maximum operating current 12 V to 24 V AC, DC: 50 mA 48 V AC, DC: 40 mA 100 V AC, DC: 20 mA 157 Series AC Accessories (Spacers/Brackets) Spacer Modular F.R.L.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Series Assembly part no. 10-SY3000 SY3000-26-19A-Q 10-SY5000 SY5000-26-1A-Q 10-SY7000 SY7000-26-1A-Q 10-SY9000 SY9000-26-1A-Q Series Assembly part no.