Valve Type: Normally Closed, Bellows Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/Indicator, Left Flange Surface, Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: M Type Plug Connector, Surge Suppressor: w/Light & Surge Voltage Suppressor, Non-standard

Microspeed Cylinder

(built-in magnet) Nil S 2 pcs. 1 pc.

Type: Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 3-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Air Pilot, Piping Opening: Flange, Flange Type: NW, Flange Size Nominal: 16, Seal Type: Bellows Seal, Indicator: With indicator, Pilot Port Direction

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 16, Flange Type: KF (NW), Valve Direction: F (w/Indicator, Left Flange Surface), Version: 2, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: G [Grommet (Lead Wire Length 300mm)]

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: F (w/Indicator, Left Flange Surface), Version: 2, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: G [Grommet (Lead Wire Length 300mm)]

Valve Type: Normally Closed, Bellows Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/Indicator, Left Flange Surface, Version: 2, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: G [Grommet (Lead Wire Length 300mm)], Surge Suppressor: -, Non-standard Indicator: -,

Table of Contents

TI/ TIL 5 PA PAX Material Model PB %# & 1 & VXA212 0 2 2 0 2 . 2 0 2 . 2 . 0 2 . 0 2 . 0 2 . 0 2 ) .!* VXA213 0 2 VXA223 VXA224 VXA225 0 2 .!* / 0 0 2 0 2 2( VXA226 0 2 17-3-93 2 The VX series will be revised shortly. Series VXA21/22 Normally Closed (N.C.), Normally Open (N.O.) Fluid JIS Symbol N.C.

V100

actuation Port size {2(A) port} (A) 2 N.C.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

60, 4 station manifold base part number) SY3260-5G-C6 2 sets (double solenoid part number) SY3160-5G-M5 ... 2 sets (single solenoid part number) Enter the part numbers of valves and options to be mounted under the manifold base part number, in order, starting from station No. 1 as shown in the drawing.

MHx-OMY0005

:GR-S-010(10g):GR-L-005(5g) 14 3-3. 2 (MHF2-8D2MHF2-12D20D) 1. 2. 8:12:R 1620:C ABC 3. (8:) (12 ) :GR-S-010(10g):GR-L-005(5g)GR-L-010(10g) 8 2 12 2.5 16 3 20 4 B C C 8 A 12 0.9 16 C MHF2-8D2 20 1.3 MHF2-12D* R MHF2-8D2 8 1.5 12 2 16 2.5 20 3 12 15 3-4. /1 MHF2-8DMHF2-8D1 1 16 2 17 3 18 4 19 5 20 NBR 6 21 NBR 7 8 A 9 B 10 C 11 12 13 14 15 MHF2-8D

VQ5000

VQ 5 5 1 0 5 G Connector kit Enclosure Series Nil Dust proof W5Q55-05042C. 1 set * VQ5150-5G .. 2 sets * VQ5250-5G .. 2 sets * VQ5350-5G . 1 set Manifold base part number 5 VQ5000 W Dust tight, Splash proof (IP65) Valve part number (Stations 1 and 2) Valve part number (Stations 3 and 4) Type of actuation Manual override Valve part number (Station 5) 2 position single 2 position

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

SY100-61-3-05 SY100-61-3-06 SY100-61-2-01 SY100-61-2-02 SY100-61-2-03 SY100-61-2-04 How to Use DIN Terminal Caution Connection 1. Loosen the holding screw and pull the connector out of the solenoid valve terminal block. 2.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Modular mounting type 2-port solenoid valve JSXM21-AN301R-5G-U-F 1 pc.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Exhaust center: 4/2 5/3, Pressure center: 1 4/2 Note 2) ( ): Without sub-plate Note 3) For DC voltages.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

VQ 5 5 1 0 5 G Connector kit Enclosure Series Nil Dust proof W5Q55-05042C. 1 set * VQ5150-5G .. 2 sets * VQ5250-5G .. 2 sets * VQ5350-5G . 1 set Manifold base part number 5 VQ5000 W Dust tight, Splash proof (IP65) Valve part number (Stations 1 and 2) Valve part number (Stations 3 and 4) Type of actuation Manual override Valve part number (Station 5) 2 position single 2 position

SYJ3000/5000/7000

position single 2 position single Allowable voltage fluctuation (B) 2 (A) 4 (A) 4 (B) 2 Standard DC Power consumption (W) With power saving circuit 100V 110V [115V] 200V 220V [230V] 1 (P) 1 (P) 5 (R1) 3 (R2) 3 (R) Apparent power VA 2 position double 2 position double AC (B) 2 (A) 4 (A) 4 (B) 2 Surge voltage suppressor Indicator light 1 (P) 5 (R1) 3 (R2) 1 (P) 3 (R) In common between 110 VAC

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) X X X X X 1.2-72

4/5 Port Air Operated Valve Series SYJA3000

5 port 4 port 3 position exhaust center 5 3 position pressure center 2 position single 2 position single (B) 2 (B) 2 (A) 4 (A) 4 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) How to Order Manifold Base 2 position double 2 position double (B) 2 (A) 4 (B) 2 (A) 4 Same manifolds as series SYJ3000 are prepared. 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) SS5YJA3 Fill the same as SS5YJ3 3 position closed center 3 position

SYJ300/500/700

(For details, refer to page 4-4-11.) 4-4-6 7 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ300 Construction (A) 2 (A) 2 N.C.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Manifold base) SYJ312-5LZ-M3 .2 pcs. (Valve) SYJ300-10-1A .1 pc. (Blank plate ass'y) SS3YJ3-42R-03-C4 .1 pc. (Manifold base) SYJ314R-5G .2 pcs. (Valve) SYJ300-10-2A .1 pc.