Type: Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Compression Fitting, Nominal Designation of Piping Thread: 1/4, Voltage: 24 VDC, Seal Type: Bellows Seal, Electrical

Type: Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Face Seal Fitting, Nominal Designation of Piping Thread: 1/4, Voltage: 24 VDC, Seal Type: Bellows Seal, Electrical

Model: Size 1, Orifice Size: ø2, Fitting Size: 1/4, Fitting Type: Compression Fitting, Voltage: 24 VAC, Electrical Entry: Conduit w/Surge Voltage Suppressor, Special Electrical Entry: 90°, Spacer: w/Spacer

Model: Size 1, Orifice Size: ø2, Fitting Size: 1/4, Fitting Type: Compression Fitting, Voltage: 12 VDC, Electrical Entry: Conduit w/Surge Voltage Suppressor, Special Electrical Entry: None, Spacer: w/Spacer

Model: Size 1, Orifice Size: ø2, Fitting Size: 1/4, Fitting Type: Compression Fitting, Voltage: 12 VDC, Electrical Entry: Grommet, Special Electrical Entry: None, Spacer: w/Spacer

Model: 1 (Size 1), Orifice Size: 1 (ø2), Fitting Size: 2 (1/4), Fitting Type: S (Compression Fitting), Voltage: B (24 VAC), Electrical Entry: C (Conduit w/Surge Voltage Suppressor), Special Electrical Entry: A (90°), Spacer: A (w/Spacer)

Model: 1 (Size 1), Orifice Size: 1 (ø2), Fitting Size: 2 (1/4), Fitting Type: S (Compression Fitting), Voltage: 6 (12 VDC), Electrical Entry: C (Conduit w/Surge Voltage Suppressor), Special Electrical Entry: None, Spacer: A (w/Spacer)

Model: 1 (Size 1), Orifice Size: 1 (ø2), Fitting Size: 2 (1/4), Fitting Type: S (Compression Fitting), Voltage: 6 (12 VDC), Electrical Entry: G (Grommet), Special Electrical Entry: None, Spacer: A (w/Spacer)

Model: Size 1, Orifice Size: ø3, Fitting Size: 1/4, Fitting Type: Compression Fitting, Voltage: 24 VDC, Electrical Entry: Grommet, Special Electrical Entry: None, Spacer: w/Spacer

Model: Size 1, Orifice Size: ø3, Fitting Size: 1/4, Fitting Type: Face Seal Fitting, Voltage: 24 VDC, Electrical Entry: Grommet, Special Electrical Entry: None, Spacer: w/Spacer

Model: 1 (Size 1), Orifice Size: 2 (ø3), Fitting Size: 2 (1/4), Fitting Type: S (Compression Fitting), Voltage: 5 (24 VDC), Electrical Entry: G (Grommet), Special Electrical Entry: None, Spacer: A (w/Spacer)

Model: 1 (Size 1), Orifice Size: 2 (ø3), Fitting Size: 2 (1/4), Fitting Type: V (Face Seal Fitting), Voltage: 5 (24 VDC), Electrical Entry: G (Grommet), Special Electrical Entry: None, Spacer: A (w/Spacer)

Speed Controller: Standard Type In-line Type AS Series

Description Material Part no. 5 6 7 8 Note Valve seat U seal O-ring Gasket Brass HNBR NBR NBR/Stainless steel 1429138 142964-3 KA00327 M-5G2 9 x 7 x 1 Note) Construction drawing: AS1000-M5-N In case of AS1000-M5, nipples and gaskets are not attached. 651 AS Series Construction: AS2000/3000 Component Parts No. Description Parts no.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Description Material Part no. 5 6 7 8 Note Valve seat U seal O-ring Gasket Brass HNBR NBR NBR/Stainless steel 1429138 142964-3 KA00327 M-5G2 9 x 7 x 1 Note) Construction drawing: AS1000-M5-N In case of AS1000-M5, nipples and gaskets are not attached. 527 Series AS Construction: AS2000/3000 Component Parts No. Description Parts no.

This is a legacy product, and replaced byXSA3-43S-5G2

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(Manifold base) VZ5140-5G2 pcs. (Valve) DXT199-22-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

KJ

M-5G2 Material Stainless steel 304, NBR Use to change by 90 in a tube fetching direction from Onetouch fitting. KQ2L KQ2R P . 27 P . 28 Use to size down Onetouch fittings. Reducer elbow Union Y Use to change by 90 in a tube fetching direction from Onetouch fitting and to size down. P . 27 P . 28 KQ2L KQ2U Use to branch line in the same direction.

Table of Contents

MIN. 1 2 Note 1) d Note 2) L3 Note 3) L4 ASR430F-02-06S,-F20 ASR430F-02-08S,-F20 ASR430F-02-10S,-F20 ASR530F-02-06S,-F20 ASR530F-02-08S,-F20 ASR530F-02-10S,-F20 ASR530F-02-12S,-F20 ASR530F-03-06S,-F20 ASR530F-03-08S,-F20 ASR530F-03-10S,-F20 ASR530F-03-12S,-F20 ASR630F-03-10S,-F20 ASR630F-03-12S,-F20 ASR630F-04-10S,-F20 ASR630F-04-12S,-F20 89 111 17 34.9 57.7 6 63.7 21.5 20 17 R1/4 93 114

ASR

(-F20) ASR530F-03-06S(-F20) ASR530F-03-08S(-F20) ASR530F-03-10S(-F20) ASR530F-03-12S(-F20) ASR630F-03-10S(-F20) ASR630F-03-12S(-F20) ASR630F-04-10S(-F20) ASR630F-04-12S(-F20) ASQ430F-02-06S(-F20) ASQ430F-02-08S(-F20) ASQ430F-02-10S(-F20) ASQ530F-02-06S(-F20) ASQ530F-02-08S(-F20) ASQ530F-02-10S(-F20) ASQ530F-02-12S(-F20) ASQ530F-03-06S(-F20) ASQ530F-03-08S(-F20) ASQ530F-03-10S(-F20) ASQ530F

MHK2

Internal Grip External Grip MHK2-12S MHK2-12C 20 15 Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Gripping force (N) Gripping force (N) 15 10 0.5 MPa 0.5 MPa 10 0.4 MPa 0.4 MPa 5 5 0.3 MPa 0.3 MPa F F 0 0 10 20 30 40 50 10 20 30 40 50 Note) In case of single acting type, the value is for stroke center.