Compact 5-Port Solenoid Valve

J When J is selected for e, install the release valve or vacuum breaker in the middle of the vacuum piping.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

3 Ejector assembly ZK2 EJ A W 10 Nozzle nominal size 07 0.7 10 1.0 12 1.2 15 1.5 Bellows type with groove Flat type with groove 257 ZHP Series Dimensions 30 N 70 Silencer In the case of Flat type P 16.6 EXH. 24.7 P F E D C A PD port 3 6.2 K M Female thread mounting M Male thread mounting Unlocked: 32.2 PD port 2 Locked Unlocked J PD port 1 G H P port L E F 6.2 10 7.8 6.2 Lock screw 14.4 1.4

Air Suction Filter, ZFC Series, In-line Type with One-touch Fittings

L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover

ZFC Series

L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

L O L ZX G H F K ZR J ZM ZH E D I A ZU B C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL 2-4.5 ZY ZQ A B C D E F G H I J K L Model 4 ZFC100-04 ZF 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 ZP 1/4" ZFC101-07 6 ZFC200-06 ZCU 8 ZFC200-

VXA21/22

(Base) VVXA211-07 (Valve) VXA2121-00 (Blank plate) VX011-001 1 pc. 6 pcs. 1 pc. The standard arrangement of manifolds should be placed on an individual port on this side, each solenoid valve from the left side and a blank plate in the right side.

Secondary Batteries

Please make additional use of an air suction filter of the ZFA, ZFB or ZFC series. 90 Manifold X125 ZZQ1 07 B B 2 Series compatible with secondary batteries Port exhaust specifications 90 Material restriction Vacuum release pressure supply port (PD port) Maximum Number of Stations in Simultaneous Operation B None (Release pressure is supplied from the P port.)

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

CX E DB A C D -X (mm) 20B A 53 77 112 160 C 15 35 45 55 D 26 50 64 80 E 4.9 8 11.7 14.8 F 3 5 6 8.5 G 6.5 9.5 11 14 H 3.4 5.5 6.6 9 J M4 x 0.7 M6 x 1 M8 x 1.25 M10 x 1.5 Model Applicable cylinder MY3A16, MY3B16 MY3A25, MY3B25 MY3A40, MY3B40 MY3A63, MY3B63 A B A B A B A B MY-S16 MY-S25 MY-S32 MY-S40 63.6 Data 091 130 182 Guide for Using Side Support For long stroke operation, the cylinder

VVXA21/22

J ! #5 " 0"8 1 E F 4 " 4 % " 4 4 4 4 7 %1 % 3 VXA212-00 VXA213-00 VXA223-00 VXA224-00 = < .G < < * 4.5 . >< * < * 6 < * $ /H"3 % .''< " % " Operating Fluid and Ambient Temperature % " ?# ! ?# " 4 4 * )< > )< > > )< )< " $ 8 @ )

VXZ

Option Symbol and Composition Option Symbol and Composition Main body, shading coil material Holder material (in core ass'y) Option symbol Seal material Coil insulation type Main body, shading coil material Standard A B D E F G H J L N P T X Option symbol Seal material Coil insulation type NBR FKM Standard A B D E F G H J L N P T X NBR FKM B Polyacetal B FKM EPDM Brass or BC6, Copper FKM

JXCx-OMT0061CN

(P.32) (1) [IO] PLC PLC Rx Ry 00 OUT0 00 IN0 01 OUT1 01 IN1 02 OUT2 02 IN2 03 OUT3 03 IN3 04 OUT4 04 IN4 05 OUT5 05 IN5 06 06 07 07 08 BUSY 08 HOLD 09 SVRE 09 SVON 0A SETON 0A DRIVE 0B INP 0B RESET 0C AREA 0C SETUP 0D WAREA 0D JOG(-) 0E ESTOP 0E JOG(+) 0F ALARM 0F FLGTH 101A CC-Link 101F CC-Link 1B READY 1C1F CC-Link (1) [] PLC RWr PLC RWw RWr bit RWw bit 0 (L) 0 1 (H) 1 (

Air Suction Filter With One-touch Fittings ZFB Series

2 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 65 54 53 27.2 24.2 24 19.7 17.7 17.5 " " 15.2 18.5 21.7 14.4 15.5 50 15 12.5 22.5 26 48 12.8 8.5 52 57 64.5 28 30 34 9.5 11 13.5 24.5 27 30.5 13.5 14.5 16.5 16 17 21.5 61 65 81 17.5 21.5 25.6 16.6 18 23 70 87.5 30.2 34 21.7 24 280

SX

SX5000-38-16 A SX7000-39-16 A SX7000-38-16 A Dimensions Applicable fittings size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" Thread type Nil Rc G F KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 N NPT NPTF T Bolt and gasket part no.

A

www.stevenengineering.com I 1.83 LINEAR ACTUATORS: AIR CYLINDERS SERIES NCA1 H O W T O O R D E R S E R I E S N C A 1 A I R C Y L I N D E R O P T I O N S A D J U S T A B L E S T R O K E E X T E N D X C 8 O P T I O N XC8 A NC A1 A U T O S W I T C H C A P A B L E M O U N T I N G A D J U S TA B L E R A N G E A: 0~1 B: 0~2 B O R E S I Z E S T R O K E T E C H N I C A L SPECIFICATIONS A D J U S

Fluoropolymer Piping Equipment

Body Needle V seal Lock nut Adjustment handle Insert bushing Nut Collar A 1 2 3 4 5 6 7 8 PFA PCTFE PTFE PVDF PVDF PFA PFA PFA Body class 2 y u y u B Dimensions A (B) (max.S) D H Port A 2 x G SMC (J) SMC C E F K Port B E A B C D E F G H J K S Model 48 60 72 LVN20 LVN30 LVN40 24 30 36 12 18 22 88 110 124 34.5 43 52 6 9 11 4 5 6 14 25 25 20 26 33 18 24 30 2.4 7.5 8.0 940 LQ1/LQ3/LVN/LQHB Series

Ejector Valve Unit, Series ZYY/ZYX

Y 3 X 3 ZZY 45 J 1 U Note 1) With ejector Enter the following together with the manifold number: 1. Part No. of solenoid for SY3000/SX3000 2.

High Purity Fluoropolymer Needle Valve Series LVN 1

S) D H VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 VXA VN A port LVC 2-G LVA LVH SMC LVD SMC (J) C LVQ LQ E LVN TI/ TIL PA F K B port E PAX PB A B C D E F G H J K S LVN20 LVN30 LVN40 Model 48 60 72 2.4 7.5 8.0 18 24 30 20 26 33 14 25 25 4 5 6 6 9 11 34.5

Ejector Valve Unit Series ZYY/ZYX 1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Y 3 X 3 ZZY 45 J 1 U Note 1) With ejector Enter the following together with the manifold number: 1. Part no. of solenoid for SY3000/SX3000 2. Part no. of ejector valve for ZYY3000/ZYX3000.

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

Note) Metric size 23 04 06 08 10 12 Inch size 3.2 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 4 6 8 10 12 Made to Order (For details, refer to page 622.)

Ionizer Nozzle type IZN10 Series IZS

Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006