Adapter Material: Aluminum, Adapter: 5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter, Pad Diameter: ø50, Stage: 2.5 Stage, Guide Attachment: w/Mesh Attachment, Connection Thread: G1/4, Direct Mounting, Male Thread, Vacuum Inlet: -

Adapter Material: Aluminum, Adapter: 5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter, Pad Diameter: ø50, Stage: 2.5 Stage, Guide Attachment: w/Mesh Attachment, Connection Thread: G1/4, Direct Mounting, Female Thread, Vacuum Inlet: -

Adapter Material: Aluminum, Adapter: 5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter, Pad Diameter: ø50, Stage: 2.5 Stage, Guide Attachment: w/Attachment, Connection Thread: G1/8, Direct Mounting, Male Thread, Vacuum Inlet: -

Adapter Material: Aluminum, Adapter: 5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter, Pad Diameter: ø50, Stage: 2.5 Stage, Guide Attachment: w/Attachment, Connection Thread: G31/2, Direct Mounting, Male Thread, Vacuum Inlet: -

Adapter Material: Aluminum, Adapter: 5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter, Pad Diameter: ø50, Stage: 2.5 Stage, Guide Attachment: w/Mesh Attachment, Connection Thread: G3/8, Direct Mounting, Male Thread, Vacuum Inlet: -

Adapter Material: Aluminum, Adapter: 5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter, Pad Diameter: ø50, Stage: 2.5 Stage, Guide Attachment: w/Mesh Attachment, Connection Thread: G1/8, Direct Mounting, Male Thread, Vacuum Inlet: -

Adapter Material: Aluminum, Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 40 (ø40), Stage: JT5SF (5.5 Stage), Guide Attachment: None, Connection Thread: A20 (M20 x 1, Plate Mounting, Male Thread), Vacuum Inlet: BN02 (NPT1/4, Female Thread)

Adapter Material: Aluminum, Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 32 (ø32), Stage: JT5SF (5.5 Stage), Guide Attachment: None, Connection Thread: A20 (M20 x 1, Plate Mounting, Male Thread), Vacuum Inlet: BN02 (NPT1/4, Female Thread)

Adapter Material: Aluminum, Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 50 (ø50), Stage: JT5SF (5.5 Stage), Guide Attachment: None, Connection Thread: A20 (M20 x 1, Plate Mounting, Male Thread), Vacuum Inlet: BN02 (NPT1/4, Female Thread)

Adapter Material: Aluminum, Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 50 (ø50), Stage: JT5SF (5.5 Stage), Guide Attachment: None, Connection Thread: A20 (M20 x 1, Plate Mounting, Male Thread), Vacuum Inlet: 10 (ø10, One-touch Fitting)

Adapter Material: Aluminum, Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 32 (ø32), Stage: JT5SF (5.5 Stage), Guide Attachment: None, Connection Thread: A20 (M20 x 1, Plate Mounting, Male Thread), Vacuum Inlet: 10 (ø10, One-touch Fitting)

Adapter Material: Aluminum, Adapter: 5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter, Pad Diameter: ø40, Stage: 5.5 Stage, Guide Attachment: None, Connection Thread: M20 x 1, Plate Mounting, Male Thread, Vacuum Inlet: NPT1/4, Female Thread

Adapter Material: Aluminum, Adapter: 5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter, Pad Diameter: ø32, Stage: 5.5 Stage, Guide Attachment: None, Connection Thread: M20 x 1, Plate Mounting, Male Thread, Vacuum Inlet: NPT1/4, Female Thread

Adapter Material: Aluminum, Adapter: 5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter, Pad Diameter: ø50, Stage: 5.5 Stage, Guide Attachment: None, Connection Thread: M20 x 1, Plate Mounting, Male Thread, Vacuum Inlet: NPT1/4, Female Thread

Adapter Material: Aluminum, Adapter: 5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter, Pad Diameter: ø50, Stage: 5.5 Stage, Guide Attachment: None, Connection Thread: M20 x 1, Plate Mounting, Male Thread, Vacuum Inlet: ø10, One-touch Fitting

Adapter Material: Aluminum, Adapter: 5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter, Pad Diameter: ø32, Stage: 5.5 Stage, Guide Attachment: None, Connection Thread: M20 x 1, Plate Mounting, Male Thread, Vacuum Inlet: ø10, One-touch Fitting

LEC-OM02704CN

() 4. (2 PC224 4) A17 CPU A19 3 (Flash-ROM) ROM A17 A19 A1A A20 2 1. (CN2) 2. 3. () A24 (U VW) 1. 2. 3. UVW A24 15 103 15 A25 1. () 23 2. 3. 4. 23 15 104 15 A30 1. PA02 2. 3. 1. 2. 3. 4. LECSC2AC260V LECSC1AC135V 5. 6. 1. 2. A31 1. 2. 3. 1. 2. 4. (PA06PA07) 5. A32 ((A32) OFF/ON 1. (UVW) 2. (IPMIGBT) ON UVW A32 (IPMIGBT) 2. 3.

CHKD/CHKG

A32 A33 A34 Note 1) Dimensions indicated with an asterisk () in the patterns A1, A2, A18, A20, A22, A31, A32, A33, and A34 are provided in the table below.

Adapter Material: Stainless Steel, Stainless Steel 304, Adapter: 5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter, Pad Diameter: ø40, Stage: 2.5 Stage, Guide Attachment: w/Flat Attachment, Connection Thread: M20 x 1, Plate Mounting, Male Thread, Vacuum Inlet: NPT1/4, Female Thread

Adapter Material: Aluminum, Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 40 (ø40), Stage: JT2SF (2.5 Stage), Guide Attachment: WF (w/Flat Attachment), Connection Thread: AG01 (G1/8, Direct Mounting, Male Thread)