ZSE30A(F)/ISE30A

R1/8 (M5 female threaded) Option 2 ISG Nil None Bracket A N01 NPT1/8 (M5 female threaded) ZSM1 Straight type A1 C4H One-touch fitting 4 mm, 5/32 inch C6H One-touch fitting 6 mm Bracket B N7H One-touch fitting 1/4 inch A2 Elbow type C4L One-touch fitting 4 mm, 5/32 inch Bracket C C6L One-touch fitting 6 mm A3 N7L One-touch fitting 1/4 inch Panel mount adapter Unit specifications Option 1 With

Proposals for Energy Saving

(P .E.)

Rotary Actuator

(Example) For M4: L2 = 8 Applicable shaft types: J, K, T Q1 = M L2 + (3 x P) L2 + (3 x P) L2 = L1 + (3 x P) L1 = Q2 = M Q2 = M L2 = [mm] [mm] Size Q1 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size Q2 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Symbol: A35 Symbol: A36 Symbol: A37

Slider Type Ball Screw Drive/11-LEFS Series

L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time [s] T = T1 + T2 + T3 + T4 [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

MRHQ

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

PSxx-OMU0005CN

K T 2 X NPN 2 Y PNP 2 A1 A R NPN 2 + 1 () T PNP 2 + 1 A2 B S NPN 2 + 1 V PNP 2 + 1 1 B D + M SI 3 P psi 2 2: 3kPaMPa 1 ( 2m, ) W M5 M5 01 R1/8 N01 NPT1/8 C4L 4mm C6L 6mm -8No.PS-OMU0005CN-C / A ZS-46-A1 38L (2 ) B ZS-46-A2 38L (2 ) ZS-46-B + ZS-46-D ZS-46-5F 5 2 m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4L 6mm ZS-46-C6L -9No.PS-OMU0005CN-C OUT1 LCD OUT2

17

12 V IC circuit 12 V 5 V, 12 V 12 V IC circuit Relay, PLC Diagnostic indication (2-color indicator) 24 V Yes Grommet 5 V, 12 V IC circuit Water resistant (2-color indicator) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V 3-wire (NPN equivalent) Grommet 24 V A96V A96 IC circuit 5 V Yes A93V2 A93 A90 100 V IC circuit Relay, PLC 2-wire 12 V A90V No 100 V or less 1 Water resistant type auto switches

PSxx-OMS0006CN

-100.0100.0 kPa T 2 N NPN1 P PNP1 A1 A M SI*2 () P (psi)*1 1 2kPaMPa A2 B () M5 M5 M5 B 01 R1/8 N01 NPT1/8 D + 1 L 2m -8No.PS-OMS0006CN-G / A ZS-46-A1 3X8L (2 ) B ZS-46-A2 3X8L (2 ) ZS-46-B + ZS-46-D ZS-46-3L 3 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4H 6mm ZS-46-C6H 1/4 inch ZS-46-N7H 4mm ZS-46-C4L 6mm ZS-46-C6L 1/4 inch ZS-46-N7L -9No.PS-OMS0006CN-G LCD LCD

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

(M5) M5T103rN"'(M5 .03) 10-32Nom. {M5) P Port 1O-32Nom.(M5) @ NVJ100 Dimensions inch (mm) L Type Plug Connec,tor : tWJl14O-OLOO.M3 : tWJ114O-OLOO-M3 M Type Plug Connector: NvJl14O-OMOO-M3 : NVJ114O-O OO-M3 .E 0.10(2.6) Dia 1.03i26.2) [d, [ 8 ; I F l j { i 1L l o t : ffi0r 9 A l ; l { .?

o

(M5) M5T103rN"'(M5 .03) 10-32Nom. {M5) P Port 1O-32Nom.(M5) @ NVJ100 Dimensions inch (mm) L Type Plug Connec,tor : tWJl14O-OLOO.M3 : tWJ114O-OLOO-M3 M Type Plug Connector: NvJl14O-OMOO-M3 : NVJ114O-O OO-M3 .E 0.10(2.6) Dia 1.03i26.2) [d, [ 8 ; I F l j { i 1L l o t : ffi0r 9 A l ; l { .?

o

(M5) M5T103rN"'(M5 .03) 10-32Nom. {M5) P Port 1O-32Nom.(M5) @ NVJ100 Dimensions inch (mm) L Type Plug Connec,tor : tWJl14O-OLOO.M3 : tWJ114O-OLOO-M3 M Type Plug Connector: NvJl14O-OMOO-M3 : NVJ114O-O OO-M3 .E 0.10(2.6) Dia 1.03i26.2) [d, [ 8 ; I F l j { i 1L l o t : ffi0r 9 A l ; l { .?

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

MX Operating Conditions MTS m: Load weight (kg) V : Speed (mm/s) P : Operating pressure (MPa) Mounting orientation: Reexamine operating conditions.

MK

Mounting bolt M5 X 75l M5 X 85l M5 X 80l M5 X 90l M5 X 90l M5 X 100l M5 X 80l M5 X 90l M6 X 105l M6 X 135l M8 X 105l M8 X 135l D 75 85 80 90 90 100 80 90 105 135 105 135 Part No.

PSxx-OML0002CN

3 ISE30A -0.11 MPa Y ZSE30A 0-101 kPa ZSE30AF -100100 kPa K T 2 01 R1/8(M5) N01 NPT1/8 (M5) A1 A C4H 4mm5/32 inch C6H 6mm A2 B NH7 1/4 inch N7H A3 C C4L 4mm5/32 inch C6L 6mm B N7L 1/4 inch D + N NPN1 P PNP1 A NPN2 B PNP2 C NPN1+ D NPN1+ E PNP1+ F PNP1+ 1 L (2 m) 1 (2 m 1 G 1 M SI2 P (psi)1 1NP3 4 1 2kPaMPa -8No.PS-OML0002CN-G / A ZS-38-A1 (M35 L 2 ) B ZS-38-A2 (M35 L

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be found by the following equation.

ARM10/11

AL SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC K K K P P P C C C U U U O O O SMC SMC SMC SMC S S S L L L H H H MADE IN JAPAN K K K P P P C C C U U U O O O S S S L L L H H H Mixed manifold Mixed manifold Front handle/Bottom ported Front handle/Top ported Common exhaust type and individual exhaust type can be mounted on the same manifold base.

ARM10/11

AL SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC K K K P P P C C C U U U O O O SMC SMC SMC SMC S S S L L L H H H MADE IN JAPAN K K K P P P C C C U U U O O O S S S L L L H H H Mixed manifold Mixed manifold Front handle/Bottom ported Front handle/Top ported Common exhaust type and individual exhaust type can be mounted on the same manifold base.

Digital Flow Switch

9 Specifications p. 10 Flow Range p. 11 Analog Output p. 11 Pressure Loss p. 11 IN Side Straight Section and Accuracy p. 12 Internal Circuits and Wiring Examples p. 12 Construction: Parts in Contact with Fluid p. 13 Dimensions p. 13 3-Screen Display Digital Flow Monitor PFG300 Series How to Order p. 14 Specifications p. 15 Internal Circuits and Wiring Examples p. 16

V100

S : : P R 20 20 stations A A + + + + P, R port thread type R port A port size A port M5 x 0.8, C4 P port R P 1/8 M5 M5 x 0.8 P port Nil Rc A 1/8 1/8 C4 4 One-touch fitting F G R port N3 5/32" One-touch fitting N A port M5 x 0.8, C4 NPT 1/8 T NPTF Note) For more than 8 stations, supply/exhaust air to/from both sides of P port and R port.

Table of Contents

Pitch = 21 Individual vacuum supply port Individual vacuum supply port PV Adapter D Adapter D M5 x 0.8 (or M6) Vacuum pad connection port (V port) M5 x 0.8 (or M6) Pitch = 21 M5 x 0.8 (or M6) Vacuum pad connection port (V port) Adsorption nozzle piping port 13-2-57 57 Series ZX Vacuum pad connection V port Vacuum pad connection V port Vacuum Pump System Manifold: Type K1 Common EXH Common