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Rated Vacuum Range: F (-100.0 to 100.0 kPa), Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: M (SI Unit Only), Piping Specification: 01 (R1/8), Lead Wire: w/o Lead Wire, Bracket: A2 [Bracket B (ZS-46-A2)]

Rated Vacuum Range: -100.0 to 100.0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: SI Unit Only, Piping Specification: R1/8, Lead Wire: w/o Lead Wire, Bracket: A2 [Bracket B (ZS-46-A2)], Operation Manual: -

Budafoki ut 107-113 1117 Budapest TEL: 01-371-1343 FAX: 01-371-1344 SOUTH KOREA SMC Pneumatics Korea Co., Ltd. Woolim e-BIZ Center (Room 1008), 170-5, Guro-Dong, Guro-Gu, Seoul, 152-050, South Korea TEL: 02-3219-0700 FAX: 02-3219-0702 ROMANIA SMC Romania S.r.l. Str.

(01) Y31-02 (01) Y41-03 (02) Y51-03 (02) T type interface (3) Pressure switch VHS2000-01 02 02 03 VHS302 03 VHS3000VHS402 03 04 Y24-01 02 Y34-01 02 Y34-03 02 Y44-02 03 Y54-03 04 Residual pressure exhaust 3 port valve Cross interface Y30 Y40 Y50 B210T B310T B310T B410T B510T T type brcket Y20 Y30 Interface G46-10-02 G36-10-01 G36-10-01 G36-2-01 G36-10-01 G36-2-01 G36-2-01 G46-2-02 G46-2-02

roller Hard steel roller Roller plunger VM430-01-06 VM430-01-06S Polyacetal roller Hard steel roller Cross roller plunger VM430-01-07 VM430-01-07S Toggle lever VM430-01-08 VM-30AR Red VM430-01-30R VM-30AB Black VM430-01-30B Push button (Mushroom) VM-30AG Green VM430-01-30G VM-30AY Yellow VM430-01-30Y VM-32AR Red VM430-01-32R VM-32AB Black VM430-01-32B Push button (Extended) VM-32AG Green

= 12.5 x + 10.5] : Length symbols 1 to 40 01 1 L = 23 to 40 L = 510.5 For 1 station manifold to 10 For 10 stations manifold L rPort plug assembly VVQZ2000 CP tPort plug assembly 1.25 P=12.5 5.25 7.5 ZK2 MP1C6 A 35 25 5.5 yOne-touch fitting assembly VVQ1000 51A C8 L Dimension L = 12.5 x n + 10.5 No.

tubing P Effective area [mm2] Min. port size Release button dimensions L A2 M P Q O N Applicable tubing O.D.

Current consumption Compatible encoder Incremental A/B phase (800 pulse/rotation) Battery-less absolute encoder ( 4096 pulses/rotation) LED Details L/A1 Link/Activity1 L/A2 Link/Activity2 LED display PWR Power supply ALM Alarm status RUN EtherCAT communication status. ERR EtherCAT communication error status.

/O.D. mm 5/8 6/9 6.5/10 8/12 8.5/12.5 Symbol 01 02 03 04 Symbol 50 60 65 80 85 175 Series KKH Dimensions/Socket (S) Male thread type (mm) A1 A2 When connected T Connection port size D H Width across flats L2 When connected Effective area mm2 L1 Min. bore size Body size Mass g A2 Model A1 T KKH3S-01MS R 1/8 36.0 6.0 20.4 20.3 33.5 39.1 36.6 14 -02MS 20.2 R 1/4 1/8 34.0 9.0 19.4 31.5 39.5 37.0

3 ISE30A -0.11 MPa Y ZSE30A 0-101 kPa ZSE30AF -100100 kPa K T 2 01 R1/8(M5) N01 NPT1/8 (M5) A1 A C4H 4mm5/32 inch C6H 6mm A2 B NH7 1/4 inch N7H A3 C C4L 4mm5/32 inch C6L 6mm B N7L 1/4 inch D + N NPN1 P PNP1 A NPN2 B PNP2 C NPN1+ D NPN1+ E PNP1+ F PNP1+ 1 L (2 m) 1 (2 m 1 G 1 M SI2 P (psi)1 1NP3 4 1 2kPaMPa -8No.PS-OML0002CN-G / A ZS-38-A1 (M35 L 2 ) B ZS-38-A2 (M35 L

Layout No. 18 Port Port combination: Individual PV Common PS = Common PD Single unit: ZK2FA--L Manifold: ZZK2A-A2-L System Ejector Body type Manifold Exhaust type Individual port exhaust PV pressure can be Vacuum pressure changed per station.

Port combination: Individual PV Common PS = Common PD Layout No. 18 Port Single unit: ZK2F--L Manifold: ZZK2-A2-L System Ejector Body type Manifold Exhaust type Individual port exhaust PV pressure can be Vacuum pressure changed per station.

Red LED is flashing EtherNet/IP connection time out Red LED is ON IP duplicated OFF BUS IN side (P1): No Link, No Activity L/A1 Link/Act Green LED is ON BUS IN side (P1): Link, No Activity Green LED is flashing BUS IN side (P1): Link, Activity OFF BUS OUT side (P2): No Link, Activity L/A2 Link/Act Green LED is ON BUS OUT side (P2): Link, No Activity Green LED is flashing BUS OUT side (P2)

<> (01-144) D RESET SVON <> <>(M24V) (01-145) RESET SVON D <> <> <> RESET SVON (01-146) D <> -65- <> <>(C24V) RESET SVON (01-147) D <> <> <> (01-148) RESET SVON D <> <> (01-149) D RESET SVON <> () Communicati on error. (01-150) D RESET SVON <> (01-192) E <> <> <> ON(SVONON) (01-193) E <>ON(SVON ON) <> Output current limit is exceeded set value (

) Green LED is flashing Link, Activity (Port2, 100 Mbps) L/A2 Orange LED is ON Link, No Activity (Port2, 10 Mbps) Orange LED is flashing Link, Activity (Port2, 10 Mbps) LED is OFF Not connected Green LED is ON Normal operation COM A Green LED is flashing Diagnostics error LED is OFF Not connected Green LED is ON Normal operation COM B Green LED is flashing Diagnostics error LED is OFF Not

block gauge pressure supply block L side L side switch block Nil A B C D E F G H J K L M N O P Q R F.R.L.

block gauge pressure supply block L side L side switch block Nil A B C D E F G H J K L M N O P Q R F.R.L.

L/A1 LED and L/A2 LED Table. 7-2 L/A1 LED and L/A2 LED L/A1 L/A2 Description Green ON --The SI Unit is connect to Ethernet via BUS IN/Port 1. Orange ON --The SI Unit is transmitting or receiving Ethernet data via BUS IN/Port 1. --Green ON The SI Unit is connect to Ethernet via BUS OUT/Port 2. --Orange ON The SI Unit is transmitting or receiving Ethernet data via BUS OUT/Port 2.

(Refer to pages 15-6-3 to 15-6-5 for details.) 15-13-1 Series ASV Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa OUT-Exhaust Flow IN-OUT Flow OUT-Exhaust Flow Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm 2) Effective area (mm 2) Effective area (mm 2) Inlet pressure (MPa) Number of needle