VXA21/22

Refer to p.4.1-74, 4.1-75 for specifications and models.

VZ5000

Compact size (Width: 18 mm) Low power consumption: 1.8 W DC Fluid Air 0.15 to 0.7 0.1 to 0.7 0.15 to 0.7 10 to 50C (No freezing. Refer to page 3-13-4.) 20 or less 50 or less 10 3 Refer to the table below.

2/3 Port Valve

C.O. 4 220V AC 50/60Hz 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 10 5 24V DC 6 12V DC 7 240V AC 50/60Hz 15 2 9 Other 20 3 Option 25 4 1 1 1 2 Valve size 5 to 7 32 5 1 4 1 2 40 6 50 7 Note) Only air operated type.

Low Friction Cylinders Metal Seal Type

(MQQL/MQML) Series Variations Series MQQ Compact low friction cylinders designed for low pressure, low speed, uniform speed or low friction applications Series Bore size (mm) Stroke (mm) Operating pressure range (MPa) Actuation speed (mm/s) 10 20 30 40 50 60 75 100 10 16 20 25 30 40 MQQT Standard type 0.005 to 0.5 0.3 to 300 MQQL Lateral load resisting type (Built-in ball bushing) 0.005 to

Air Cylinder: Standard Type Double Acting, Single Rod Series CJ2 ø6, ø10, ø16 How to Order Bore size 6 6 mm Built-in Magnet Cylinder Model 10 10 mm Suffix the symbol “-A” (Rail mounting style) or 16 16 mm “-B” (Band mounting style) to the end of part Mo

15, 30, 45, 60, 75, 100, 125, 150 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Manufacture of intermediate strokes at 1 mm intervals is possible.

Series KV2 Fittings

Hydrogen Peroxide Kerosene Linseed Oil Lubricating Oil Machine Oil Methyl Ethyl Ketone Mineral Oil Motor Oil Naphtha Nitrate 10% Olive Oil Ozone Ozone Low Conventration Petroleum Petroleum Oils Salt Water Soapy Water Sodium Chloride Sodium Nitrate Sodium Sulfide Sulfuric Acid (H2SO4) 10% Toluene Turpentine Urea Water Zinc Chloride Zinc Sulfate m m m m p p p p m m m m m m m p p p p p p p

XL-OMY0001

-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 XL1A63-2-101 XL1A80-2-101 XL1A50-10-1 XL1A80-10-1 112 2 1 FKM:No.1349-80 [] XL1A16-2-101-XN1 EPDM Barrel Perfluoro Kalrez Chemraz VMQ FKM for R R R PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 R 1Barrel Perfluoro R Kalrez Chemraz Greene, Tweed Technologies, Inc.

High Vacuum L Type Valve

Heater specifications Model XLH-16 XLH-25 XLH-40 XLH-50 Flange (valve) size 16 25 40 50 Valve type Manual type Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3

Electrostatic Sensor Monitor

Do not use a cable longer than 10 m. Consult with SMC for the use with a cable longer than 10 m.

XLF Series

Specifications Model XLF-16 XLF-25 XLF-40 XLF-50 XLF-63 XLF-80 XLF-100 XLF-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the

Pressure Relief 3 Port Valve With Locking Holes

Dimensions (1) Single action type VHS40~50 VHS30 VHS20 Unit (mm) Model Standard Specifications P1 P2 A B C D E F G H I J K L M VHS20 1/8, 1/4 1/8 66.4 22.3 40 37.5 14 46.6 33.6 28 43 24 4.5 14.8 9 VHS30 1/4, 3/8 1/4 80.3 29.4 53 49 19 52 38 30 49 30 4.5 19 9 VHS40 1/4, 3/8, 1/2 3/8 104.9 38.5 70 63 22 58 44 36 63 38 5.5 24 10 VHS40-06 3/4 1/2 110.4 42 75 63 22 58 44 44 63 43 5.5 26 10 VHS50

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

Dimensions n L 2 39 31 3 50 42 4 61 53 5 72 64 6 83 75 7 94 86 8 105 97 9 116 108 10 127 119 11 138 130 12 149 141 13 160 152 14 171 163 15 182 174 16 193 185 17 204 196 18 215 207 19 226 218 20 237 229 L1 L2 1.13-11

Lubricator Series AL10 to 60

Body size 10 20 30 40 50 60 AV Thread type AU Metric thread (M5) Rc NPT G Nil AF N F AL20 Port size AR Body size Symbol Port size M5 1/8 1/4 3/8 1/2 3/4 1 10 20 30 40 50 60 (2) IR M5 01 02 03 04 06 10 Accessory When more than one specification is required, indicate in alphanumeric order. Note 2) For M5 and NPT thread types.

Rotary Clamp Cylinder: Standard ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63 Series MK

Auto switches are included, (but not assembled). 1 Rotary Clamp Cylinder: Standard Series MK Specifications 63 12 16 20 25 32 40 50 Bore size (mm) Double acting 90 10 Clockwise, Counterclockwise Action Rotation angle Note 1) Rotary direction Note 2) Rotary stroke (mm) Clamp stroke (mm) Theoretical clamp force (N) Note 3) 7.5 9.5 15 19 10, 20 20, 50 1400 525 825 40 75 100 185 300 Air 1.5 MPa

Standard Combinations

SUP 1/8 11 (0.60) 10 (0.54) VHS20 1/8 1/4 16 (0.87) 14 (0.76) 1/4 14 (0.76) 16 (0.87) VHS30 OUT IN 1/4 3/8 29 (1.57) 31 (1.68) 1/4 36 (1.95) 27 (1.46) B 3/8 VHS40 3/8 40 (2.17) 38 (2.06) 1/2 42 (2.28) 55 (2.98) Note) Use an air filter on the IN side for operating protection. EXH.

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

7.5 Up to 300 16.5 17 10 19.5 2 22 14 8 40 12 38 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 8 Up to 300 20 17 12 19.5 2 22 18 10 50 13 47 13 8 6 M14 x 1.5 M6 x 1 depth 12 Up to 300 26 19 16 27 2 30 25 14 58 14 58 14 11 7 M18 x 1.5 M8 x 1.25 depth 16 Up to 300 32 27 20 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 27 20 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5

60

90 37.5 49 63 63 76 14 19 22 22 26 46.6 52 58 58 76 33.6 38 44 44 61 28 30 36 44 53 37.5 49 63 63 81 24 30 38 43 50 4.5 4.5 5.5 5.5 6.5 14.8 19 24 26 31 9 9 10 10 12 VHS20 VHS30 VHS40 VHS40-06 VHS50 1/4, 3/8, 1/2 3/4 3/4, 1 Options specifications Model Built-in silencer With bracket N Q R S T U V W X Y AA BB 5.4 6.5 8.5 8.5 11 8.4 10 19 19 27.5 27 36.5 43.5 43.5 49.5 40 53 70 70 90 75.4

XLDV Series

x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Leakage Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperature, excluding gas permeation Flange type KF(NW) KF(NW),K(DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Note 2 Surface treatment for body Outside: hard

Electro-Pneumatic Positioner

IP8000 IP8100 Type Item Lever type lever feedback Rotary type cam feedback Single action Double action Single action Double action Input current Input resistance Supply air pressure Standard stroke Sensitivity Linearity Hysteresis Repeatability Coefficient of temperature 4 to 20mADC Note 1) 23515 (4 to 20mADC) 0.14 to 0.7MPa 10 to 85mm (Deflection angle 10 to 30) 60 to 100 Note 2) Within

FQ1

Fiber element (PP) Part number Dimensions Filtration accuracy (m) Element symbol FQ1 0 1 0 M005N B 04 N 0.5 1 5 10 20 50 75 100 EHM10AX3 EHM39R10AYX3 EHM23R10AYX3 EHM19R10AYX3 EHM15R10AX3 EHM11R10AX3 EHM10R10AX3 EHM8R10AX3 QX50 Q001 Q005 Q010 Q020 Q050 Q075 Q100 Element type Select from tables on the right.