Process Pump <Fluororesin Type> Series PA3000

[ANR]) Discharge pressure (MPa) 0.4MPa Discharge flow rate (l/min) SUP = 0.5MPa 0.3 0.3MPa SUP = 0.5MPa 150 10 0.4MPa SUP = 0.5MPa 0.2MPa 0.4MPa 0.2 100 0.3MPa 0.3MPa 5 0.2MPa 0.1 50 0.2MPa 00 5 10 00 5 10 15 00 50 100 150 Flow rate (l/min) Air consumption (l/min [ANR]) Operating cycle (Hz) 4 Series PA3000 Dimensions PAm331m-m03 152 4-7 64 2-M5 with depth 8 139 10 10 120 95 Bottom view

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111 124 150 176 188 K 5 4 11 8 10 15 16 25 26 V A 4 4 4 8 8 8 10 T C 8 14 14 26 32 32 41 L 35 38 57 66 70 80 92 110 122 MM NA 10 14 17 24 30 36 46 55 69 Model 12-CY3B6 12-CY3B10 12-CY3B15 12-CY3B20 12-CY3B25

CYV

5 !1 !9 #4 #8 E @7 o !0 i @8 !8 !6 $2 #2 !3 #3 !7 !2 @5 @4 r @3 e @6 @1 @2 #1 t y $1 u w q E' Section E-E' CYV32 t !9 $0 @1 @2 y @4 @3 u @6 #9 @5 Description Material Note Parts list Description Material Note No. No.



Note 5) With sub-plate.

PSxx-OML0002CN

DC1224 V10 DC12 24 V10 9 DC(+) DC(-) / / 10 ( ) 11 / 5 m / 12 1015 10 "-M" (kPaMPa) ( ) "-M" 13 SI kPa,MPa -53No.PS-OML0002CN-G No. 14 15 16 FUNC 17 4 m 4 m FUNC 18 10 10 () 19 () ( ) () / -54No.PS-OML0002CN-G 80 mA 7 F.S.(3.5F.S.)1 1 F.S. -55No.PS-OML0002CN-G ZSE30A() ZSE30AF() ISE30A() 0.0-101.0 kPa -100.0100.0 kPa -0.1001.000 MPa 10.0-105.0 kPa -105.0105.0 kPa -0.1051.050

VP4

1 Large Size 5 Port Solenoid Valve Rubber Seal Series VP450/470 How to Order VK VP4 1 T 10 0 5 1 VZ VF Series VP 5 port solenoid valve Thread type Rc G NPT NPTF T N F Nil VFR Type of actuation VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 position single 1

Guide Cylinder Series MGG

5 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 A' For ball bushing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.

11-cu-e

Free Mount Cylinder/Double Acting, Single Rod Series CU 10, 16, 20, 25, 32 Construction With auto switch Actuators Modular F.R.L. Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure Actuators Modular F.R.L. Pressure Control Equipment Industrial Filters 10 !5 !4 !6 !5 !4 !6 16 to 32 !5 !4 !6 !5 !4 !

Multistage Ejector Series ZL112/212 1

10 0 0 1 2 3 4 5 6 7 8 9 10 11 12 1 2 3 4 5 6 Time to reach vacuum (S) Time to reach vacuum (S) The graphics indicate the time required to reach a vacuum pressure determined by adsorption conditions for workpieces, etc., starting from atmospheric pressure in a 1 sealed tank.

Vacuum Pad

5 22 28 A B 50 5 5 M14 x 1 M8 x 1.25 Gasket M8 x 1.25 Gasket M14 x 1 Width across flats 21 Width across flats 21 50 4 50 4 4.5 4.5 Dimensions Dimensions Part no.

AC Servo Motor Driver (MECHATROLINK-II type)

LEY63 LEY63D Lead symbol A B C L A B C Series Lead 5(2.86) (Including pulley 20 10 5 20 10 5 (Pulley ratio 4/7) ratio) Initial value Recommended value Parameter *1,*2 Para.

PSxx-OMU0002CN

5/32 inch 4 mm 6 mm 1/4 inch 5/32 inch () PBTCB156PPSO HNBR C3604( ) POMSUS304NBRC3604 SUS304NBR 24 g 34 g 36 g 27 g 28 g 29 g 30 g 30 g 36 g +39 g 0.15mm 2(AWG26) 1.0 mm (5 ) 3.5 -77No.PS-OMU0002CN-D M5 42.6 7 M50.8 3.5 01/N01 A 01 R1/8 10 N01 NPT1/8 12 C4HC6HN7H 2.5 A B C4H 15.6 8 C6H 16.5 10 N7H 16 10.3 C4LC6LN7L C A B C D C4L 15.2 17.5 4 8.2 C6L 15.2 18.3 4 10.4

AC Servo Motor Driver (MECHATROLINK-III type)

LEY63 LEY63D Lead symbol A B C L A B C Series Lead 5(2.86) (Including pulley 20 10 5 20 10 5 (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.

PSxx-OMM0002CN

OUT1 6 7 OUT2 8 OUT2 -N-P 9 OUT2 10 OUT2 11 12 -R-S-T-V 13 14 15 16 17 18 19 20 2 -37No.PS-OMM0002CN-F [F99] <> [F99] [ON] 5 [oFF] [F99] -38No.PS-OMM0002CN-F / ()() 1 "Hi" 1 1 "Lo" 1 1 () 10%0 (1dight ) 1 LoC1 () < -> 5 LoCUnL () / -39No.PS-OMM0002CN-F < -> 5 [UnL] [LoC] 5 [LoC] [UnL] 41/ [UnL] [FAL] 3[LoC] -40No.PS-OMM0002CN-F [000] <>

Series KV2 Fittings

(g) Bag/Box Quantity MB D2 D3 D4 L1 L2 L3 5/32 5/32 5/32 1/4** 1/4** 1/4 1/4 1/4 3/8** 3/8** 3/8 3/8 3/8 3/8 1/2 1/2 1/2 5/8 5/8 5/32 5/32 5/32 3/8 3/8 1/4 1/4 1/4 1/2 1/2 3/8 3/8 3/8 3/8 1/2 1/2 1/2 5/8 5/8 1/16-27 1/8-27 1/4-18 1/4-18 3/8-18 1/8-27 1/4-18 3/8-18 3/8-14 1/2-14 1/8-27 1/4-18 3/8-18 1/2-14 1/4-18 3/8-18 1/2-14 3/8-18 1/2-14 KV2T03-33S KV2T03-34S KV2T03-35S KV2T07-11-35S KV2T07

VXP21/22/23

) Oil (Standard) (D, E) High temperature oil (3) (S) (D) 99 100 183 AC DC AC DC 60 40 80 60 60 40 40 60 Maximum Minimum 1 10 5 (2) 10 (1) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E etc. in parentheses are option symbols.

MLGC

model Bore size (mm) 40 32 25 20 D-B7/B80 D-B73C/B80C D-C7/C80 D-C73C/C80C D-B5/B64 8 10 9 10 8 10 9 10 8 13 8 10 13 10 9 14 9 10 14 10 D-B59W D-G79/K79/K79C D-H7BAL D-H7/H7W/H7NF 4 4 4.5 5 7 8.5 9 10 D-H7C D-G5/K59 D-G5W/K59W D-G5NTL/G5BAL 4 4 4.5 5 6 45 D-G59F D-G5NBL 5 35 5 40 5.5 40 Since this is a guideline including hysteresis, not meant to be guaranteed.

MLGC

model Bore size (mm) 40 32 25 20 D-B7/B80 D-B73C/B80C D-C7/C80 D-C73C/C80C D-B5/B64 8 10 9 10 8 10 9 10 8 13 8 10 13 10 9 14 9 10 14 10 D-B59W D-G79/K79/K79C D-H7BAL D-H7/H7W/H7NF 4 4 4.5 5 7 8.5 9 10 D-H7C D-G5/K59 D-G5W/K59W D-G5NTL/G5BAL 4 4 4.5 5 6 45 D-G59F D-G5NBL 5 35 5 40 5.5 40 Since this is a guideline including hysteresis, not meant to be guaranteed.

EX600-DX_DY_DM_eng

13 12 7 6 5 7 6 5 Group Group Pin number Pin number Pin number 3 3 1 0 1 0 2 2 13 11 13 11 12 12 10 10 8 6 8 6 5 3 1 9 7 9 7 4 2 5 3 1 5 3 1 4 2 4 2 Pin number Pin number 4 3 2 1 4 3 2 1 4 3 2 1 4 3 2 1 4 3 2 1 4 3 2 1 4 3 2 4 3 2 1 EX600-DMPE EX600-DMPF EX600-DYPE EX600-DYPF 0 V (output) 24 V (output) 0 V (output) 24 V (output) 0 V (output) 24 V (output) 0 V (output) 24 V (output) 0 V (output

Series VCL

Electrical entry Orifice size CConduit GGrommet Class 3 Class 2 Orifice diameter 2mm 3mm 4mm 5mm 7mm 10mm Class 4 Symbol 2 3 4 5 7 10 Refer to the table below for orifice and port size combinations.