LX Series Compact Electric Actuators Model N E F LXFHSB _ 25 1 5 1 160 138 60 30 (50) LXFHSB _ 50 176 145 90 60 (50) LXFHSB _. 75 6 201 210 188 90 60 100 LXFHsB _ 100 6 226 235 213 90 60 100 tlsclriD lclltolo 0inffsifls . $lid8 $crul{ Tyfr LXFHSSfI EE r4iil & *l t30omm) Thread I Deep [ ] shows lhe location at which origin poinl switch operales.
Model N E F LXFHSB _ 25 1 5 1 160 138 60 30 (50) LXFHSB _ 50 176 145 90 60 (50) LXFHSB _. 75 6 201 210 188 90 60 100 LXFHsB _ 100 6 226 235 213 90 60 100 tlsclriD lclltolo 0inffsifls .
8 18 18 4.5 4.5 7 13 8 18 18 22 4.5 4.5 3.5 2.5 14 13 8 9 18 18 29 29 3.5 3.5 4.5 4.5 Auto Switch Mounting When using the solid state auto switch (D-M9), mount it in the illustrated direction.
MXP6 : Adjustable on one side only) 0 to 5mm on one side only 0 to 6mm on one side only Rubber stopper 0 to 3 mm at both ends Stroke adjustment range 0 to 5 mm at both ends 0 to 4 mm at both ends Metal stopper +1 0 mm Stroke length tolerance 11-: Fluorine grease Grease 22-: Lithium soap base grease Grade 1 Grade 1 Without adjuster Particle generation grade (Refer to front matter pages 13
Dimensions (mm) 1in = 25.4mm MSUA7 MSUA7-S, SE Scale: 60% Top ports/MSUA7-SE C 8-M4 x 0.7 depth 8 A port B port 67 13 2-M5 x 0.8 14 B 41 50 33 37 4-M5 x 0.8 depth 7 22.5 5 +0.025 0 3H9 A Long groove depth 5 (positioning pin hole) 22.5 47h9 0 0.062 +0.052 0 26H9 36 +0.030 0 3-4H9 depth 4 ( A , B , C ) 4 3 2-5.5 through 3-R2 3-R2 4.5 19 10.5 13 48h9 0 0.062 36 7 6 22.3 10.5 44 3 11 10 58.5
13 P 55 55 53 70 70 90 90 Q 2.3 2.3 2.3 2.3 2.3 3.2 3.2 S 25 26 31 35.5 37 T 28.5 32.5 38.5 42.5 42.5 AR20K AR25K AR30K AR40K AR40K-06 AR50K AR60K 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 0 3.5 3.5 3 3.3 3.3 Note) For AR20K only, the position of the pressure gauge is above the center of the piping. 48
Vahs e, Gasket, Manifold / Subphftn Base Blnnk PlateAss'g DXT192-13-1A EXH Relocation SpacerAss'y oxT192-21-1A -*t\ f i"oor*n"o,ro" s.'.. lT ll I Base oounred tYPe *-l i.,.,!t, i J ,li,l,,,'i '1 "'\" ')'t' :' t't I I ir --)2' i .. il ."'i 3sskt i D-tn6t1oi .'.'
B 35 40.5 QA 6 8 QB 13 16 QV 33 38.5 A 47 58 Bore size (mm) 40 50 21 Adjustable Mounting Height Type Series RSG Rod End Configuration Lever Type with Integrated Shock Absorber Variable energy absorbing type/Flange mounting These drawings (2 items) show the piston rod extended.
Japanese N ...North American No Of Needle Revolutions 10 Turns / 8 Turns (AS1001F) Applicable Tube Material Nylon, Soft Nylon, Polyurethane A P P L I C A B L E T U B E OD B O D Y S I Z E mm 23 32 04 4 06 6 08 8 10 10 12 12 Inch 01 1/8 03 5/32 05 3/16 07 1/4 09 5/16 11 3/8 13 1/2 100 ...M5 (04, 06) 200 ...1/8 (04, 06) 205 ...1/4 (06, 08) 300 ...3/8 (06, 08, 10, 12) 400 ...1/2 (10, 12) W I
Vahs e, Gasket, Manifold / Subphftn Base Blnnk PlateAss'g DXT192-13-1A EXH Relocation SpacerAss'y oxT192-21-1A -*t\ f i"oor*n"o,ro" s.'.. lT ll I Base oounred tYPe *-l i.,.,!t, i J ,li,l,,,'i '1 "'\" ')'t' :' t't I I ir --)2' i .. il ."'i 3sskt i D-tn6t1oi .'.'
See Specific Product Precautions. 0.2 GD 0 0 10 20 30 40 50 Operating temperature (C) Port size Model Rated flow (L/min (ANR)) Note 1) Weight 60 80 100 100 100 100 300 400 500 500 35 g 35 g 35 g 35 g 60 g 150 g 190 g 190 g 190 g 260 g 4 (One-touch fittings) 6 (One-touch fittings) 8 (One-touch fittings) Rc, NPT, G 1/4 Rc, NPT, G 1/4 Rc, NPT, G 1/4 8 (One-touch fittings) 10 (One-touch fittings
Fittings & Tubing Air Cylinders Rotary Actuators Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R GC GB E GA MM D C J 2.8 2 x P through A 4 x T counterbore E 0.5 B H S Z (mm) 6 depth 4.8 5 S 10 15 20 25 30 5 Z 10 15 20 25 30 Bore size B C D E GA GB GC H J MM P R T A 13 22 3 23 16 15 13 10 3.2 7 M3 x 0.5 31 10 7 6 10 15 24 4 24 33.5 16 15.5 16 11 M4 x 0.7 3.2 9 6 depth 5 64 69 74 79 84 89
CEU5 13 23m 23m () CEU5 11 AC 10 70500mm/s 12 6-2 5,6, 12 5 5,12 10 ?
Part Material Note 1 Body (A) Aluminum Alloy White 2 Body (B) Aluminum Alloy White 3 Vane Shaft Carbon Steel (NBR) 4 Stopper Aluminum Die Casting For 90 5 Stopper Resin For 90 6 Stopper Aluminum Die Casting For 100 7 Bearing Bearing Steel 8 Back-up Ring Stainless Steel 9 Hexagon Socket Head Cap Screw Stainless Steel Special bolt 10 O-ring NBR 11 O-ring NBR 12 Stopper Packing NBR 13 Parallel
For Deionized Water and Chemicals Digital Flow Switch Series PF2D How to Order Remote Type Sensor Unit C PF2D5 13 20 1 Option (Refer to page 55.) Flow rate range None e-con connector x 1 pc. Nil C 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min 04 20 40 The cable and connector are shipped unassembled.
1 q t i Series PF2D For Deionized Water and Chemicals Digital Flow Switch Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuits and wiring examples 60 70 176 z to , are terminal numbers.
Polyurethane tube for piping 4 (TU0425BU-100) 2m Conversion cable 1pc. 4 - 2.
MPa ZSE20A [P_1] OUT1 -50.5 kPa [P_2] OUT2 -50.5 kPa [H_1] OUT1 5.1 kPa [H_2] OUT2 5.1 kPa ZSE20AF [P_1] OUT1 50.0 kPa [P_2] OUT2 50.0 kPa [H_1] OUT1 5.0 kPa [H_2] OUT2 5.0 kPa 1 -23No.PS-OMU0002CN-D 3 3 3 () <> 3() 3(P_1n_1P_2n_2)(H_1H_2) () 1 () 1 1 1[-](( 61)) -24No.PS-OMU0002CN-D (P1LP1H) 24P1L()P1H()WH1() (n1Ln1H) 33 OUT2 [F 1]OUT1[F 2]OUT2// -25No.PS-OMU0002CN-D <> () () 13
ZSE20CF [P_1] OUT1 50.0 kPa [P_2] OUT2 50.0 kPa [H_1] OUT1 5.0 kPa [H_2] OUT2 5.0 kPa ISE20CH [P_1] OUT1 1.000 MPa [P_2] OUT2 1.000 MPa [H_1] OUT1 0.100 MPa [H_2] OUT2 0.100 MPa 1 -25No.PS-OMU0008CN-D 3 3 3 () <> 3() 3(P_1n_1P_2n_2)(H_1H_2) () 1 () 1 1 1[-](( 63)) -26No.PS-OMU0008CN-D (P1LP1H) 26P1L()P1H()WH1() (n1Ln1H) 35 OUT2 [F 1]OUT1[F 2]OUT2// -27No.PS-OMU0008CN-D <> () () 13